Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019International round-robin experiment for angle-resolved light scattering measurement
Finck, A. von; Herffurth, T.; Duparre, A.; Schröder, S.; Lequime, M.; Zerrad, M.; Liukaityte, S.; Amra, C.; Achour, S.; Chalony, M.; Kuperman, Q.; Cornil, Y.; Bialek, A.; Goodman, T.; Greenwell, C.; Gur, B.; Brinkers, S.; Otter, G.; Vosteen, A.; Stover, J.; Vink, R.; Deep, A.; Doyle, D.
Journal Article
2018New light absorbing material for grazing angles
Yevtushenko, A.; Finck, A. von; Katsir, D.; Duparré, A.
Conference Paper
2018Wettability behavior of oleophilic and oleophobic nanorough surfaces in air or immersed in water
Coriand, L.; Felde, N.; Duparre, A.
Book Article
2017Defined wetting properties of optical surfaces
Felde, N.; Coriand, L.; Schröder, S.; Duparré, A.; Tünnermann, A.
Journal Article
2017Light scattering characterization of optical components for space applications
Hauptvogel, M.; Trost, M.; Costille, A.; Penka, D.; Zeitner, U.D.; Schröder, S.; Duparré, A.
Conference Paper
2017Light scattering techniques for the characterization of optical components
Hauptvogel, M.; Schröder, S.; Herffurth, T.; Trost, M.; Finck, A. von; Duparré, A.; Weigel, T.
Conference Paper
2017Optische Beschichtung und Verfahren zur Herstellung einer optischen Beschichtung mit verminderter Lichtstreuung
Finck, Alexander von; Schröder, Sven; Wilbrandt, Steffen; Stenzel, Olaf; Duparré, Angela
Patent
2017Topical issue on optical surfaces
Duparre, A.
Journal Article
2017Vane-free design for star trackers and telescopes
Yevtushenko, A.; Finck, A. von; Katsir, D.; Shfaram, H.; Duparré, A.
Conference Paper
2016Beschichtung für eine Glasoberfläche, Verfahren zu deren Herstellung und Glaselement
Felde, Nadja; Coriand, Luisa; Duparré, Angela; Notni, Gunther
Patent
2016Determination of the Wenzel roughness parameter by the Power Spectral Density of functional Alumina surfaces
Jardim, P.L.G.; Horowitz, F.; Felde, N.; Schröder, S.; Coriand, L.; Duparre, A.
Journal Article
2016Funktionale Beschichtung und Verfahren zu deren Herstellung
Felde, Nadja; Coriand, Luisa; Duparré, Angela; Dannberg, Peter; Notni, Gunther
Patent
2016Hochtemperatur-Stabilität optikrelevanter Eigenschaften von transparenter MgAl2O4-Spinell-Keramik
Reichel, Uwe; Notni, Gunther; Duparré, Angela; Müller, F.A.; König, Stefan; Herold, Volker
Book Article
2016Mechanically durable optical coatings with adjustable wetting properties
Felde, N.; Duparre, A.; Tünnermann, A.
Conference Paper
2016Reduction of light scattering from contamination by thin film coating design
Finck, Alexander von; Wang, Yuan; Schröder, Sven; Wilbrandt, Steffen; Stenzel, Olaf; Duparré, Angela
Conference Paper
2016Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering
Trost, M.; Schröder, S.; Yulin, S.; Duparre, A.
Conference Paper
2016Scatter reduction of calcium fluoride based DUV optics
Wang, J.; Cangemi, M.J.; Oudard, J.F.; Trost, M.; Herffurth, T.; Schröder, S.; Duparre, A.
Conference Paper
2016Spectral damage testing of thin film coatings
Schröder, S.; Garrick, M.; Trost, M.; Wilbrandt, S.; Stenzel, O.; Duparre, A.
Conference Paper
2016Wear-Resistant Nanostructured Sol-Gel Coatings for Functional Applications
Felde, N.; Coriand, L.; Duparré, A.; Tünnermann, A.
Journal Article
2015Angle resolved backscatter of HfO2/SiO2 multilayer mirror at 1064 nm
Wang, J.; Schröder, S.; Trost, M.; Hauptvogel, M.; Duparre, A.
