Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995In situ film thickness and temperature control of molecular beam epitaxy growth by pyrometric interferometry
Böbel, F.G.; Möller, H.; Hertel, B.; Grothe, H.; Schraud, G.; Schröder, S.; Chow, P.
Journal Article
1995In situ real time monitoring of film thickness and temperature during epitaxial growth by using Reflexion Supported Pyrometric Interferometry (RSPI)
Böbel, F.G.; Möller, H.; Hertel, B.; Märitz, J.; Wagner, J.; Chow, P.
Conference Paper
1994In situ film-thickness and temperature monitor
Böbel, F.G.; Möller, H.; Hertel, B.; Ritter, G.; Chow, P.
Journal Article
1994Pyrometric Interferometry (PI) for real time MBE process monitoring
Böbel, F.G.; Möller, H.; Hertel, B.; Wowchak, A.; Hove, J. van; Chow, P.
Journal Article