Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Precisely assembled multi deflection arrays - key components for multi shaped beam lithography
Mohaupt, Matthias; Beckert, Erik; Burkhardt, Thomas; Hornaff, Marcel; Damm, Christoph; Eberhardt, Ramona; Tünnermann, Andreas; Döring, Hans-Joachim; Reimer, Klaus
Conference Paper
2012Precision assembly of a miniaturized wire deflector for electron-beam lithography
Risse, Stefan; Damm, Christoph; Hornaff, Marcel; Kamm, Andreas; Mohaupt, Matthias; Eberhardt, Ramona; Schmidt, Ingo; Ramm, Roland; Kühmstedt, Peter; Notni, Gunther; Döring, Hans-Joachim; Elster, Thomas; Kirschstein, Ulf Carsten; Schenk, Christoph
Conference Paper, Journal Article