Conference Paper
2015Open questions in surface topography measurement: A roadmap
Leach, R.; Evans, C.; He, Liangyu; Davies, A.; Duparre, A.; Henning, A.; Jones, C.W.; O'Connor, D.
Journal Article
2015Origins of light scattering from thin film coatings
Schröder, Sven; Trost, Marcus; Garrick, Méabh; Duparré, Angela; Cheng, Xinbin; Zhang, Jinlong; Wang, Zhanshan
Journal Article
2015Parallelized multichannel BSDF measurements
Finck, A. von; Trost, M.; Schröder, S.; Duparré, A.
Journal Article
2015Relationship between the roughness and oleophilicity of functional surfaces
Coriand, L.; Rettenmayr, M.; Duparre, A.
Book Article
2015Standardization of light scattering measurements
Schröder, S.; von Finck, A.; Duparré, A.
Journal Article
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, A. von; Herffurth, T.; Schröder, S.; Duparre, A.; Sinzinger, S.
Journal Article
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Sinzinger, Stefan
Journal Article
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Light scattering characterization of optical components – BRDF, BTDF and scatter losses
Schröder, Sven; Finck, Alexander von; Katsir, Dina; Zeitner, Uwe; Duparré, Angela
Conference Paper
2014Observation of the waveguide resonance in a periodically patterned high refractive index broadband antireflection coating
Stenzel, Olaf; Wilbrandt, Steffen; Chen, Xiaoying; Schlegel, Ralph; Coriand, Luisa; Duparré, Angela; Zeitner, Uwe; Benkenstein, Tino; Wächter, Christoph
Journal Article
2014Optical interference coatings measurement problem 2013
Duparré, Angela; Ristau, Detlev
Journal Article
2014Protected and enhanced aluminum mirrors for the VUV
Wilbrandt, Steffen; Stenzel, Olaf; Nakamura, Hiroshi; Wulff-Molder, Dirk; Duparré, Angela; Kaiser, Norbert
Journal Article
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Scattering reduction through oblique multilayer deposition
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Cheng, Xinbin; Zhang, Jinlong; Duparré, Angela
Journal Article
2013Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John
Conference Paper
2013Assessment criteria for superhydrophobic surfaces with stochastic roughness
Duparré, Angela; Coriand, Luisa
Book Article
2013Compact light scatter techniques for optical coatings
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela
Conference Paper
2013Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Estimating hemispherical scatter from incident plane measurements of isotropic samples scattering from both bulk and surface irregularities
Stover, J.C.; Schroeder, S.; Finck, A. von; Unglaub, D.; Duparré, A.
Conference Paper
2013Evaluation of subsurface damage by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schmitz, David; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Journal Article
2013Low-scatter HfO2/SiO2 multilayer enhanced mirror for 1064 nm
Wang, J.; Schreiber, H.; Schröder, S.; Hauptvogel, M.; Duparré, A.
Conference Paper
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Roughness, optical and wetting properties of nanostructured thin films
Schröder, Sven; Coriand, Luisa; Duparré, Angela
Conference Paper
2013Scattering reduction through oblique multilayer deposition
Trost, Marcus; Schröder, Sven; Duparré, Angela; Tünnerman, Anderas
Conference Paper
2013Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Duparré, Angela
Conference Paper
2013Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Trost, Marcus; Schröder, Sven; Duparré, Angela; Risse, Stefan; Feigl, Torsten; Zeitner, Uwe D.; Tünnermann, Andreas
Journal Article
2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Abrollen, abperlen, spreiten
Duparré, Angela; Coriand, Luisa
Journal Article
2012Estimating hemispherical scatter from incident plane measurements of isotropic samples
Stover, John; Schröder, Sven; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela
Conference Paper
2012Light scattering-based measurement of relevant surface roughness
Schröder, Sven; Trost, Marcus; Coriand, Luisa; Duparré, Angela
Conference Paper
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Quality assessment of precision optical surfaces through light scattering techniques
Schröder, Sven; Finck, Alexander von; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2012Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Total integrated scatter from surfaces with arbitrary roughness, correlation widths and incident angles
Harvey, James; Schröder, Sven; Choi, Narak; Duparré, Angela
Journal Article
2012Upper roughness limitations on the TIS/RMS relationship
Stover, John; Schröder, Sven; Duparré, Angela; Germer, Thomas A.
