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| 2013 | Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas | Journal Article |
| 2012 | Abrollen, abperlen, spreiten
Duparré, Angela; Coriand, Luisa | Journal Article |
| 2012 | Estimating hemispherical scatter from incident plane measurements of isotropic samples
Stover, John; Schröder, Sven; Finck, Alexander von; Duparré, Angela | Conference Paper |
| 2012 | Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela | Conference Paper |
| 2012 | Light scattering-based measurement of relevant surface roughness
Schröder, Sven; Trost, Marcus; Coriand, Luisa; Duparré, Angela | Conference Paper |
| 2012 | Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D. | Conference Paper |
| 2012 | Quality assessment of precision optical surfaces through light scattering techniques
Schröder, Sven; Finck, Alexander von; Herffurth, Tobias; Duparré, Angela | Conference Paper |
| 2012 | Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas | Conference Paper |
| 2012 | Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela | Conference Paper |
| 2012 | Total integrated scatter from surfaces with arbitrary roughness, correlation widths and incident angles
Harvey, James; Schröder, Sven; Choi, Narak; Duparré, Angela | Journal Article |
| 2012 | Upper roughness limitations on the TIS/RMS relationship
Stover, John; Schröder, Sven; Duparré, Angela; Germer Thomas A. | Conference Paper |
| 2011 | Angle resolved scattering: An effective method for characterizing thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparre, A. | Journal Article |
| 2011 | Definition of roughness structures for superhydrophobic and hydrophilic optical coatings on glass
Coriand, L.; Mitterhuber, M.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2011 | Determining parametric TIS behavior from optical fabrication metrology data
Harvey, J.E.; Schröder, S.; Choi, N.; Duparre, A. | Conference Paper |
| 2011 | Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E. | Conference Paper |
| 2011 | Impact of surface roughness on scatter losses and the scattering distribution of surfaces and thin film coatings
Schröder, S.; Herffurth, T.; Duparre, A. | Conference Paper |
| 2011 | Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2011 | Instrument for close-to-process light scatter measurements of thin film coatings and substrates
Finck, A. von; Hauptvogel, M.; Duparre, A. | Journal Article |
| 2011 | Kompakter streulichtbasierter Rauheitssensor
Herffurth, T.; Hauptvogel, M.; Duparré, A.; Tünnermann, A.; Notni, G.; Tünnermann, A. | Journal Article, Conference Paper |
| 2011 | Modeling of light scattering in different regimes of surface roughness
Schröder, S.; Duparre, A.; Coriand, L.; Tünnermann, A.; Penalvar, D.H.; Harvey, J.E. | Journal Article |
| 2011 | Optical interference coatings 2010 measurement problem
Duparre, A.; Ristau, D. | Journal Article |
| 2011 | Rauheitsbewertung auf fertigungsrelevanten Oberflächen mittels Streulichtverfahren
Duparré, A.; Trost, M. | Conference Paper |
| 2011 | Rauheitsbewertung auf fertigungsrelevanten Oberflächen mittels Streulichtverfahren
Duparré, A. | Conference Paper |
| 2011 | Registrierung multimodaler Messungen am Beispiel eines MEMS
Zimmermann, Jan; Sawodny, Oliver; Lyda, Wolfram; Burla, Avinash; Osten, Wolfgang; Eigenbrod, Hartmut; Westkämper, Engelbert; Shaw, Laura; Weckenmann, Albert; Herffurth, Tobias; Duparré, Angela; Tünnermann, Andreas; Staude, Andreas; Goebbels, Jürgen | Book Article |
| 2011 | Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Conference Paper |
| 2011 | Table-Top Streulichtmesssystem ALBATROSS-TT
Finck, A. von; Hauptvogel, M.; Duparré, A.; Notni, G.; Tünnermann, A. | Journal Article, Conference Paper |
