Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2015 | Failure and stress analysis of Cu TSVs using GHz-scanning acoustic microscopy and scanning infrared polariscopy
Wolf, I. de; Khaled, A.; Herms, M.; Wagner, M.; Djuric, T.; Czurratis, P.; Brand, S. | Conference Paper |
| 2014 | Defect detection in through silicon vias by GHz scanning acoustic microscopy: Key ultrasonic characteristics
Phommahaxay, A.; Wolf, I. de; Djuric, T.; Hoffrogge, P.; Brand, S.; Czurratis, P.; Philipsen, H.; Beyer, G.; Struyf, H.; Beyne, E. | Conference Paper |
| 2014 | Scanning acoustic gigahertz microscopy for metrology applications in three-dimensional integration technologies
Brand, S.; Lapadatu, A.; Djuric, T.; Czurratis, P.; Schischka, J.; Petzold, M. | Journal Article |