Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Investigation of cracking prevention in magnetron-sputtered TiAlN coatings during subsequent electron beam hardening
Hollmann, P.; Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G.
Journal Article
2017Herstellung, Modellierung und Bewertung nanostrukturierter hochtemperaturstabiler Schichten für Umformwerkzeuge - Nanowerk. Abschlussbericht
Kailer, A.; Moser, T.; Walter, M.; Held, A.; Keunecke, M.; Stein, C.; Bewilogua, K.
Report
2017Investigations of electron beam hardening on TiAlN coated heat-treatable steel
Weigel, K.; Keunecke, M.; Bewilogua, K.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H.
Journal Article
2016Surface hardening after hard coating deposition - combining TiAlN tribological coatings with subsequent electron beam treatment
Weigel, K.; Keunecke, M.; Bewilogua, K.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H.
Conference Paper
2015Electron beam hardening of PVD-coated steels
Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G.
Journal Article
2015Electron beam hardening of PVD-coated steels - improved load-supporting capacity for TI1-XALXN layers
Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G.
Conference Paper
2015Modified diamond-like carbon coatings (a-C:H:X) for anti-fouling applications
Keunecke, M.; Bialuch, I.; Stein, C.; Bewilogua, K.; Bräuer, G.; Augustin, W.; Scholl, S.
Conference Paper
2014Duplex surface treatment - physical vapor deposition (PVD) and subsequent electron beam hardening (EBH)
Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G.
Journal Article
2014Effects of electron beam treatment on Ti(1-x)AlxN coatings on steel
Weigel, K.; Bewilogua, K.; Keunecke, M.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H.
Journal Article
2014History of diamond-like carbon films - from first experiments to worldwide applications
Bewilogua, K.; Hofmann, D.
Journal Article
2014Mechanical and Tribological Behavior of Different Nitride Hard Coatings after Tempering and Oxidation Tests
Keunecke, M.; Weber, M.; Stein, C.; Bewilogua, K.
Conference Paper
2013From DLC to Si-DLC based layer systems with optimized properties for tribological applications
Hofmann, D.; Kunkel, S.; Bewilogua, K.; Wittorf, R.
Journal Article, Conference Paper
2013PVD-Prozesse sputtern
Bewilogua, K.
Conference Paper
2012CrC/a-C:H coatings for highly loaded, low friction applications under formulated oil lubrication
Keunecke, M.; Bewilogua, K.; Becker, J.; Gies, A.; Grischke, M.
Journal Article
2012Diamond-like carbon films
Bewilogua, K.; Scheibe, H.-J.
Conference Paper
2012Formation of Ti2AlN phase after post-heat treatment of Ti-Al-N films deposited by pulsed magnetron sputtering
Yang, Y.; Keunecke, M.; Stein, C.; Gao, L.-J.; Jiang, X.; Bewilogua, K.; Sun, C.
Journal Article
2012Optimierte DLC-Beschichtungsprozesse
Bewilogua, K.
Journal Article
2012Zerspanwerkzeuge aus nanoskaligen Materialien und superharten Schichten zur Trocken-, Hart- und Gussbearbeitung (NanoHM)
Kölker, Werner; Hartmann, C.; Stothard, N.; Bolz, S.; Hennicke, J.; Kessel, T.; Kessel, H.U.; Richter, Volkmar; Holke, R.; Pötschke, Johannes; Bewilogua, Klaus; Keunecke, Martin; Stein, Christian; Caspers, B.; Hünsche, I.; Schnitter, C.; Berg, H. van den; Kassel, D.; Rödiger, K.
Report
2011Cubic boron nitride based coating systems with different interlayers for cutting inserts
Stein, C.; Keunecke, M.; Bewilogua, K.; Chudoba, T.; Kölker, W.; Berg, H. van den
Journal Article
2011Easy-clean surfaces built to order
Bialuch, I.; Bewilogua, K.; Augustin, W.; Scholl, S.
Journal Article
2011High rate deposition of hard a-C:H coatings using microwave enhanced plasma CVD
Bialuch, I.; Bewilogua, K.; Günther, M.; Peter, S.; Richter, F.
Conference Paper
2011High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD
Günther, M.; Bialuch, I.; Peter, S.; Bewilogua, K.; Richter, F.
Journal Article
2011Magnetron sputtering and its applications
Bräuer, G.; Bandorf, R.; Bewilogua, K.; Diehl, W.; Szyszka, B.; Vergöhl, M.
Conference Paper
2011Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD
Bewilogua, K.; Bialuch, I.; Ruske, H.; Weigel, K.
Journal Article
2011Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD
Bewilogua, K.; Bialuch, I.; Ruske, H.; Weigel, K.