| 2010 | Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: Measurement and analysis
Schröder, S.; Herffurth, T.; Trost, M.; Duparre, A. | Journal Article |
| 2010 | Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N. | Conference Paper |
| 2010 | Bewertung der Poliergüte schwer zugänglicher Oberflächen durch Streulichtmethoden
Schröder, S.; Trost, M.; Herffurth, T.; Duparré, A. | Abstract |
| 2010 | Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A. | Conference Paper |
| 2010 | Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N. | Journal Article |
| 2010 | PSD-Analyse: Schlüssel zur funktionsgerechten Rauheitscharakterisierung optischer Oberflächen
Coriand, L.; Schröder, S.; Duparré, A. | Abstract |
| 2010 | Roughness measurement of ultra precision surfaces using light scattering techniques and analysis
Herffurth, T.; Schröder, S.; Trost, M.; Duparre, A. | Conference Paper |
| 2010 | Roughness structures of ultrahydrophobic and hydrophilic coatings on glass
Coriand, L.; Mitterhuber, M.; Duparre, A. | Conference Paper |
| 2010 | Scattering of roughened TCO films - Modeling and measurement
Schröder, S.; Duparre, A.; Füchsel, K.; Kaiser, N.; Harvey, J.E.; Tünnermann, A. | Conference Paper |
| 2010 | Separation von Streulichteffekten zur zerstörungsfreien Detektion von Sub-Surface-Damage
Schmitz, D.; Schröder, S.; Duparré, A. | Abstract |
| 2009 | Angle resolved scattering: A method for investigations of laser induced damage
Schröder, S.; Duparre, A. | Conference Paper |
| 2009 | Makyoh-Imaging zur Charakterisierung reflektierender Oberflächen
Finck, A. von; Duparre, A.; Pfeffer, M. | Journal Article |
| 2009 | Roughness determination of ultra thin multilayer coatings in cross-section images with poor SNR using edge localization
Brauer-Burchardt, C.; Schröder, S.; Trost, M.; Kuhmstedt, P.; Duparre, A.; Notni, G. | Conference Paper |
| 2009 | Ultra-hydrophobicity through stochastic surface roughness
Flemming, M.; Coriand, L.; Duparre, A. | Journal Article |
| 2009 | Ultra-hydrophobicity through stochastic surface roughness
Flemming, M.; Coriand, L.; Duparre, A. | Book Article |
| 2009 | Vorrichtung und Verfahren zur winkelaufgeloesten Streulichtmessung
Schröder, S.; Duparre, A.; Herffurth, T.; Notni, G. | Patent |
| 2008 | Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A. | Journal Article |
| 2008 | Finish assessment of complex surfaces by advanced light scattering techniques
Schröder, S.; Duparre, A. | Conference Paper |
| 2008 | Image capture and processing for a microoptical compound-eye sensor
Tudela, R.; Brückner, A.; Duparre, A.; Bräuer, A. | Conference Paper |
| 2008 | Metal mirrors with excellent figure and roughness
Steinkopf, R.; Gebhardt, A.; Scheiding, S.; Rohde, M.; Stenzel, O.; Gliech, S.; Giggel, V.; Löscher, H.; Ullrich, G.; Rucks, P.; Duparre, A.; Risse, S.; Eberhardt, R.; Tünnermann, A. | Conference Paper |
| 2008 | Optical Interference Coatings 2007 Measurement Problem
Duparre, A.; Ristau, D. | Journal Article |
| 2008 | Roughness evolution and scatter losses of multilayers for 193 nm optics
Schröder, S.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2008 | Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A. | Conference Paper |
| 2008 | Surface/microstructure inspection
Duparre, A. | Book Article |
| 2008 | Wavelet filtering of fractal surfaces
Bakucz, P.; Schröder, S.; Krüger-Sehm, R.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2007 | Characterization of thin films and bulk materials for DUV optical components
Schröder, S.; Kamprath, M.; Duparre, A. | Conference Paper |
| 2007 | Charakterisierung von Mikro- und Nanostrukturen für funktionale Oberflächen und Schichten
Duparre, A. | Book Article |
