Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Improved vision by eye abberation correction using an active-matrix addressed micromirror array
Gehner, A.; Wildenhain, M.; Doleschal, W.; Elgner, A.; Schenk, H.; Lakner, H.
Conference Paper
2003Improved vision by eye aberration correction using an active-matrix addressed micromirror array
Gehner, A.; Wildenhain, M.; Doleschal, W.; Elgner, A.; Schenk, H.; Lakner, H.
Conference Paper
2002Active-matrix addressed micromirror array for wavefront correction in adaptive optics
Gehner, A.; Wildenhain, M.; Doleschal, W.; Elgner, A.
Book Article
2001Active-matrix addressed micromirror array for wavefront correction in adaptive optics
Gehner, A.; Doleschal, W.; Elgner, A.; Kauert, R.; Kunze, D.; Wildenhain, M.
Conference Paper
2001Design and fabrication of micromirror arrays for UV-lithography
Lakner, H.; Dürr, P.; Dauderstädt, U.; Doleschal, W.; Amelung, J.
Conference Paper
2001A Spatial Light Modulator (SLM) for advanced lithography
Dauderstädt, U.; Dürr, P.; Doleschal, W.
Book Article
2000Fabrication of the moving liquid mirror (MLM) spatial light modulator in a standard CMOS-process
Wolter, A.; Lakner, H.; Kück, H.; Doleschal, W.; Kirstein, K.-U.; Rieck, A.; Frohberg, K.
Conference Paper
2000The moving liquid mirror (MLM) spatial light modulator
Wolter, A.; Lakner, H.; Doleschal, W.; Zimmer, G.
Conference Paper
2000Planarization of large image generating microsystems with CMP
Rieck, A.; Jensen, B.; Doleschal, W.
Book Article
2000A spatial light modulator using moving liquid mirrors (MLM) on a CMOS active-matrix
Wolter, A.; Kirstein, K.-U.; Doleschal, W.; Kück, H.; Lakner, H.; Zimmer, G.
Conference Paper
2000Test system for micro mirror arrays
Dürr, P.; Tanneberger, T.; Wolter, A.; Kluge, W.; Doleschal, W.; Lakner, H.
Conference Paper
1999Micromirrors for direct writing systems and scanners
Lakner, H.; Doleschal, W.; Dürr, P.; Gehner, A.; Schenk, H.; Wolter, A.; Zimmer, G.
Conference Paper
1998Microtechnologies, microactuator device for lightmodulator applications
Gehner, A.; Doleschal, W.; Schwenger, L.; Kück, H.; Zimmer, G.
Conference Paper
1997High-throughput optical direct write lithography
Paufler, J.; Kück, H.; Seltmann, R.; Doleschal, W.; Gehner, A.; Zimmer, G.
Journal Article
1996Deformable micromirror devices as phase modulation high resolution light valves
Kück, H.; Doleschal, W.; Gehner, A.; Grundke, W.; Melcher, R.; Paufler, J.; Seltmann, R.; Zimmer, G.
Conference Paper
1996Mikrospiegelanordnungen in CMOS-kompatibler Oberflächenmikromechanik
Doleschal, W.; Gehner, A.; Kück, A.; Paufler, J.; Seltmann, R.
Book Article
1996New system for fast submicron optical direct writing
Seltmann, R.; Doleschal, W.; Gehner, A.; Kück, H.; Melcher, R.; Paufler, J.; Zimmer, G.
Conference Paper
1995Deformable micromirror devices as phase modulation high resolution light valves
Kück, Heinz; Doleschal, Wolfgang; Gehner, Andreas; Grundke, W.; Melcher, Rolf; Paufler, Jörg; Seltmann, Rolf; Zimmer, Günter
Conference Paper
1995Ein neues System für eine schnelle, maskenlose optische Mikrolithografie
Bollerott, M.; Doleschal, W.; Gehner, A.; Grinewitschus, V.; Grundke, W.; Hille, F.; Kück, H.; Mahdavi, P.; Melcher, R.; Paufler, J.; Seltmann, R.
Book Article
1995New system for fast submicron laser direct writing
Kück, Heinz; Bollerott, Michael; Doleschal, Wolfgang; Gehner, Andreas; Kunze, Detlef; Grundke, Wolfram; Melcher, Rolf; Paufler, Jörg; Seltmann, Rolf; Zimmer, Günter
Conference Paper
1995New system for fast submicron optical direct writing
Seltmann, R.; Doleschal, W.; Gehner, A.; Kück, H.; Melcher, R.; Paufler, J.; Zimmer, G.
Conference Paper