Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2020 | Ellipsometric inline inspection of dielectric substrates with nonplanar surfaces
Hartrumpf, Matthias; Chen, Chia-Wei; Längle, Thomas; Beyerer, Jürgen | Journal Article |
| 2020 | Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen | Journal Article |
| 2019 | Measurement of ellipsometric data and surface orientations by modulated circular polarized light
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen | Journal Article, Conference Paper |
| 2019 | An Overview of Return-Path Ellipsometry
Chen, Chia-Wei | Conference Paper |