Conference Paper
2012Vorrichtung und Verfahren zur winkelaufgelösten Streulichmessung
Trost, Marcus; Schröder, Sven; Hauptvogel, Matthias; Nothni, G.; Duparré, Angela; Feigl, T.
Patent
2011Angle resolved scattering: An effective method for characterizing thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparre, A.
Journal Article
2011Definition of roughness structures for superhydrophobic and hydrophilic optical coatings on glass
Coriand, L.; Mitterhuber, M.; Duparre, A.; Tünnermann, A.
Journal Article
2011Determining parametric TIS behavior from optical fabrication metrology data
Harvey, J.E.; Schröder, S.; Choi, N.; Duparre, A.
Conference Paper
2011Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E.
Conference Paper
2011Impact of surface roughness on scatter losses and the scattering distribution of surfaces and thin film coatings
Schröder, S.; Herffurth, T.; Duparre, A.
Conference Paper
2011Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2011Instrument for close-to-process light scatter measurements of thin film coatings and substrates
Finck, A. von; Hauptvogel, M.; Duparre, A.
Journal Article
2011Kompakter streulichtbasierter Rauheitssensor
Herffurth, T.; Hauptvogel, M.; Duparré, A.; Tünnermann, A.; Notni, G.; Tünnermann, A.
Journal Article, Conference Paper
2011Modeling of light scattering in different regimes of surface roughness
Schröder, S.; Duparre, A.; Coriand, L.; Tünnermann, A.; Penalvar, D.H.; Harvey, J.E.
Journal Article
2011Nickel plated metal mirrors for advanced applications
Gebhardt, A.; Scheiding, S.; Kinast, J.; Risse, S.; Duparré, A.; Trost, M.; Rohloff, R.-R.; Schönherr, V.; Giggel, V.; Löscher, H.
Conference Paper
2011Optical interference coatings 2010 measurement problem
Duparre, A.; Ristau, D.
Journal Article
2011Rauheitsbewertung auf fertigungsrelevanten Oberflächen mittels Streulichtverfahren
Duparré, A.; Trost, M.
Conference Paper
2011Rauheitsbewertung auf fertigungsrelevanten Oberflächen mittels Streulichtverfahren
Duparré, A.
Conference Paper
2011Registrierung multimodaler Messungen am Beispiel eines MEMS
Zimmermann, Jan; Sawodny, Oliver; Lyda, Wolfram; Burla, Avinash; Osten, Wolfgang; Eigenbrod, Hartmut; Westkämper, Engelbert; Shaw, Laura; Weckenmann, Albert; Herffurth, Tobias; Duparré, Angela; Tünnermann, Andreas; Staude, Andreas; Goebbels, Jürgen
Book Article
2011Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Conference Paper
2011Table-Top Streulichtmesssystem ALBATROSS-TT
Finck, A. von; Hauptvogel, M.; Duparré, A.; Notni, G.; Tünnermann, A.
Journal Article, Conference Paper
2010Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: Measurement and analysis
Schröder, S.; Herffurth, T.; Trost, M.; Duparre, A.
Journal Article
2010ARS: An effective method for characterizing structural and alteration effects in thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparré, A.
Conference Paper
2010Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N.
Conference Paper
2010Bewertung der Poliergüte schwer zugänglicher Oberflächen durch Streulichtmethoden
Schröder, S.; Trost, M.; Herffurth, T.; Duparré, A.
Abstract
2010Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.
Conference Paper
2010Instrument for close-to-process light scatter measurements of thin film coatings and substrates
Finck, A.V.; Hauptvogel, M.; Duparré, A.
Conference Paper
2010Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N.
Journal Article
2010OIC 2010 measurement problem
Duparré, A.; Ristau, D.
Conference Paper
2010PSD-Analyse: Schlüssel zur funktionsgerechten Rauheitscharakterisierung optischer Oberflächen
Coriand, L.; Schröder, S.; Duparré, A.
Abstract
2010Roughness measurement of ultra precision surfaces using light scattering techniques and analysis
Herffurth, T.; Schröder, S.; Trost, M.; Duparre, A.
Conference Paper
2010Roughness structures of ultrahydrophobic and hydrophilic coatings on glass
Coriand, L.; Mitterhuber, M.; Duparre, A.
Conference Paper
2010Scattering of roughened TCO films - Modeling and measurement
Schröder, S.; Duparre, A.; Füchsel, K.; Kaiser, N.; Harvey, J.E.; Tünnermann, A.