| 2007 | EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2007 | Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A. | Conference Paper |
| 2007 | Light scattering techniques for the inspection of microcomponents and microstructures
Duparre, A. | Book Article |
| 2007 | Measurement Problems
Duparre, A.; Ristau, D. | Conference Paper |
| 2007 | Roughness evolution and scatter losses of multilayers for 193 nm
Schröder, S.; Duparre, A.; Tünnermann, A. | Conference Paper |
| 2007 | Scanning force microscopy of coatings and nanostructured surfaces
Flemming, M.; Duparre, A. | Conference Paper |
| 2007 | Schmutzabweisende raue Oberflächen mit optischer Qualität
Duparre, A. | Journal Article |
| 2007 | UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A. | Conference Paper |
| 2006 | Bewertung von Nanorauheiten durch Streulichtmessung
Schröder, S.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2006 | Bulk scattering properties of synthetic fused silica at 193 nm
Schröder, S.; Kamprath, M.; Duparre, A.; Tünnermann, A.; Kühn, B.; Klett, U. | Journal Article |
| 2006 | Design and characterization of nanostructured ultra-hydrophobic coatings
Flemming, M.; Duparre, A. | Journal Article |
| 2006 | Kameramodul, hierauf basierendes Array und Verfahren zu dessen Herstellung
Duparre, A.; Dannberg, P.; Schreiber, P.; Bitzer, M.; Braeuer, A. | Patent |
| 2006 | Nano-Rauheitsanalyse an funktionalen Oberflächen
Duparre, A.; Schröder, S.; Tünnermann, A. | Conference Paper |
| 2006 | Nanostructure assessment of functional surfaces and coatings
Schröder, S.; Flemming, M.; Duparre, A. | Conference Paper |
| 2006 | Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A. | Conference Paper |
| 2005 | Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application
Rudisill, J.; Duparre, A.; Schröder, S. | Conference Paper |
| 2005 | Entwicklung einer Kalibrierrichtlinie für Rastersondenmikroskope
Dziomba, T.; Flemming, M.; Duparre, A.; Koenders, L.; Wilkening, G. | Journal Article |
| 2005 | Investigating the ArF laser stability of CaF2 at elevated fluences
Burkert, A.; Mühlig, C.; Triebel, W.; Keutel, D.; Natura, U.; Parthier, L.; Gliech, S.; Schröder, S.; Duparre, A. | Conference Paper |
| 2005 | Low-loss gratings for next-generation gravitational wave detectors
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S. | Conference Paper |
| 2005 | Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions
Schröder, S.; Gliech, S.; Duparre, A. | Journal Article |
| 2005 | Nanorauheit statt Lotusstruktur: Chancen für ultrahydrophobe optische Oberflächen
Duparre, A.; Flemming, M.; Notni, G.; Tünnermann, A. | Journal Article |
| 2005 | Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N. | Conference Paper |
| 2005 | Scanning force microscopy for optical surface metrology
Flemming, M.; Roder, K.; Duparre, A. | Conference Paper |
| 2005 | Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A. | Conference Paper |
| 2005 | Scattering from surfaces and thin films
Duparre, A. | Book Article |
| 2005 | Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A. | Conference Paper |
| 2005 | Streulichtanalyse für die Nanotechnotechnik
Schröder, S.; Gliech, S.; Duparre, A. | Journal Article |
| 2005 | Surface texture investigation of ultra-precision optical components
Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A. | Conference Paper |
| 2005 | Ultra low-loss low-efficiency diffraction gratings
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A. | Journal Article |
| 2004 | 157 nm and 193 nm scatter, R and T measurement technique
Gliech, S.; Gessner, H.; Hultaker, A.; Duparre, A. | Conference Paper |
| 2004 | Characterization of CaF2 substrates for VUV fluoride coatings
