Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Ellipsometric inline inspection of dielectric substrates with nonplanar surfaces
Hartrumpf, Matthias; Chen, Chia-Wei; Längle, Thomas; Beyerer, Jürgen
Journal Article
2020Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen
Journal Article
2019Measurement of ellipsometric data and surface orientations by modulated circular polarized light
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen
Journal Article, Conference Paper
2019An Overview of Return-Path Ellipsometry
Chen, Chia-Wei
Conference Paper