Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
201411th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
Schmitt, Robert; Bosse, H.
Journal Article, Conference Paper
2011Production Metrology - Future Trends and Challenges
Schmitt, R.; Nisch, S.; Heizmann, M.; Bosse, H.; Imkamp, D.
Conference Paper
1997Contamination reduction in low voltage e-beam microscopy for dimensional metrology
Brünger, W.H.; Kleinschmidt, H.; Hassler-Grohne, W.; Bosse, H.
Conference Paper