Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1989Investigation of soft x-ray emission from the plasma focus.
Richter, F.; Eberle, J.; Holz, R.; Neff, W.; Lebert, R.
Conference Paper
1989The plasma focus as soft x-ray source for microscopy and lithography.
Richter, F.; Eberle, J.; Holz, R.; Neff, W.; Lebert, R.
Conference Paper
1989Der Plasmafokus. Eine neue Röntgenquelle für die Röntgenmikroskopie und Röntgenlithographie
Eberle, J.; Holz, C.; Neff, W.; Richter, F.; Noll, R.; Lebert, R.
Journal Article
1989Repetitive plasma focus as radiation source for X-ray lithography.
Richter, F.; Eberle, J.; Holz, R.; Neff, W.; Lebert, R.
Conference Paper
1989A source for soft x-ray imaging microscopy with nanosecond exposure time.
Richter, F.; Eberle, J.; Holz, R.; Neff, W.; Lebert, R.
Conference Paper
1988A plasma focus as a radiation source for a laboratory x-ray microscope
Neff, W.; Eberle, J.; Holz, R.; Richter, F.; Lebert, R.
Book Article
1985Plasma focus as a radiation source for X-ray lithography
Eberle, J.; Krompholz, H.; Lebert, R.; Neff, W.; Noll, R.
Journal Article