Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Reference samples for ultra trace analysis of organic compounds on substrate surfaces
Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.
Conference Paper
2012Reliable quantification of inorganic contamination by TXRF
Müller, M.; Nutsch, A.; Altmann, R.; Borionetti, G.; Holz, T.; Mantler, C.; Hönicke, P.; Kolbe, M.; Beckhoff, B.
Conference Paper
2011Analysis of contaminated oxide-silicon interfaces
Polignano, M.L.; Codegoni, D.; Castellano, L.; Greco, S.; Borionetti, G.; Bonoli, F.; Nutsch, A.; Altmann, R.; Leibold, A.; Otto, M.; Monge, P.; Riva, C.
Conference Paper
2011The impact of organic contamination on the oxide-silicon interface
Codegoni, D.; Polignano, M.L.; Castellano, L.; Borionetti, G.; Bonoli, F.; Nutsch, A.; Leibold, A.; Otto, M.
Conference Paper
2009Characterization of Organic Contamination during Semiconductor Manufacturing Processing Employing Near Edge X-Ray Absorption Fine Structure Spectroscopy
Mueller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.; Müller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.
Abstract
2009Characterization of organic contamination in semiconductor manufacturing processes
Nutsch, A.; Beckhoff, B.; Bedana, G.; Borionetti, G.; Codegoni, D.; Grasso, S.; Guerinoni, G.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.; Simone, D. de; Frey, L.
Conference Paper
2009Comparability of TXRF Systems at Different Laboratories
Nutsch, A.; Beckhoff, B.; Altmann, R.; Polignano, M.; Cazzini, E.; Codegoni, D.; Borionetti, G.; Kolbe, M.; Mueller, M; Mantler, C.; Streli, C.
Conference Paper
2009Comparison of silicon surface preparation methods for measurement of minority carrier lifetime using the microwave photoconductive decay (µ-PCD) coupled with continuous corona charge (Charge-PCD)
Pavelka, T.; Pap, A.; Kenesei, P.; Varga, M.; Novinics, F.; Tallián, M.; Borionetti, G.; Guaglio, G.; Pfeffer, M.; Don, E.
Conference Paper
2009Highly sensitive detection of inorganic contamination
Beckhoff, B.; Nutsch, A.; Altmann, R.; Borionetti, G.; Pello, C.; Polignano, M.L.; Codegoni, D.; Grasso, S.; Cazzini, E.; Bersani, M.; Lazzeri, P.; Gennaro, S.; Kolbe, M.; Müller, M.; Kregsamer, P.; Posch, F.
Conference Paper