Journal Article
2011Si-DLC basierende Schichtsysteme mit anwendungsoptimierten Eigenschaften
Hofmann, D.; Kunkel, S.; Bewilogua, K.; Wittorf, R.
Conference Paper
2010Cubic boron nitride coatings - sputter deposition, properties and application tests
Bewilogua, K.; Keunecke, M.; Park, S.T.; Stein, C.; Weigel, K.; Richter, V.; Oyanedel-Fuentes, J.A.
Conference Paper
2010Gepulste Plasmen für industrielle Beschichtungsprozesse
Bräuer, G.; Szyszka, B.; Bandorf, R.; Bewilogua, K.; Brand, J.; Vergöhl, M.
Conference Paper
2010Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering
Keunecke, M.; Stein, C.; Bewilogua, K.; Koelker, W.; Kassel, D.; Berg, H. van den
Journal Article, Conference Paper
2010PECVD-Verfahren mit gepulster Anregung zur Abscheidung von DLC-Schichten
Bewilogua, K.; Bialuch, I.; Keunecke, M.
Conference Paper
2010Wear of carbon nitride coatings under oscillating sliding conditions
Wäsche, R.; Hartelt, M.; Springborn, U.; Bewilogua, K.; Keunecke, M.
Journal Article
2009Advanced magnetron sputter technique for depostion of superhard a-C:H coatings
Bewilogua, K.; Keunecke, M.; Thomsen, H.; Wittorf, R.; Ivanov, Y.; Zufraß, T.
Conference Paper
2009Characterization of c-BN coating films with a multiple intermediate layer deposited on cutting tools by r.f. sputtering
Lee, K.-M.; Oh, D.K.; Lee, K.; Lee, D.; Bewilogua, K.; Park, S.T.; Kim, D.K.; Ahn, H.
Journal Article
2009Preparation and comparison of a-C:H coatings using reactive sputter techniques
Keunecke, M.; Weigel, K.; Bewilogua, K.; Cremer, R.; Fuss, H.-G.
Journal Article
2009Surface technology for automotive engineering
Bewilogua, K.; Bräuer, G.; Dietz, A.; Gäbler, J.; Goch, G.; Karpuschewski, B.; Szyszka, B.
Journal Article
2009Up-scaling the production of modified a-C:H coatings in the framework of plasma polymerization processes
Corbella, C.; Bialuch, I.; Kleinschmidt, M.; Bewilogua, K.
Conference Paper, Journal Article
2008Industrial applications of HIPIMS
Münz, W.-D.; Schenkel, M.; Kunkel, S.; Paulitsch, M.; Bewilogua, K.
Conference Paper
2008Modified DLC coatings prepared in a large-scale reactor by dual microwave/pulsed-DC plasma-activated chemical vapour deposition
Corbella, C.; Bialuch, I.; Kleinschmidt, M.; Bewilogua, K.
Journal Article
2007Characterisation of HIPIMS deposited Cr2N and CrN coatings
Münz, W.D.; Schenkel, M.; Kunkel, S.; Bewilogua, K.; Keunecke, M.; Wittorf, R.
Conference Paper
2007Entwicklungsstand kubischer Bornitrid-Beschichtungen für Zerspanwerkzeuge
Keunecke, M.; Wiemann, E.; Bewilogua, K.
Journal Article
2007Tool coatings - new developments for forming, cutting and abrasive machining
Gäbler, J.; Bewilogua, K.; Biehl, S.; Brand, J.; Höfer, M.; Keunecke, M.; Schäfer, L.; Thomsen, H.; Weber, M.
Conference Paper
2007Up scaling of processes for plasma-activated chemical vapour deposition of modified DLC coatings
Corbella, C.; Bialuch, I.; Kleinschmidt, M.; Bewilogua, K.
Conference Paper
2007Wetting behaviours of a-C:H:Si:O film coated nano-scale dual rough surface
Kim, T.-Y.; Bialuch, I.; Bewilogua, K.; Oh, K.H.; Lee, K.-R.
Journal Article
2006Boron containing combination tool coatings - characterization and application tests
Keunecke, M.; Bewilogua, K.; Wiemann, E.; Weigel, K.; Wittorf, R.; Thomsen, H.
Journal Article
2006Carbon based coating systems for forming tools
Weber, M.; Bewilogua, K.; Bialuch, I.; Keunecke, M.; Thomsen, H.; Wittorf, R.
Conference Paper
2006DLC based coatings for tribological applications
Bewilogua, K.; Bialuch, I.; Brand, J.; Keunecke, M.; Ruske, H.; Thomsen, H.; Weber, M.; Wittorf, R.
Conference Paper
2006Hoch belastbare a-C:H Schichten für Werkzeuge und Bauteile
Weber, M.; Bewilogua, K.; Brand, J.
