Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Novel test structures for characterization of microsystems parameters at wafer level
Shaporin, A.; Streit, P.; Specht, H.; Mehner, J.; Dötzel, W.
Conference Paper
2008Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Forke, R.; Scheibner, D.; Mehner, J.E.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2008Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Doetzel, W.; Mehner, J.
Journal Article
2008A MEMS friction vacuum gauge suitable for high temperature environment
Tenholte, D.; Kurth, S.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2008Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity
Shaporin, A.; Forke, R.; Dienel, M.; Naumann, M.; Scheibner, D.; Dötzel, W.; Mehner, J.
Conference Paper
2008Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity
Shaporin, A.; Forke, R.; Dienel, M.; Naumann, M.; Scheibner, D.; Dötzel, W.; Mehner, J.
Conference Paper
2008Test-structures for wafer level microsystems characterization
Shaporin, A.; Forke, R.; Schmiedel, R.; Dötzel, W.
Conference Paper
2008Tunable Frequency Selective Vibration Detection with MEMS Force Coupled Oscillators
Forke, R.; Scheibner, D.; Doetzel, W.; Mehner, J.
Conference Paper
2007Acceleration Sensor Arrays
Dienel, M.; Hiller, K.; Gessner, T.; Dötzel, W.
Conference Paper
2007Adjustable Force Coupled Sensor-Actuator System for Low Frequency Resonant Vibration Detection
Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.
Conference Paper
2007Application of higher order derivatives method to parametric simulation of MEMS
Kolchuzhin, V.; Mehner, J.; Gessner, T.; Doetzel, W.
Conference Paper
2007Arrays of Sensors with Variable Stiffness
Shaporin, A.V.; Seifert, M.; Hanf, M.; Hiller, K.; Frühauf, J.; Gessner, T.; Dötzel, W.
Conference Paper
2007Laser-Display-System auf Basis von MEMS-Scannern
Specht, H.; Kurth, S.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.; Mehner, J.
Conference Paper
2007MEMS based laser display system
Specht, H.; Kurth, S.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Conference Paper
2007MEMS Characterization Technique Based on Special Designed Test-Structures
Shaporin, A.; Forke, R.; Doetzel, W.; Mehner, J.
Conference Paper
2007Performance and reliability test of MEMS optical scanners
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2007Spektrale Vibrationsmessung mit mikromechanischen kraftgekoppelten Silizium-Schwingern
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Dötzel, W.; Mehner, J.
Conference Paper
2007Test-Structure based MEMS Characterization Technique
Shaporin, A.V.; Hanf M.; Forke, R.; Mehner, J.; Gessner, T.; Dötzel, W.
Conference Paper
200624 GHz RF-MEMS phase shifter with non-galvanic electromagnetic coupling fabricated in silicon-bulk technology
Voigt, S.; Leidich, S.; Doetzel, W.; Kurth, S.; Gessner, T.
Journal Article
2006Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Forke, R.; Scheibner, D.; Mehner, J.; Geßner, T.; Doetzel, W.
Conference Paper
2006In-process gap reduction of capacitive transducers
Reuter, D.; Bertz, A.; Billep, D.; Scheibner, D.; Dötzel, W.; Gessner, T.
Journal Article
2006MEMS Vakuumsensor nach dem Reibungsprinzip
Kurth, S.; Tenholte, D.; Hiller, K.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Patent
2006Micromachined force coupled sensor actuator system for frequency selective vibration monitoring
Forke, R.; Scheibner, D.; Mehner, J.; Geßner, T.; Doetzel, W.
Conference Paper
2006Parametric finite element analysis for reduced order modeling of MEMS
Kolchuzhin, V.; Mehner, J.E.; Gessner, T.; Doetzel, W.
Conference Paper
2006Parametric simulation of MEMS based on automatic differentiation of finite element codes
Kolchuzhin, V.; Mehner, J.; Gessner, T.; Doetzel, W.
Conference Paper
2006Schalteranordnung zur Ansteuerung einer Antennenanordnung mit einzelnen Antennenelementen mit einer Mehrzahl von matrixförmig angeordneten Schaltern und Verfahren zum Schalten von matrixförmig angeordneten Schaltern
Kurth, S.; Frömel, J.; Voigt, S.; Leidich, S.; Nestler, J.; Shaporin, A.; Dötzel, W.; Gessner, T.
Patent
2006A tunable resonant vibration measurement unit based on a micromachined force coupled sensor-actuator system
Mehner, J.; Gessner, T.; Forke, R.; Scheibner, D.; Doetzel, W.
Conference Paper
2005Analyzing and simulation of MEMS in VHDL-AMS based on reduced order FE-models
Schlegel, M.; Bennini, F.; Mehner, J.; Herrmann, G.; Mueller, D.; Dötzel, W.
Journal Article
2005Finite element based reduced order modeling for micro electro mechanical systems (MEMS)
Mehner, J.; Kolchuzhin, V.; Schaporin, A.; Dötzel, W.; Gessner, T.
Conference Paper
2005Geometrically parameterized finite element model of a silicon strain gauge
Kolchuzhin, V.; Mehner, J.; Doetzel, W.
Conference Paper
2005In-process gap reduction of capacitive transducers
Reuter, D.; Bertz, A.; Billep, D.; Scheibner, D.; Buschnakowski, S.; Doetzel, W.; Gessner, T.