Conference Paper
2010Separation von Streulichteffekten zur zerstörungsfreien Detektion von Sub-Surface-Damage
Schmitz, D.; Schröder, S.; Duparré, A.
Abstract
2009Angle resolved scattering: A method for investigations of laser induced damage
Schröder, S.; Duparre, A.
Conference Paper
2009Makyoh-Imaging zur Charakterisierung reflektierender Oberflächen
Finck, A. von; Duparre, A.; Pfeffer, M.
Journal Article
2009Roughness determination of ultra thin multilayer coatings in cross-section images with poor SNR using edge localization
Brauer-Burchardt, C.; Schröder, S.; Trost, M.; Kuhmstedt, P.; Duparre, A.; Notni, G.
Conference Paper
2009Ultra-hydrophobicity through stochastic surface roughness
Flemming, M.; Coriand, L.; Duparre, A.
Journal Article
2009Ultra-hydrophobicity through stochastic surface roughness
Flemming, M.; Coriand, L.; Duparre, A.
Book Article
2009Vorrichtung und Verfahren zur winkelaufgeloesten Streulichtmessung
Schröder, S.; Duparre, A.; Herffurth, T.; Notni, G.
Patent
2008Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A.
Journal Article
2008Finish assessment of complex surfaces by advanced light scattering techniques
Schröder, S.; Duparre, A.
Conference Paper
2008Image capture and processing for a microoptical compound-eye sensor
Tudela, R.; Brückner, A.; Duparre, A.; Bräuer, A.
Conference Paper
2008Metal mirrors with excellent figure and roughness
Steinkopf, R.; Gebhardt, A.; Scheiding, S.; Rohde, M.; Stenzel, O.; Gliech, S.; Giggel, V.; Löscher, H.; Ullrich, G.; Rucks, P.; Duparre, A.; Risse, S.; Eberhardt, R.; Tünnermann, A.
Conference Paper
2008Optical Interference Coatings 2007 Measurement Problem
Duparre, A.; Ristau, D.
Journal Article
2008Roughness evolution and scatter losses of multilayers for 193 nm optics
Schröder, S.; Duparre, A.; Tünnermann, A.
Journal Article
2008Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A.
Conference Paper
2008Surface/microstructure inspection
Duparre, A.
Book Article
2008Wavelet filtering of fractal surfaces
Bakucz, P.; Schröder, S.; Krüger-Sehm, R.; Duparre, A.; Tünnermann, A.
Journal Article
2007Characterization of thin films and bulk materials for DUV optical components
Schröder, S.; Kamprath, M.; Duparre, A.
Conference Paper
2007Charakterisierung von Mikro- und Nanostrukturen für funktionale Oberflächen und Schichten
Duparre, A.
Book Article
2007EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2007Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2007Light scattering techniques for the inspection of microcomponents and microstructures
Duparre, A.
Book Article
2007Measurement Problems
Duparre, A.; Ristau, D.
Conference Paper
2007Roughness evolution and scatter losses of multilayers for 193 nm
Schröder, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2007Scanning force microscopy of coatings and nanostructured surfaces
Flemming, M.; Duparre, A.
Conference Paper
2007Schmutzabweisende raue Oberflächen mit optischer Qualität
Duparre, A.
Journal Article
2007UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A.
Conference Paper
2006Bewertung von Nanorauheiten durch Streulichtmessung
Schröder, S.; Duparre, A.; Tünnermann, A.
Journal Article
2006Bulk scattering properties of synthetic fused silica at 193 nm
Schröder, S.; Kamprath, M.; Duparre, A.; Tünnermann, A.; Kühn, B.; Klett, U.
Journal Article
2006Design and characterization of nanostructured ultra-hydrophobic coatings
Flemming, M.; Duparre, A.
Journal Article
2006Kameramodul, hierauf basierendes Array und Verfahren zu dessen Herstellung
Duparre, A.; Dannberg, P.; Schreiber, P.; Bitzer, M.; Braeuer, A.
Patent
2006Nano-Rauheitsanalyse an funktionalen Oberflächen
Duparre, A.; Schröder, S.; Tünnermann, A.
Conference Paper
2006Nanostructure assessment of functional surfaces and coatings
Schröder, S.; Flemming, M.; Duparre, A.