Hultaker, A.; Gliech, S.; Gessner, H.; Duparre, A. | Conference Paper |
| 2004 | Design and characterization of ultra-hydrophobic coatings
Flemming, M.; Roder, K.; Duparre, A. | Conference Paper |
| 2004 | High-sensitivity light scattering measurement of optical coating components
Gliech, S.; Schröder, S.; Duparre, A. | Conference Paper |
| 2004 | Light scatter technique for application in optics, nanotechnology and engineering
Gliech, S.; Duparre, A. | Conference Paper |
| 2004 | Modeling and characterizing thin film nanostructures for ultrahydrophobic surfaces with controlled optical scatter
Flemming, M.; Hultaker, A.; Reihs, K.; Duparre, A. | Conference Paper |
| 2004 | VERFAHREN UND VORRICHTUNG ZUR UNTERDRUECKUNG VON LICHTABSORPTION, LICHTSTREUUNG UND KONTAMINATION BEI WELLENLAENGEN UNTERHALB VON 200NM
Duparre, A.; Gliech, S.; Notni, G.; Steinert, J. | Patent |
| 2003 | Advanced characterization techniques for optics, semiconductors, and nanotechnologies
: Duparre, A.; Singh, B. | Conference Proceedings |
| 2003 | Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter
Flemming, M.; Reihs, K.; Duparre, A. | Conference Paper |
| 2003 | Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A. | Conference Paper |
| 2003 | Durable "self cleaning" coatings in optical quality
Reihs, K.; Malkomes, N.; Müller, P.; Claessen, R.; Cavaleiro, P.; Stahlschmidt, O.; Renker, S.; Duparre, A. | Conference Paper |
| 2003 | Durable ultra-hydrophobic glass coatings with optical quality
Reihs, K.; Malkomes, N.; Müller, P.; Renker, S.; Stahlschmidt, O.; Claessen, R.; Cavaleiro, P.; Duparre, A. | Conference Paper |
| 2003 | Effects of interface roughness on the spectral properties of thin films and multilayers
Tikhonravov, A.V.; Trubetskov, M.K.; Tikhonravov, A.A.; Duparre, A. | Journal Article |
| 2003 | Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A. | Book Article |
| 2003 | System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
Gliech, S.; Geßner, H.; Duparre, A. | Conference Paper |
| 2003 | Untersuchung der Mikro- und Nanorauhigkeit von Oberflächen mittels Streulichtmessung
Duparre, A. | Conference Paper |
| 2003 | VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N. | Book Article |
| 2003 | VUV light scattering measurements of substrates and thin film coatings
Hultaker, A.; Gliech, S.; Benkert, N.; Duparre, A. | Conference Paper |
| 2002 | Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films
Tikhonravov, A.V.; Trubetskov, M.K.; Kokarev, M.A.; Amotchkina, T.V.; Duparre, A.; Quesnel, E.; Ristau, D.; Gunster, S. | Journal Article |
| 2002 | Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
Ferre-Borrull, J.; Steinert, J.; Duparre, A. | Journal Article |
| 2002 | Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A. | Journal Article |
| 2002 | Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications
Duparre, A.; Flemming, M.; Steinert, J.; Reihs, K. | Journal Article |
| 2002 | Optische Schichten mit ultrahydrophoben und streuarmen Eigenschaften
Reihs, K.; Duparre, A.; Flemming, M. | Journal Article |
| 2002 | Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M. | Journal Article |
| 2002 | Ultraviolet optical and microstructural properties of MgF 2 and LaF 3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
Ristau, D.; Gunster, S.; Bosch, S.; Duparre, A.; Masetti, E.; Ferre-Borrull, J.; Kiriakidis, G.; Peiro, F.; Quesnel, E.; Tikhonravov, A. | Journal Article |
| 2001 | Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry
Tikhonravov, A.V.; Trubetskov, M.K.; Krasilnikova, A.V.; Masetti, E.; Duparre, A.; Quesnel, E.; Ristau, D. | Journal Article |
| 2001 | Laser damage studies on MgF2 thin films