Conference Paper
2005Koplanare elektromagnetische Koppler zur Signalkontaktierung von RF-MEMS Bauelementen bei Mikrowellenfrequenzen
Voigt, S.; Leidich, S.; Kurth, S.; Geßner, T.; Doetzel, W.
Conference Paper
2005Mikromechanisches gekoppeltes Schwingsystem für frequenzselektive Vibrationsmessungen
Forke, R.; Mehner, J.; Doetzel, W.; Geßner, T.
Conference Paper
2005Model building, control design and practical implementation of a high precision, high dynamical MEMS acceleration sensor
Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005A novel 24-kHz resonant scanner for high-resolution laser display
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005Novel modeling techniques of MEMS sensors and actuators for electronic and system design in automotive applications
Mehner, J.E.; Shaporin, A.; Kolchuzhin, V.; Doetzel, W.; Gessner, T.
Conference Paper, Journal Article
2005Parametric model extraction for MEMS based on variational finite element techniques
Mehner, J.E.; Schaporin, A.; Kolchuzhin, V.; Doetzel, W.; Gessner, T.
Conference Paper
2005Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement
Billep, D.; Hiller, K.; Frömel, J.; Tenholte, D.; Reuter, D.; Dötzel, W.; Gessner, T.
Conference Paper
2005Ein resonanter 24 kHz Scanner für hoch auflösende Laserdisplays
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005A spectral vibration detection system based on tunable micromechanical resonators
Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2005Variational finite element technologies for parametric model
Mehner, J.; Schaporin, A.; Kolchuzhin, V.; Dötzel, W.; Gessner, T.
Conference Paper
2004Advanced Technologies for Microsystems Design
Mehner, J.; Dötzel, W.; Geßner, T.
Book Article
2004Application of micromirror arrays for Hadamard transform optics
Hanf, M.; Kurth, S.; Billep, D.; Hahn, R.; Faust, W.; Heinz, S.; Dötzel, W.; Gessner, T.
Conference Paper
2004Characterization and self-test of electrostatically tunable resonators for frequency selective vibration measurements
Scheibner, D.; Mehner, J.; Reuter, D.; Kotarsky, U.; Geßner, T.; Dötzel, W.
Conference Paper, Journal Article
2004A novel microactuator based on the working principle of a step-by-step switchgear
Schröter, B.; Mehner, J.; Hiller, K.; Geßner, T.; Dötzel, W.
Conference Paper
2004Parametric variational finite element method for MEMS electrostatic problems
Shaporin, A.; Kolchuzhin, V.; Mehner, J.; Dötzel, W.
Conference Paper
2003Application of low temperature direct bonding in optical devices and integrated systems
Hiller, K.; Kurth, S.; Neumann, N.; Hahn, R.; Kaufmann, C.; Hanf, M.; Heinz, S.; Geßner, T.; Dötzel, W.; Ebest, G.
Conference Paper
2003Closed loop control of a tunable infrared filter
Sternberger, A.; Hiller, K.; Geßner, T.; Dötzel, W.; Kurth, S.; Neumann, N.; Heinze, M.
Conference Paper
2003An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.
Conference Paper
2003Reduced order of fluid structural interactions in MEMS based on modal projection techniques
Mehner, J.; Dötzel, W.; Schauwecker, B.; Ostergard, D.
Conference Paper
2003Tunable Fabry-Perot interferometer for 3 - 4.5 mu m wavelength with bulk micromachined reflector carrier
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.
Conference Paper
2003Tunable infrared filter based on a Fabry-Perot-Interferometer
Kurth, S.,; Hiller, K.; Dötzel, W.; Geßner, T.; Neumann, N.; Heinze, M.
Conference Paper
2001Abstimmbare Siliziumsensoren zur Vibrationsanalyse mit elektromagnetischer Selbsttest-Funktionalität
Scheibner, D.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.
Conference Paper
2001Bulk micromachined and wafer bonded resonators for vacuum pressure measurement
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.
Conference Paper
2001Einsatz von Mikrospiegel-Arrays zur Lichtmodulation in einem Hadamard-Transformations-Spektrometer
Hanf, M.; Kurth, S.; Faust, W.; Hahn, R.; Heinz, S.; Dötzel, W.; Gessner, T.
Conference Paper
2001Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.
Conference Paper
2001Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.
Conference Paper
2000Deformation behavior of micro mirror arrays under optical power
Kurth, S.; Kehr, K.; Kaufmann, C.; Faust, W.; Dötzel, W.; Michel, B.
Conference Paper
2000Micromirrors and micromirror arrays for scanning applications
Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.
Conference Paper
2000A resonance method for the determination of Young's modulus and residual stress of thin microstructures
Mehner, J.; Kehr, K.; Schröter, B.; Kaufmann, C.; Dötzel, W.; Gessner, T.
Conference Paper
1999Abstimmbare resonante Sensorarrays in oberflächennaher Si-Bulk-Mikromechanik
Wibbeler, J.; Steiniger, C.; Wolf, K.; Symanzik, H.; Dötzel, W.; Mehner, J.
Conference Paper
1999Analogously working micromirror arrays
Kehr, K.; Kurth, S.; Mehner, J.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.
Conference Paper
1999Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.
Conference Paper
1999Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D.
Conference Paper
1999Investigation of heat transfer in micromirrors
Kehr, K.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
1999Low-temperature approaches for fabrication of high-frequency microscanners
Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Wiemer, M.; Schubert, I.
Conference Paper
1999Synchronously working micromirrors for beam steering
Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Hahn, R.; Seidel, R.; Dötzel, W.; Gessner, T.
Conference Paper