Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008A compact optical multichannel system for ethylene monitoring
Hildenbrand, J.; Wöllenstein, J.; Hartwig, S.; Eberhardt, A.; Halford, B.; Moreno, M.; Fonollosa, J.; Fonseca, L.; Santander, J.; Rubio, R.; Gracia, I.; Cane, C.
Journal Article, Conference Paper
2007FIB-based technique for stress characterization on thin films for reliability purposes
Sabaté, N.; Vogel, D.; Keller, J.; Gollhardt, A.; Marcos, J.; Gracia, I.; Cané, C.; Michel, B.
Journal Article
2007Residual stress measurement on a MEMS structure with high-spatial resolution
Sabate, N.; Vogel, D.; Gollhardt, A.; Keller, J.; Cane, C.; Gracia, I.; Morante, J.R.; Michel, B.
Journal Article
2006Compact filter photometer for ethylene monitoring
Wöllenstein, J.; Hartwig, S.; Hildenbrand, J.; Moreno, M.; Santander, J.; Rubio, R.; Fonollosa, J.; Fonseca, L.; Cane, C.
Presentation
2006Digital image correlation of nanoscale deformation fields for local stress measurement in thin films
Sabate, N.; Vogel, D.; Gollhardt, A.; Marcos, J.; Gracia, I.; Cane, C.; Michel, B.
Journal Article
2006Measurement of residual stress by slot milling with focused ion-beam equipment
Sabate, N.; Vogel, D.; Gollhardt, A.; Keller, J.; Cane, C.; Gracia, I.; Morante, J.R.; Michel, B.
Journal Article
2006Measurement of residual stresses in micromachined structures in a microregion
Sabate, N.; Vogel, D.; Gollhardt, A.; Keller, J.; Michel, B.; Cane, C.; Gracia, I.; Morante, J.R.
Journal Article
2006Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2
Belmonte, J.C.; Manzano, J.; Arbiol, J.; Cirera, A.; Puigcorbe, J.; Vila, A.; Sabate, N.; Gracia, I.; Cane, C.; Morante, J.R.
Journal Article
20053D deformation analysis of flow and gas sensors membranes for reliability assessment
Sabate, N.; Keller, J.; Gollhardt, A.; Vogel, D.; Gracia, I.; Cane, C.; Morante, J.R.; Michel, B.
Conference Paper
2005A highly sensitive IR-optical sensor for ethylene-monitoring
Hartwig, S.; Hildenbrand, J.; Moreno, M.; Fonollosa, J.; Fonseca, L.; Santander, J.; Rubio, R.; Cane, C.; Lambrecht, A.; Wöllenstein, J.
Conference Paper
2004A glass/silicon technology for low-power robust gas sensors
Plaza, J.A.; López-Bosque, M.J.; Gracia, I.; Cane, C.; Wöllenstein, J.; Kühner, G.; Plescher, G.; Böttner, H.
Journal Article
2003High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors
Puigcorbe, J.; Vogel, D.; Michel, B.; Vila, A.; Gracia, I.; Cane, C.; Morante, J.R.
Journal Article
2003A novel single chip thin film metal oxide array
Wöllenstein, J.; Plaza, J.A.; Cane, C.; Min, Y.; Böttner, H.; Tuller, H.L.
Journal Article, Conference Paper
2003Semiconductor gas sensor compatibility with CMOS technologies
López-Bosque, M.; Plaza, J.A.; Dantander, J.; Gracia, I.; Cane, C.; Wöllenstein, J.; Moretton, E.; Lambrecht, A.; Schjolberg-Henriksen, K.
Conference Paper
2003Thermal and mechanical analysis of micromachined gas sensors
Puigcorbe, J.; Vogel, D.; Michel, B.; Vila, A.; Gracia, I.; Cane, C.; Morante, J.R.
Journal Article
2002New materials and technologies for micromachined metal oxide gas sensor arrays
Wöllenstein, J.; Böttner, H.; Plaza, J.A.; Cane, C.
Conference Paper
2001A novel methodology for the manufacturability of robust CMOS semiconductor gas sensor arrays
Götz, A.; Gracia, I.; Plaza, J.A.; Cane, C.; Roetsch, P.; Böttner, H.; Seibert, K.
Journal Article
2001A technology for robust gas sensors
López, M.J.; Plaza, J.A.; Gracia, I.; Cane, C.; Wöllenstein, J.; Kühner, G.; Plescher, G.; Böttner, H.
Conference Paper
2001Vorrichtung zur Halterung einer zu heizenden Mikrostruktur und Verfahren zur Herstellung der Vorrichtung
Boettner, H.; Seibert, K.; Cane, C.; Goetz, A.
Patent
2000Combination of metal oxyde based gas sensors with CMOS electronic circuits on wafer level
Roetsch, P.; Böttner, H.; Seibert, K.; Götz, A.; Gracia, I.; Plaza, J.A.; Cane, C.
Conference Paper
2000Low-power micromachined structures for gas sensors with improved robustness
Gracia, I.; Götz, A.; Plaza, J.A.; Cane, C.; Roetsch, P.; Böttner, H.; Seibert, K.
Conference Paper