Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Anodic and direct bonding of Si and glass - Similarities and distinctions in applications
Gabriel, M.; Cetin, V.; Ludewig, T.; Eichler, M.
Conference Paper
2005Capabilities of an ambient pressure plasma for activation in LT wafer bonding processes
Gabriel, M.; Cetin, V.; Hansen, S.; Reiche, M.; Radu, I.; Eichler, M.
Conference Paper