Protopapa, M.L.; Thomasi, F. de; Perrone, M.R.; Piegari, A.; Masetti, E.; Ristau, D.; Quesnel, E.; Duparre, A. | Journal Article |
| 2001 | Messverfahren zur Untersuchung optischer Oberflächen für den VUV- bis IR-Bereich
Duparre, A.; Notni, G. | Conference Paper |
| 2001 | Procedure to characterize microroughness of optical thin films: Application to ion-beam-sputtered vacuum-ultraviolet coatings
Ferre-Borrull, J.; Duparre, A.; Quesnel, E. | Journal Article |
| 2001 | Substrat mit gering lichtstreuender, ultraphober Oberflaeche und Verfahren zu seiner Herstellung
Reihs, K.; Duparre, A.; Notni, G. | Patent |
| 2001 | Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G. | Journal Article |
| 2000 | Advanced Methods for surface and subsurface defect characterization of optical components
Steinert, J.; Gliech, S.; Wuttig, A.; Duparre, A.; Truckenbrodt, H. | Conference Paper |
| 2000 | DUV/VUV light scattering measurement of optical components for lithography applications
Gliech, S.; Steinert, J.; Flemming, M.; Duparre, A. | Conference Paper |
| 2000 | International round-robin experiment to test the International Organization for Standardization total-scattering draft standard
Kadkhoda, P.; Müller, A.; Ristau, D.; Duparre, A.; Gliech, S.; Lauth, H.; Schuhmann, U.; Reng, N.; Tilsch, M.; Schuhmann, R.; Amra, C.; Deumie, C.; Jolie, C.; Kessler, H.; Lindström, T.; Ribbing, C.G.; Bennet, J.M. | Journal Article |
| 2000 | Light scattering of UV-optical components
Duparre, A.; Gliech, S.; Steinert, J. | Conference Paper |
| 2000 | Microroughness analysis of thin film components for VUV applications
Ferre-Borrull, J.; Duparre, A.; Steinert, J.; Ristau, D.; Quesnel, E. | Conference Paper |
| 2000 | A new procedure for the optical characterization of high quality thin films
Bosch, S.; Leinfeller, N.; Quesnel, E.; Duparre, A.; Ferre-Borrull, J.; Günster, S.; Ristau, D. | Conference Paper |
| 2000 | Optical characterization of materials deposited by different processes: the LaF3 in the UV-visible region
Leinfeller, N.; Quesnel, E.; Duparre, A.; Ferre-Borrull, J. | Conference Paper |
| 2000 | Roughness and Light Scattering of Ion-Beam-Sputtered Fluoride Coatings for 193 nm
Ferre-Borrull, J.; Duparre, A.; Quesnel, E. | Journal Article |
| 2000 | X-ray investigation of a near surface layer of metal samples
Gilev, O.N.; Asadchikov, V.E.; Duparre, A. | Conference Paper |
| 2000 | X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, I.V.; Asadchikov, V.E.; Bukreeva, I.N.; Duparre, A. | Conference Paper |
| 1999 | ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate
Thielsch, R.; Heber, J.; Duparre, A.; Kaiser, N.; Mann, K.R.; Eva, E. | Conference Paper |
| 1999 | Charakterisierung optischer Komponenten für DUV Spektralbereich
Mann, K.; Apel, O.; Ristau, D.; Duparre, A.; Gliech, S. | Journal Article |
| 1999 | Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy
Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V. | Journal Article |
| 1999 | Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods
Kozhevnikov, I.V.; Asadchikov, V.E.; Duparre, A.; Gilev, O.N.; Havronin, N.A.; Krivonosov, Y.S.; Ostashev, V.I.; Steinert, J. | Conference Paper |
| 1999 | DUV light scattering and morphology of ion beam sputtered fluoride coatings
Quesnel, E.; Petit dit Dariel, A.; Duparre, A.; Ferre-Borrull, J.; Steinert, J. | Conference Paper |
| 1999 | Hochauflösende Topometrie im Kontext globaler Makrostrukturen
Duparre, A.; Notni, G.; Recknagel, R.-J.; Feigl, T.; Gliech, S. | Journal Article |
| 1999 | International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda, P.; Amra, C.; Bennett, J.M.; Deumie, C.; Duparre, A.; Gliech, S.; Jolie, C.; Kessler, H.; Lauth, H.; Lindström, T.; Müller, A.; Reng, N.; Ribbing, C.G.; Ristau, D.; Schuhmann, R.G.; Schuhmann, U.; Tilsch, M. | Conference Paper |
