Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2009 | Wave front sensor for highly accurate characterization of flatness on wafer surfaces
Nutsch, A.; Bucourt, S.; Grandin, T.; Lazareva, I.; Pfitzner, L. | Conference Paper |
| 2008 | Determination of flatness on patterned wafer surfaces using wavefront sensing methods
Nutsch, A.; Pfitzner, L.; Grandin, T.; Levecq, X.; Bucourt, S. | Conference Paper |