Conference Paper
2006Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application
Rudisill, J.; Duparre, A.; Schröder, S.
Conference Paper
2005Entwicklung einer Kalibrierrichtlinie für Rastersondenmikroskope
Dziomba, T.; Flemming, M.; Duparre, A.; Koenders, L.; Wilkening, G.
Journal Article
2005Investigating the ArF laser stability of CaF2 at elevated fluences
Burkert, A.; Mühlig, C.; Triebel, W.; Keutel, D.; Natura, U.; Parthier, L.; Gliech, S.; Schröder, S.; Duparre, A.
Conference Paper
2005Low-loss gratings for next-generation gravitational wave detectors
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S.
Conference Paper
2005Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions
Schröder, S.; Gliech, S.; Duparre, A.
Journal Article
2005Nanorauheit statt Lotusstruktur: Chancen für ultrahydrophobe optische Oberflächen
Duparre, A.; Flemming, M.; Notni, G.; Tünnermann, A.
Journal Article
2005Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N.
Conference Paper
2005Scanning force microscopy for optical surface metrology
Flemming, M.; Roder, K.; Duparre, A.
Conference Paper
2005Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.
Conference Paper
2005Scattering from surfaces and thin films
Duparre, A.
Book Article
2005Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005Streulichtanalyse für die Nanotechnotechnik
Schröder, S.; Gliech, S.; Duparre, A.
Journal Article
2005Surface texture investigation of ultra-precision optical components
Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A.
Conference Paper
2005Ultra low-loss low-efficiency diffraction gratings
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.
Journal Article
2004157 nm and 193 nm scatter, R and T measurement technique
Gliech, S.; Gessner, H.; Hultaker, A.; Duparre, A.
Conference Paper
2004Characterization of CaF2 substrates for VUV fluoride coatings
Hultaker, A.; Gliech, S.; Gessner, H.; Duparre, A.
Conference Paper
2004Design and characterization of ultra-hydrophobic coatings
Flemming, M.; Roder, K.; Duparre, A.
Conference Paper
2004High-sensitivity light scattering measurement of optical coating components
Gliech, S.; Schröder, S.; Duparre, A.
Conference Paper
2004Light scatter technique for application in optics, nanotechnology and engineering
Gliech, S.; Duparre, A.
Conference Paper
2004Modeling and characterizing thin film nanostructures for ultrahydrophobic surfaces with controlled optical scatter
Flemming, M.; Hultaker, A.; Reihs, K.; Duparre, A.
Conference Paper
2004VERFAHREN UND VORRICHTUNG ZUR UNTERDRUECKUNG VON LICHTABSORPTION, LICHTSTREUUNG UND KONTAMINATION BEI WELLENLAENGEN UNTERHALB VON 200NM
Duparre, A.; Gliech, S.; Notni, G.; Steinert, J.
Patent
2003Advanced characterization techniques for optics, semiconductors, and nanotechnologies
: Duparre, A.; Singh, B.
Conference Proceedings
2003Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter
Flemming, M.; Reihs, K.; Duparre, A.
Conference Paper
2003Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A.
Conference Paper
2003Durable "self cleaning" coatings in optical quality
Reihs, K.; Malkomes, N.; Müller, P.; Claessen, R.; Cavaleiro, P.; Stahlschmidt, O.; Renker, S.; Duparre, A.
Conference Paper
2003Durable ultra-hydrophobic glass coatings with optical quality
Reihs, K.; Malkomes, N.; Müller, P.; Renker, S.; Stahlschmidt, O.; Claessen, R.; Cavaleiro, P.; Duparre, A.
Conference Paper
2003Effects of interface roughness on the spectral properties of thin films and multilayers
Tikhonravov, A.V.; Trubetskov, M.K.; Tikhonravov, A.A.; Duparre, A.
Journal Article
2003Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A.
Book Article
2003System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
Gliech, S.; Geßner, H.; Duparre, A.
Conference Paper
2003Untersuchung der Mikro- und Nanorauhigkeit von Oberflächen mittels Streulichtmessung
Duparre, A.
Conference Paper
2003VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N.
Book Article
2003VUV light scattering measurements of substrates and thin film coatings
Hultaker, A.; Gliech, S.; Benkert, N.; Duparre, A.