| 1999 | Ion-assisted deposition of oxide materials at room temperature by use of different ion sources
Niederwald, H.S.; Laux, S.; Kennedy, M.; Schallenberg, U.; Duparre, A.; Kaiser, N.; Ristau, D. | Journal Article |
| 1999 | Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S. | Conference Paper |
| 1999 | Multi-type surface and thin film characterization using light scattering, scanning force microscopy and white light interferometry
Duparre, A.; Notni, G. | Conference Paper |
| 1999 | SLIOS: a contribution to standard procedures in stray light measurements
Bäumer, S.M.; Duparre, A.; Herrmann, T.; Schumann, U.; Smorenburg, K.; Kirschner, V.; Mattsson, L.H.; Quinteros, T.; Berglind, R.; Schippel, S. | Conference Paper |
| 1999 | Surface roughness and subsurface damage characterization of fused silica substrates
Wuttig, A.; Steinert, J.; Duparre, A.; Truckenbrodt, H. | Conference Paper |
| 1999 | Surface roughness characterization of smooth optical films deposited by ion plating
Jakobs, S.; Duparre, A.; Huter, M.; Pulker, H.K. | Journal Article |
| 1999 | UV-optical and microstructural properties of MgF2-coatings deposited by IBS and PVD Processes
Ristau, D.; Arens, W.; Bosch, S.; Duparre, A. | Conference Paper |
| 1999 | Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering
Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G. | Conference Paper |
| 1999 | X-ray and AFM studies of ultrthin films for EUV and soft X-ray applications
Asadchikov, V.E.; Duparre, A.; Kozhevnikov, I.V.; Krivonosov, Y.S.; Sagitov, S.I. | Conference Paper |
| 1998 | AFM and light scattering measurements of optical thin films for applications in the UV spectral region
Jakobs, S.; Duparre, A.; Truckenbrodt, H. | Journal Article |
| 1998 | AFM helps engineer low-scatter thin films
Duparre, A.; Kaiser, N. | Journal Article |
| 1998 | Interfacial roughness and related scatter in UV-optical coatings
Jacobs, S.; Duparre, A.; Truckenbrodt, H. | Journal Article |
| 1998 | Ion assisted deposition of optical coatings on cold substrates. A comparison of processes using different ion sources
Schallenberg, U.; Laux, D.; Duparre, A.; Kaiser, N.; Kennedy, V.M.; Ristau, D. | Conference Paper |
| 1998 | Messung von Mikrostrukturen in einem großen Skalenbereich durch Kombination von Weißlichtinterferometrie und Rasterkraftmikroskopie
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G. | Conference Paper |
| 1998 | Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region
Thielsch, R.; Heber, J.; Jakobs, S.; Kaiser, N.; Duparre, A.; Ullmann, J. | Conference Paper |
| 1998 | Scatter investigation of UV-films. Facing the trend towards shorter wavelength
Duparre, A.; Kaiser, N. | Conference Paper |
| 1998 | Surface finish and optical quality of CaF2 for UV-lithography applications
Duparre, A.; Tielsch, R.; Kaiser, N.; Jakobs, S.; Mann, K.; Eva, E. | Conference Paper |
| 1998 | Wide scale surface measurement using white light interferometry and atomic force microscopy
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G. | Conference Paper |
| 1997 | Characterization of SiO2 protective coatings on polycarbonate
Jakobs, S.; Schulz, U.; Duparre, A.; Kaiser, N. | Journal Article |
| 1997 | Concepts for standardization of total scatter measurements at 633 nm
Kadkhoda, M.; Strink, P.; Ristau, D.; Duparre, A.; Gliech, S.; Reng, N.; Greif, M.; Schuhmann, R.; Goldner, M. | Conference Paper |
| 1997 | IAD of oxide coatings at low temperature: a comparison of processes based on different ion sources
Niederwald, H.S.; Kaiser, N.; Schallenberg, U.B.; Duparre, A.; Ristau, D.; Kennedy, M. | Conference Paper |
