Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Scaling up integration of carbon nanotubes into Micro-Electro-Mechanical systems
Böttger, S.; Jöhrmann, N.; Bonitz, J.; Wunderle, B.; Schulz, S.E.; Hermann, S.
Conference Paper
2018Vertically aligned carbon nanotube films as absorption layers for IR applications
Kini, Mandar; Bonitz, Jens; Müller, Michael; Schulz, Stefan E.; Hermann, Sascha
Conference Paper
2017A test device for in situ TEM investigations on failure behaviour of carbon nanotubes embedded in metals under tensile load
Jöhrmann, N.; Hartmann, S.; Jacob, K.; Bonitz, J.; MacArthur, K.E.; Hermann, S.; Schulz, S.E.; Wunderle, B.
Conference Paper
2016An in situ tensile test device for thermo-mechanical characterisation of interfaces between carbon nanotubes and metals
Hartmann, S.; Bonitz, J.; Heggen, M.; Hermann, S.; Hölck, O.; Schulz, S.E.; Gessner, T.; Wunderle, B.
Conference Paper
2016A MEMS test stage for in situ testing of interfaces between carbon nanotubes and metals
Hartmann, S.; Hermann, S.; Bonitz, J.; Heggen, M.; Schulz, S.E.; Gessner, T.; Wunderle, B.
Conference Paper
2016Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals: Molecular dynamics simulations and in situ experiments using electron microscopy
Hartmann, S.; Hermann, S.; Bonitz, J.; Heggen, M.; Hölck, O.; Shaporin, A.; Mehner, J.; Schulz, S.E.; Gessner, T.; Wunderle, B.
Journal Article
2016Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems
Bonitz, J.; Böttger, S.; Herrmann, S.; Schulz, S.E.; Gessner, T.; Hartmann, S.; Wunderle, B.
Conference Paper
2015Carbon Nanotube based sensors in MEMS/NEMS
Hermann, S.; Bonitz, J.; Boettger, S.; Hartmann,S; Shaporin, A.; Mehner, J.; Wunderle, B.; Schulz, S.E.; Gessner, T.
Conference Paper
2015Towards nanoreliability of CNT-based sensor applications: Investigations of CNT-metal interfaces combining molecular dynamics simulations, advanced in situ experiments and analytics
Hartmann, S.; Shaporin, A.; Hermann, S.; Bonitz, J.; Heggen, M.; Meszmer, P.; Sturm, H.; Hölck, O.; Blaudeck, T.; Schulz, S.E.; Mehner, J.; Gessner, T.; Wunderle, B.
Conference Paper
2013Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes
Shaporin, A.; Hermann, S.; Kaufmann, C.; Schulz, S.E.; Gessner, T.; Voigt, S.; Mehner, J.; Hartmann, S.; Wunderle, B.; Bonitz, J.
Conference Paper
2012Reaktive nanoskalige Mehrschichtsysteme lösen Temperaturprobleme bei Mikrosystemen
Braeuer, J.; Bonitz, J.
Journal Article
2012Wafer level approaches for the integration of carbon nanotubes in electronic and sensor applications
Hermann, S.; Fiedler, H.; Haibo, Y.; Loschek, S.; Bonitz, J.; Schulz, S.E.; Gessner, T.
Conference Paper
2010Integration von Kohlenstoffnanoröhren für MEMS/NEMS Anwendungen
Hermann, S.; Loschek, S.; Haibo, Y.; Bonitz, J.; Schulz, S.E.; Gessner, T.
Conference Paper
2010Technologie zur Integration von Kohlenstoffnanoröhren für Intertialsensoren
Bonitz, J.; Hermann, S.; Kaufmann, C.; Gessner, T.
Conference Paper
2009Deformation measurements of high-speed MEMS with combined two-wavelength single-pulse digital holography and single phase reconstruction using subpicosecond pulses
Hansel, T.; Grunwald, R.; Reimann, K.; Bonitz, J.; Kaufmann, C.; Griebner, U.
Journal Article
2009Selective deposition of aligned carbon nanotubes for NEMS applications
Bonitz, J.; Hermann, S.; Loschek, S.; Liu, P.; Schulz, S.E.
Conference Paper
2009Synthesized femtosecond laser pulse source for two-wavelength contouring with simultaneously recorded digital holograms
Hansel, T.; Steinmeyer, G.; Grunwald, R.; Falldorf, C.; Bonitz, J.; Kaufmann, C.; Kebbel, V.; Griebner, U.
Journal Article
2008Laser Trimming of Micro Mirror Devices
Haenel, J.; Keiper, B.; Bleul, K.; Kaufmann, C.; Bonitz, J.
Journal Article
2007Hochreflektiver mikromechanischer Scanner für Materialbearbeitung und medizinische Anwendungen
Bonitz, J.; Kaufmann, C.; Gessner, T.; Bundesmann, C.; Eichentopf, I.-M.; Maendl, S.; Neumann, H.
Conference Paper
2007Laser Trimming of MEMS
Bleul, K.; Bonitz, J.; Haenel, J.; Kaufmann, C.; Keiper, B.; Mehner, J.; Petsch, T.
Conference Paper
2006MEMS based micro scanners: Components, technologies and applications
Geßner, T.; Bonitz, J.; Kaufmann, C.; Kurth, S.; Specht, H.
Conference Paper
2003CVD TiN layers as diffusion barrier films on porous SiO2 aerogel
Bonitz, J.; Schulz, S.E.; Gessner, T.
Conference Paper