Conference Paper
2002Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films
Tikhonravov, A.V.; Trubetskov, M.K.; Kokarev, M.A.; Amotchkina, T.V.; Duparre, A.; Quesnel, E.; Ristau, D.; Gunster, S.
Journal Article
2002Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
Ferre-Borrull, J.; Steinert, J.; Duparre, A.
Journal Article
2002Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A.
Journal Article
2002Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications
Duparre, A.; Flemming, M.; Steinert, J.; Reihs, K.
Journal Article
2002Optische Schichten mit ultrahydrophoben und streuarmen Eigenschaften
Reihs, K.; Duparre, A.; Flemming, M.
Journal Article
2002Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M.
Journal Article
2002Ultraviolet optical and microstructural properties of MgF 2 and LaF 3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
Ristau, D.; Gunster, S.; Bosch, S.; Duparre, A.; Masetti, E.; Ferre-Borrull, J.; Kiriakidis, G.; Peiro, F.; Quesnel, E.; Tikhonravov, A.
Journal Article
2001Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry
Tikhonravov, A.V.; Trubetskov, M.K.; Krasilnikova, A.V.; Masetti, E.; Duparre, A.; Quesnel, E.; Ristau, D.
Journal Article
2001Laser damage studies on MgF2 thin films
Protopapa, M.L.; Thomasi, F. de; Perrone, M.R.; Piegari, A.; Masetti, E.; Ristau, D.; Quesnel, E.; Duparre, A.
Journal Article
2001Messverfahren zur Untersuchung optischer Oberflächen für den VUV- bis IR-Bereich
Duparre, A.; Notni, G.
Conference Paper
2001Procedure to characterize microroughness of optical thin films: Application to ion-beam-sputtered vacuum-ultraviolet coatings
Ferre-Borrull, J.; Duparre, A.; Quesnel, E.
Journal Article
2001Substrat mit gering lichtstreuender, ultraphober Oberflaeche und Verfahren zu seiner Herstellung
Reihs, K.; Duparre, A.; Notni, G.
Patent
2001Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G.
Journal Article
2000Advanced Methods for surface and subsurface defect characterization of optical components
Steinert, J.; Gliech, S.; Wuttig, A.; Duparre, A.; Truckenbrodt, H.
Conference Paper
2000DUV/VUV light scattering measurement of optical components for lithography applications
Gliech, S.; Steinert, J.; Flemming, M.; Duparre, A.
Conference Paper
2000International round-robin experiment to test the International Organization for Standardization total-scattering draft standard
Kadkhoda, P.; Müller, A.; Ristau, D.; Duparre, A.; Gliech, S.; Lauth, H.; Schuhmann, U.; Reng, N.; Tilsch, M.; Schuhmann, R.; Amra, C.; Deumie, C.; Jolie, C.; Kessler, H.; Lindström, T.; Ribbing, C.G.; Bennet, J.M.
Journal Article
2000Light scattering of UV-optical components
Duparre, A.; Gliech, S.; Steinert, J.
Conference Paper
2000Microroughness analysis of thin film components for VUV applications
Ferre-Borrull, J.; Duparre, A.; Steinert, J.; Ristau, D.; Quesnel, E.
Conference Paper
2000A new procedure for the optical characterization of high quality thin films
Bosch, S.; Leinfeller, N.; Quesnel, E.; Duparre, A.; Ferre-Borrull, J.; Günster, S.; Ristau, D.
Conference Paper
2000Optical characterization of materials deposited by different processes: the LaF3 in the UV-visible region
Leinfeller, N.; Quesnel, E.; Duparre, A.; Ferre-Borrull, J.
Conference Paper
2000Roughness and Light Scattering of Ion-Beam-Sputtered Fluoride Coatings for 193 nm
Ferre-Borrull, J.; Duparre, A.; Quesnel, E.
Journal Article
2000X-ray investigation of a near surface layer of metal samples
Gilev, O.N.; Asadchikov, V.E.; Duparre, A.
Conference Paper
2000X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, I.V.; Asadchikov, V.E.; Bukreeva, I.N.; Duparre, A.
Conference Paper
1999ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate
Thielsch, R.; Heber, J.; Duparre, A.; Kaiser, N.; Mann, K.R.; Eva, E.
Conference Paper
1999Charakterisierung optischer Komponenten für DUV Spektralbereich
Mann, K.; Apel, O.; Ristau, D.; Duparre, A.; Gliech, S.
