Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011AlN based microgenerators for powering implantable sensor devices
Bludau, O.; Röhlig, C.-C.; Knöbber, F.; Kirste, L.; Sah, R.E.; Driad, R.; Pletschen, W.; Lebedev, V.; Cimalla, V.
Journal Article, Conference Paper
2011Dynamic characterization of thin aluminum nitride microstructures
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2011Low-temperature grown high-quality piezoelectric AIN Film for sensor application
Sah, R.E.; Bludau, O.; Röhlig, C.-C.; Kirste, L.; Cimalla, V.; Lebedev, V.
Conference Paper
2010AlN-basierte Mikrostrukturen für Piezogeneratoren
Bludau, O.
Thesis
2010Diamond/AlN thin films for optical applications
Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V.
Conference Paper
2010Investigation of stress in AIN thin films for piezoelectric MEMS
Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H.
Conference Paper