Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Mai, Alexander; Bunce, Christopher; Hübner, René; Pahner, Daniel; Dauderstädt, Ulrike
Journal Article
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2014Micro mirrors for high-speed laser deflection and patterning
Schenk, Harald; Grahmann, Jan; Sandner, Thilo; Wagner, Michael; Dauderstädt, Ulrike; Schmidt, Jan-Uwe
Conference Paper, Journal Article
2012One-dimensional light modulator
Sinning, Steffen; Wullinger, I.; Schmidt, Jan-Uwe; Friedrichs, Martin; Dauderstädt, Ulrike; Wolschke, Steffen; Hughes, Thomas; Pahner, D.; Wagner, Michael
Conference Paper
2011In situ determination of laser induced degradation of micro-mirror arrays
Mai, A.; Dauderstädt, U.; Pahner, D.; Krellmann, M.; Schmeißer, D.; Wagner, M.
Conference Paper
2011In situ surface topography measurement of MOEMS structures under laser exposure
Mai, A.; Krellmann, M.; Sinning, S.; Wolschke, S.; Dauderstädt, U.; Schenk, H.; Schmeißer, D.; Wagner, M.
Conference Paper
2010Temperature measurement on MOEMS micromirror plates under illumination
Wullinger, I.; Rudloff, D.; Lukat, K.; Dürr, P.; Krellmann, M.; Kunze, D.; Narayana Samy, A.; Dauderstädt, U.; Wagner, M.
Conference Paper
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2009Kleben von Flächenlichtmodulatoren in Gehäuse
Dürr, P.; Dauderstädt, U.; Ludewig, T.; Wolschke, S.; Wagner, M.; Gesang, T.
Conference Paper
2008Charging effects in micromirror spatial light modulators
Dauderstädt, U.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.
Journal Article
2008Planarity optimization of spatial light modulators
Duerr, P.; Wolschke, S.; Ludewig, T.; Dauderstädt, U.; Kunze, D.; Wagner, M.; Lakner, H.
Conference Paper
2007Charging effects in spatial light modulators based on micromirrors
Dauderstädt, U.; Bakke, T.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.; Lakner, H.
Conference Paper
2007Hochauflösende Flächenlichtmodulatoren auf Basis von Mikrospiegelmatrizen
Wagner, M.; Dürr, P.; Dauderstädt, U.; Gehner, A.; Friedrichs, M.; Schmidt, J.-U.; Lakner, H.
Conference Paper
2006Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Krellmann, M.; Friedrichs, M.; Dauderstädt, U.; Wagner, M.; Lakner, H.
Conference Paper
2005Mechanical stability of spatial light modulators in microlithography
Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2005Micro-opto-electro-mechanical systems technology and its impact on photonic applications
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Lakner, H.
Journal Article
2004Application of spatial light modulators for microlithography
Dauderstädt, U.; Dürr, P.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2004Light processing with electrostatically driven micro scanning mirrors and micro mirror arrays
Schenk, H.; Dauderstädt, U.; Dürr, P.; Gehner, A.; Wolter, A.; Lakner, H.
Book Article
2004Photonic microsystems: An enabling technology for light deflection and modulation
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Grüger, H.; Drabe, C.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for micro lithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for microlithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Micro mirror arrays for VLSI mask fabrication
Schenk, H.; Dauderstädt, U.; Dürr, P.; Lakner, H.K.
Book Article
2003Operation of spatial light modulators in DUV light
Dauderstädt, U.; Dürr, P.; Krellmann, M.; Karlin, T.; Berzinsh, U.; Leonardsson, L.; Wendrock, H.
Conference Paper
2002Reliability test and failure analysis of optical MEMS
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Lakner, H.
Conference Paper
2001Design and fabrication of micromirror arrays for UV-lithography
Lakner, H.; Dürr, P.; Dauderstädt, U.; Doleschal, W.; Amelung, J.
Conference Paper
2001New laser pattern generator for DUV using a spatial light modulator
Ljungblad, U.; Dauderstädt, U.; Dürr, P.; Sandström, T.; Buhre, H.; Lakner, H.
Journal Article
2001A Spatial Light Modulator (SLM) for advanced lithography
Dauderstädt, U.; Dürr, P.; Doleschal, W.
Book Article
2000Micromirror spatial light modulators
Dürr, P.; Gehner, A.; Dauderstädt, U.A.
Book Article
1999Micromirror spatial light modulators
Dürr, P.; Gehner, A.; Dauderstädt, U.A.
Conference Paper