Journal Article
1999Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy
Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V.
Journal Article
1999Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods
Kozhevnikov, I.V.; Asadchikov, V.E.; Duparre, A.; Gilev, O.N.; Havronin, N.A.; Krivonosov, Y.S.; Ostashev, V.I.; Steinert, J.
Conference Paper
1999DUV light scattering and morphology of ion beam sputtered fluoride coatings
Quesnel, E.; Petit dit Dariel, A.; Duparre, A.; Ferre-Borrull, J.; Steinert, J.
Conference Paper
1999Hochauflösende Topometrie im Kontext globaler Makrostrukturen
Duparre, A.; Notni, G.; Recknagel, R.-J.; Feigl, T.; Gliech, S.
Journal Article
1999International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda, P.; Amra, C.; Bennett, J.M.; Deumie, C.; Duparre, A.; Gliech, S.; Jolie, C.; Kessler, H.; Lauth, H.; Lindström, T.; Müller, A.; Reng, N.; Ribbing, C.G.; Ristau, D.; Schuhmann, R.G.; Schuhmann, U.; Tilsch, M.
Conference Paper
1999Ion-assisted deposition of oxide materials at room temperature by use of different ion sources
Niederwald, H.S.; Laux, S.; Kennedy, M.; Schallenberg, U.; Duparre, A.; Kaiser, N.; Ristau, D.
Journal Article
1999Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S.
Conference Paper
1999Multi-type surface and thin film characterization using light scattering, scanning force microscopy and white light interferometry
Duparre, A.; Notni, G.
Conference Paper
1999SLIOS: a contribution to standard procedures in stray light measurements
Bäumer, S.M.; Duparre, A.; Herrmann, T.; Schumann, U.; Smorenburg, K.; Kirschner, V.; Mattsson, L.H.; Quinteros, T.; Berglind, R.; Schippel, S.
Conference Paper
1999Surface roughness and subsurface damage characterization of fused silica substrates
Wuttig, A.; Steinert, J.; Duparre, A.; Truckenbrodt, H.
Conference Paper
1999Surface roughness characterization of smooth optical films deposited by ion plating
Jakobs, S.; Duparre, A.; Huter, M.; Pulker, H.K.
Journal Article
1999UV-optical and microstructural properties of MgF2-coatings deposited by IBS and PVD Processes
Ristau, D.; Arens, W.; Bosch, S.; Duparre, A.
Conference Paper
1999Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering
Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G.
Conference Paper
1999X-ray and AFM studies of ultrthin films for EUV and soft X-ray applications
Asadchikov, V.E.; Duparre, A.; Kozhevnikov, I.V.; Krivonosov, Y.S.; Sagitov, S.I.
Conference Paper
1998AFM and light scattering measurements of optical thin films for applications in the UV spectral region
Jakobs, S.; Duparre, A.; Truckenbrodt, H.
Journal Article
1998AFM helps engineer low-scatter thin films
Duparre, A.; Kaiser, N.
Journal Article
1998Interfacial roughness and related scatter in UV-optical coatings
Jacobs, S.; Duparre, A.; Truckenbrodt, H.
Journal Article
1998Ion assisted deposition of optical coatings on cold substrates. A comparison of processes using different ion sources
Schallenberg, U.; Laux, D.; Duparre, A.; Kaiser, N.; Kennedy, V.M.; Ristau, D.
Conference Paper
1998Messung von Mikrostrukturen in einem großen Skalenbereich durch Kombination von Weißlichtinterferometrie und Rasterkraftmikroskopie
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G.
Conference Paper
1998Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region
Thielsch, R.; Heber, J.; Jakobs, S.; Kaiser, N.; Duparre, A.; Ullmann, J.
Conference Paper
1998Scatter investigation of UV-films. Facing the trend towards shorter wavelength
Duparre, A.; Kaiser, N.
Conference Paper
1998Surface finish and optical quality of CaF2 for UV-lithography applications
Duparre, A.; Tielsch, R.; Kaiser, N.; Jakobs, S.; Mann, K.; Eva, E.
Conference Paper
1998Wide scale surface measurement using white light interferometry and atomic force microscopy
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G.
Conference Paper
1997Characterization of SiO2 protective coatings on polycarbonate
Jakobs, S.; Schulz, U.; Duparre, A.; Kaiser, N.
