Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy
Hermann, P.; Hecker, M.; Chumakov, D.; Weisheit, M.; Rinderknecht, J.; Shelaev, A.; Dorozhkin, P.; Eng, L.M.
Journal Article
2010Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon-germanium thin films
Kolanek, K.; Hermann, P.; Dudek, P.T.; Gotszalk, T.; Chumakov, D.; Weisheit, M.; Hecker, M.; Zschech, E.
Journal Article
2009Fracture toughness assessment of patterned Cu-interconnect stacks by dual-cantilever-beam (DCB) technique
Chumakov, Dmytro; Lindert, Frank; Lehr, Matthias U.; Grillberger, Michael; Zschech, Ehrenfried
Journal Article
2009Stress-induced phenomena in nanosized copper interconnect structures studied by x-ray and electron microscopy
Zschech, E.; Huebner, R.; Chumakov, D.; Aubel, O.; Friedrich, D.; Guttmann, P.; Heim, S.; Schneider, G.
Journal Article
2008Novel carbon-cage-based ultralow-k materials: Modeling and first experiments
Zagorodniy, K.; Chumakov, D.; Täschner, C.; Lukowiak, A.; Stegmann, H.; Schmeißer, D.; Geisler, H.; Engelmann, H.-J.; Hermann, H.; Zschech, Ehrenfried
Journal Article
2008Process control and physical failure analysis for sub-100NM CU/Low-K structures
Zschech, Ehrenfried; Huebner, R.; Potapov, P.; Zienert, I.; Meyer, M.A.; Chumakov, D.; Geisler, H.; Hecker, M.; Engelmann, H.-J.; Langer, E.
Conference Paper