Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Spectroscopic reflectometry in the extreme ultraviolet for critical dimension metrology
Bahrenberg, Lukas; Danylyuk, Serhiy; Michels, Robert; Glabisch, Sven; Ghafoori, Moein; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Conference Paper
2018Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Book Article
2017Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet
Bahrenberg, L.; Danylyuk, S.; Brose, S.; Pollentier, I.; Timmermans, M.; Gallagher, E.; Stollenwerk, J.; Loosen, P.
Conference Paper
2017Design of structured YAG:Ce scintillators with enhanced outcoupling for image detection in the extreme ultraviolet
Bahrenberg, L.; Herbert, S.; Mathmann, T.; Danylyuk, S.; Stollenwerk, J.; Loosen, P.
Journal Article
2017Optimized phase-shifting masks for high-resolution resist patterning by interference lithography
Brose, S.; Danylyuk, S.; Bahrenberg, L.; Lebert, R.; Loosen, P.; Juschkin, L.
Conference Paper
2017Verfahren zur hochauflösenden Abbildung eines Oberflächenbereiches bei streifendem Einfall der Messstrahlung
Bahrenberg, Lukas; Herbert, Stefan; Danylyuk, Serhiy
Patent
2016Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation
Brose, S.; Tempeler, J.; Danylyuk, S.; Loosen, P.; Juschkin, L.
Journal Article
2016Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: Process window analysis
Brose, S.; Tempeler, J.; Danylyuk, S.; Loosen, P.; Juschkin, L.
Journal Article
2016Enabling laboratory EUV research with a compact exposure tool
Brose, S.; Danylyuk, S.; Tempeler, J.; Kim, Hyun-su; Loosen, P.; Juschkin, L.
Conference Paper
2016Flächendetektor für EUV- und/oder weiche Röntgenstrahlung
Herbert, Stefan; Juschkin, Larissa; Danylyuk, Serhiy; Müller, Bernhard
Patent
2016Lensless proximity EUV lithography with a Xenon gas discharge plasma radiation
Kim, H.; Danylyuk, S.; Brose, S.; Loosen, P.; Bergmann, K.; Brocklesby, W.S.; Juschkin, L.
Conference Paper
2016Single exposure imaging of talbot carpets and resolution characterization of detectors for micro- and nano-patterns
Kim, H.; Danylyuk, S.; Brocklesby, W.S.; Juschkin, L.
Journal Article
2015Analysis of distinct scattering of extreme ultraviolet phase and amplitude multilayer defects with an actinic dark-field microscope
Bahrenberg, L.; Herbert, S.; Tempeler, J.; Maryasov, A.; Hofmann, O.; Danylyuk, S.; Lebert, R.; Loosen, P.; Juschkin, L.
Conference Paper
2015Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
Kunkemöller, G.; Maß, T.W.W.; Michel, A.-K.U.; Kim, H.-S.; Brose, S.; Danylyuk, S.; Taubner, T.; Juschkin, L.
Journal Article
2015Generation of circularly polarized radiation from a compact plasma-based EUV light source for tabletop X-ray magnetic circular dichroism studies
Wilson, D.; Rudolf, D.; Weier, C.; Adam, R.; Winkler, G.; Frömter, R.; Danylyuk, S.; Bergmann, K.; Grützmacher, D.; Schneider, C.M.; Juschkin, L.
Book Article
2015Multi-angle spectroscopic extreme ultraviolet reflectometry for analysis of thin films and interfaces
Danylyuk, S.; Herbert, S.; Loosen, P.; Lebert, R.; Schäfer, A.; Schubert, J.; Tryus, M.; Juschkin, L.
Conference Paper, Journal Article
2015Optical properties of 2D fractional Talbot patterns under coherent EUV illumination
Kim, H.; Li, W.; Danylyuk, S.; Brocklesby, W.S.; Marconi, M.C.; Juschkin, L.
Journal Article
2015Table-Top EUV and Soft X-Ray Microscopy
Herbert, S.; Bahrenberg, L.; Maryasov, A.; Danylyuk, S.; Loosen, P.; Juschkin, L.; Bergmann, K.; Lebert, R.
Journal Article
2014Erratum: "Generation of circularly polarized radiation from a compact plasma-based extreme ultraviolet light source for tabletop X-ray magnetic circular dichroism studies"[Rev. Sci. Instrum. 85, 103110 (2014)]
Wilson, D.; Rudolf, D.; Weier, C.; Adam, R.; Winkler, G.; Frömter, R.; Danylyuk, S.; Bergmann, K.; Grützmacher, D.; Schneider, C.M.; Juschkin, L.
Journal Article
2014Fractional Talbot lithography with extreme ultraviolet light
Kim, H.; Li, W.; Danylyuk, S.; Brocklesby, W.S.; Marconi, M.C.; Juschkin, L.
Journal Article
2014Generation of circularly polarized radiation from a compact plasma-based extreme ultraviolet light source for tabletop X-ray magnetic circular dichroism studies
Wilson, D.; Rudolf, D.; Weier, C.; Adam, R.; Winkler, G.; Frömter, R.; Danylyuk, S.; Bergmann, K.; Grützmacher, D.; Schneider, C.M.; Juschkin, L.
Journal Article
2013Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays
Danylyuk, S.; Kim, H.; Brose, S.; Dittberner, C.; Loosen, P.; Taubner, T.; Bergmann, K.; Juschkin, L.
Journal Article
2013Scalability limits of Talbot lithography with plasma-based extreme ultraviolet sources
Danylyuk, S.; Loosen, P.; Bergmann, K.; Kim, H.; Juschkin, L.
Journal Article
2013Tabletop coherent diffraction imaging with a discharge plasma EUV source
Juschkin, L.; Lötgering, L.; Rudolf, D.; Xu, R.; Brose, S.; Danylyuk, S.; Miao, J.
Conference Paper
2012Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography
Brose, S.; Danylyuk, S.; Juschkin, L.; Dittberner, C.; Bergmann, K.; Moers, J.; Panaitov, G.; Trellenkamp, S.; Loosen, P.; Grützmacher, D.
Journal Article
2012Gateable micro channel plate detector for extreme ultraviolet radiation with high temporal resolution
Freiberger, R.; Hauck, J.; Lvovsky, D.; Adam, R.; Danylyuk, S.; Juschkin, L.
Book Article
2011Challenges of high-speed EUV mask blank inspection
Herbert, S.; Hochschulz, Frank; Maryasov, A.; Danylyuk, S.
Conference Paper
2009Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm
Bergmann, K.; Danylyuk, S.V.; Juschkin, L.
Journal Article
2009XUV interference lithography for sub-10 nm patterning
Danylyuk, S.; Juschkin, L.; Brose, S.; Bergmann, K.; Loosen, P.
Book Article