Journal Article
1997Concepts for standardization of total scatter measurements at 633 nm
Kadkhoda, M.; Strink, P.; Ristau, D.; Duparre, A.; Gliech, S.; Reng, N.; Greif, M.; Schuhmann, R.; Goldner, M.
Conference Paper
1997IAD of oxide coatings at low temperature: a comparison of processes based on different ion sources
Niederwald, H.S.; Kaiser, N.; Schallenberg, U.B.; Duparre, A.; Ristau, D.; Kennedy, M.
Conference Paper
1997Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N.
Conference Paper
1997Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S.
Conference Paper
1997Properties of SiO2 and Al2O3 films for use in UV-optical coatings
Thielsch, R.; Duparre, A.; Schulz, U.; Kaiser, N.
Conference Paper
1997Quality assessment from supersmooth to rough surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S.
Conference Paper
1996Analysis of interface and volume inhomogenities in a multilayer system by light scattering methods
Pichlmaier, S.; Hehl, K.; Schuhmann, U.; Duparre, A.; Gliech, S.
Conference Paper
1996Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
Duparre, A.; Gliech, S.
Conference Paper
1996Combination of surface characterization techniques for investigating optical thin-film components
Duparre, A.; Jakobs, S.
Journal Article
1996Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process
Jakobs, S.; Feigl, T.; Duparre, A.
Conference Paper
1996Optical scattering and surface microstructure of thin films for laser application
Duparre, A.; Kiesel, A.; Gliech, S.
Journal Article
1996Roughness analysis of optical films and substrates by atomic force microscopy
Duparre, A.; Ruppe, C.
Journal Article
1996Surface finish assessment of synthetic quartz glass
Kiesel, A.; Duparre, A.; Haase, M.; Coriand, F.; Truckenbrodt, H.
Conference Paper
1995Atomic force microscopy on cross-section of optimal coatings: a new method
Duparre, A.; Ruppe, C.; Pischow, K.A.; Adamik, M.; Barna, P.B.
Journal Article
1995Light scattering of thin dielectric films
Duparre, A.
Book Article
1994Charakterisierung der Rauheit optischer Funktionsflächen - Methodenvergleich
Neubert, J.; Duparre, A.; Kaiser, N.; Notni, G.; Gerold, F.; Risse, S.
Conference Paper
1994Generic detrending of surface profiles
Duparre, A.; Rothe, H.; Jakobs, S.
Journal Article
1994Interface and volume inhomogenities in optical thin films investigated by light scattering methods
Duparre, A.; Gliech, S.; Hehl, K.; Pichlmaier, U.; Schuhmann, U.
Conference Paper
1994Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors
Kaiser, N.; Duparre, A.; Jakobs, S.
Conference Paper
1994Photothermal absorption microscopy of defects in ZrO2 and MgF2 single-layer films
Duparre, A.; Reichling, M.; Welsch, E.; Matthias,E.
Journal Article
1994Roughness and scattering measurements on thin films for UV/VIS applications
Duparre, A.; Kiesel, A.; Kaiser, N.; Truckenbrodt, H.; Schuhmann, U.
Conference Paper
1993Laterally and depth resolved photothermal absorption measurements on ZrO2 and MgF2 single-layer films
Reichling, M.; Welsch, E.; Duparre, A.; Matthias, E.
Conference Paper
1993Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and automatic force microscopy
Duparre, A.; Kaiser, N.; Truckenbrodt, H.; Berger, M.; Köhler, A.
Conference Paper
1993Real-time detection of surface damage by direct assessment of the BRDF
Rothe, H.; Duparre, A.; Truckenbrodt, H.; Timm, M.
Conference Paper
1993Relation between light scattering and the microstructure of optical thin films
Duparre, A.; Kassam, S.
Journal Article
1993Scattering losses of oxide and fluoride coatings for lasers
Duparre, A.; Uhlig, H.; Kassam, S.
Conference Paper
1992Light scattering from the volume of optical thin films: theory and experiment
Duparre, A.; Kassam, S.; Hehl, K.; Bussemer, P.; Neubert, J.
Journal Article
1992Roughness and defect characterization of optical surfaces by light scattering measurements
Truckenbrodt, H.; Duparre, A.; Schuhmann, U.
Conference Paper