| 1997 | Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N. | Conference Paper |
| 1997 | Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S. | Conference Paper |
| 1997 | Properties of SiO2 and Al2O3 films for use in UV-optical coatings
Thielsch, R.; Duparre, A.; Schulz, U.; Kaiser, N. | Conference Paper |
| 1997 | Quality assessment from supersmooth to rough surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S. | Conference Paper |
| 1996 | Analysis of interface and volume inhomogenities in a multilayer system by light scattering methods
Pichlmaier, S.; Hehl, K.; Schuhmann, U.; Duparre, A.; Gliech, S. | Conference Paper |
| 1996 | Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
Duparre, A.; Gliech, S. | Conference Paper |
| 1996 | Combination of surface characterization techniques for investigating optical thin-film components
Duparre, A.; Jakobs, S. | Journal Article |
| 1996 | Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process
Jakobs, S.; Feigl, T.; Duparre, A. | Conference Paper |
| 1996 | Optical scattering and surface microstructure of thin films for laser application
Duparre, A.; Kiesel, A.; Gliech, S. | Journal Article |
| 1996 | Roughness analysis of optical films and substrates by atomic force microscopy
Duparre, A.; Ruppe, C. | Journal Article |
| 1996 | Surface finish assessment of synthetic quartz glass
Kiesel, A.; Duparre, A.; Haase, M.; Coriand, F.; Truckenbrodt, H. | Conference Paper |
| 1995 | Atomic force microscopy on cross-section of optimal coatings: a new method
Duparre, A.; Ruppe, C.; Pischow, K.A.; Adamik, M.; Barna, P.B. | Journal Article |
| 1995 | Light scattering of thin dielectric films
Duparre, A. | Book Article |
| 1994 | Charakterisierung der Rauheit optischer Funktionsflächen - Methodenvergleich
Neubert, J.; Duparre, A.; Kaiser, N.; Notni, G.; Gerold, F.; Risse, S. | Conference Paper |
| 1994 | Generic detrending of surface profiles
Duparre, A.; Rothe, H.; Jakobs, S. | Journal Article |
| 1994 | Interface and volume inhomogenities in optical thin films investigated by light scattering methods
Duparre, A.; Gliech, S.; Hehl, K.; Pichlmaier, U.; Schuhmann, U. | Conference Paper |
| 1994 | Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors
Kaiser, N.; Duparre, A.; Jakobs, S. | Conference Paper |
| 1994 | Photothermal absorption microscopy of defects in ZrO2 and MgF2 single-layer films
Duparre, A.; Reichling, M.; Welsch, E.; Matthias,E. | Journal Article |
| 1994 | Roughness and scattering measurements on thin films for UV/VIS applications
Duparre, A.; Kiesel, A.; Kaiser, N.; Truckenbrodt, H.; Schuhmann, U. | Conference Paper |
| 1993 | Laterally and depth resolved photothermal absorption measurements on ZrO2 and MgF2 single-layer films
Reichling, M.; Welsch, E.; Duparre, A.; Matthias, E. | Conference Paper |
| 1993 | Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and automatic force microscopy
Duparre, A.; Kaiser, N.; Truckenbrodt, H.; Berger, M.; Köhler, A. | Conference Paper |
| 1993 | Real-time detection of surface damage by direct assessment of the BRDF
Rothe, H.; Duparre, A.; Truckenbrodt, H.; Timm, M. | Conference Paper |
| 1993 | Relation between light scattering and the microstructure of optical thin films
Duparre, A.; Kassam, S. | Journal Article |
| 1993 | Scattering losses of oxide and fluoride coatings for lasers
Duparre, A.; Uhlig, H.; Kassam, S. | Conference Paper |
| 1992 | Light scattering from the volume of optical thin films: theory and experiment
Duparre, A.; Kassam, S.; Hehl, K.; Bussemer, P.; Neubert, J. | Journal Article |
| 1992 | Roughness and defect characterization of optical surfaces by light scattering measurements
Truckenbrodt, H.; Duparre, A.; Schuhmann, U. | Conference Paper |