Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019On the Properties of Nanoporous SiO2 Films for Single Layer Antireflection Coating
Ghazaryan, L.; Sekman, Y.; Schröder, S.; Mühlig, C.; Stevanovic, I.; Botha, R.; Aghaee, M.; Creatore, M.; Tünnermann, A.; Szeghalmi, A.
Journal Article
2018Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
Faraz, T.; Knoops, H.C.M.; Verheijen, M.A.; Helvoirt, C.A.A. van; Karwal, S.; Sharma, A.; Beladiya, V.; Szeghalmi, A.; Hausmann, D.M.; Henri, J.; Creatore, M.; Kessels, W.M.M.
Journal Article