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| 2012 | Wafer level approaches for the integration of carbon nanotubes in electronic and sensor applications
Hermann, S.; Fiedler, H.; Haibo, Y.; Loschek, S.; Bonitz, J.; Schulz, S.E.; Gessner, T. | Conference Paper |
| 2010 | Integration von Kohlenstoffnanoröhren für MEMS/NEMS Anwendungen
Hermann, S.; Loschek, S.; Haibo, Y.; Bonitz, J.; Schulz, S.E.; Gessner, T. | Conference Paper |
| 2010 | Technologie zur Integration von Kohlenstoffnanoröhren für Intertialsensoren
Bonitz, J.; Hermann, S.; Kaufmann, C.; Gessner, T. | Conference Paper |
| 2009 | Deformation measurements of high-speed MEMS with combined two-wavelength single-pulse digital holography and single phase reconstruction using subpicosecond pulses
Hansel, T.; Grunwald, R.; Reimann, K.; Bonitz, J.; Kaufmann, C.; Griebner, U. | Journal Article |
| 2009 | Selective deposition of aligned carbon nanotubes for NEMS applications
Bonitz, J.; Hermann, S.; Loschek, S.; Liu, P.; Schulz, S.E. | Conference Paper |
| 2009 | Synthesized femtosecond laser pulse source for two-wavelength contouring with simultaneously recorded digital holograms
Hansel, T.; Steinmeyer, G.; Grunwald, R.; Falldorf, C.; Bonitz, J.; Kaufmann, C.; Kebbel, V.; Griebner, U. | Journal Article |
| 2008 | Laser Trimming of Micro Mirror Devices
Haenel, J.; Keiper, B.; Bleul, K.; Kaufmann, C.; Bonitz, J. | Journal Article |
| 2007 | Hochreflektiver mikromechanischer Scanner für Materialbearbeitung und medizinische Anwendungen
Bonitz, J.; Kaufmann, C.; Gessner, T.; Bundesmann, C.; Eichentopf, I.-M.; Maendl, S.; Neumann, H. | Conference Paper |
| 2007 | Laser Trimming of MEMS
Bleul, K.; Bonitz, J.; Haenel, J.; Kaufmann, C.; Keiper, B.; Mehner, J.; Petsch, T. | Conference Paper |
| 2006 | MEMS based micro scanners: Components, technologies and applications
Geßner, T.; Bonitz, J.; Kaufmann, C.; Kurth, S.; Specht, H. | Conference Paper |
| 2003 | CVD TiN layers as diffusion barrier films on porous SiO2 aerogel
Bonitz, J.; Schulz, S.E.; Gessner, T. | Conference Paper |