Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Intrinsic stress generation and relaxation of plasma- enhanced chemical-vapor-deposited oxide during deposition and subsequent thermal cycling
Chen, K.S.; Zhang, X.; Lin, S.Y.
Journal Article
2003Thermomechanical behavior of thick PECVD oxide-films for power MEMS applications
Zhang, X.; Chen, K.S.; Spearing, S.M.
Journal Article