Conference Paper
2006Hochbelastbare kohlenstoffbasierte Mehrschichtsysteme für die Umformtechnik
Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R.
Journal Article
2006Influence of different interlayers and bias voltage on the properties of a-C:H and a-C:H:Me coatings prepared by reactive d.c. magnetron sputtering
Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R.
Journal Article
2006Substrate influence in Young's modulus determination of thin films by indentation methods
Richter, F.; Herrmann, M.; Molnar, F.; Chudoba, T.; Schwarzer, N.; Keunecke, M.; Bewilogua, K.; Zhang, X.W.; Boyen, H.-G.; Ziemann, P.
Journal Article
2006Thick c-BN coatings - preparation, properties and application tests
Keunecke, M.; Wiemann, E.; Weigel, K.; Park, S.T.; Bewilogua, K.
Journal Article
2006Thick c-BN coatings - Preparation, properties and application tests
Wiemann, E.; Keunecke, M.; Part, S.-T.; Weigel, K.; Bewilogua, K.
Conference Paper, Journal Article
2006Tribologisches Verhalten von amorphen Kohlenstoffschichten
Schultrich, B.; Bewilogua, K.
Conference Paper
2005Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
Bewilogua, K.; Brand, J.; Thomsen, H.; Weber, M.; Wittorf, R.
Journal Article
2004Anwendung und Potenzial neuartiger hochbelastbarer Kohlenstoffschichten für die Umformtechnik
Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R.
Conference Paper
2004DLC based coatings prepared by reactive d.c. magnetron sputtering
Bewilogua, K.; Wittorf, R.; Thomsen, H.; Weber, M.
Conference Paper, Journal Article
2004Growth and characterization of thick cBN coatings on silicon and tool substrates
Bewilogua, K.; Keunecke, M.; Weigel, K.; Wiemann, E.
Journal Article
2004Herstellung, Eigenschaften und Anwendungsfelder modifizierter Kohlenstoffschichten
Bialuch, I.; Weigel, K.; Weber, M.; Bewilogua, K.
Conference Paper
2004Untersuchung tribologischer Schichtsysteme mit dem Spiraltribometer
Bethke, R.; Bewilogua, K.
Journal Article
2004Weniger Verschleiß mit diamantähnlichen Schichten
Brand, J.; Bewilogua, K.
Book Article
2003Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten
Bewilogua, K.; Wittorf, R.; Thomsen, H.
Patent
2002Brillouin light scattering study on the elastic properties of thick sputtered c-BN films
Wittkowski, T.; Jorzick, J.; Jung, K.; Hillebrands, B.; Keunecke, M.; Bewilogua, K.
Journal Article
2002Diamantähnliche Kohlenstoffschichten als Konstruktionselemente
Beckmann, C.; Brand, J.; Bewilogua, K.
Journal Article
2002DLC based coatings. Preparation, properties and applications
Bewilogua, K.; Hieke, A.; Bialuch, I.; Brand, J.; Wittorf, R.
Conference Paper
2002Dry lubricant coatings for cutting and forming operations
Lahres, M.; Bewilogua, K.
Conference Paper
2002Hard and superhard coatings in the system B-C-N
Bewilogua, K.; Keunecke, M.
Conference Paper
2002International Conference on Metallurgical Coatings and Thin Films
Bewilogua, K.
Journal Article
2002Kohlenstoffschichten gegen Reibung und Verschleiß
Bewilogua, K.; Bräuer, G.
Journal Article
2002Structural features of thick C-boron nitride coatings deposited via a graded B-C-N interlayer
Yamamoto, K.; Keunecke, M.; Bewilogua, K.; Czigany, Z.; Hultman, L.
Journal Article
2002Verschleiss- und reibungsmindernde Schicht, mit Substrat mit dieser Schicht sowie Verfahren zum Herstellen einer solchen Schicht
Eckardt, T.; Bewilogua, K.
Patent
2001Diamantähnliche Kohlenstoffschichten als Konstruktionselement
Beckmann, C.; Brand, J.; Bewilogua, K.; Blug, B.; Konrath, G.; Hollstein, T.
Conference Paper
2001Elastic and anelastic properties, internal stress and thermal expansion coefficient of cubic boron nitride films on silicon
Harms, U.; Gaertner, M.; Schütze, A.; Bewilogua, K.; Neuhäuser, H.
Journal Article
2001Friction and wear reducing coatings for tools and components
Bewilogua, K.; Bräuer, G.; Gäbler, J.; Hieke, A.; Keunecke, M.; Schäfer, L.; Wittorf, R.
Conference Paper
2001Kohlenstoffhaltige Schichten
Taube, K.; Bewilogua, K.
Book Article
2001Mechanical and tribological properties of cBN films on silicon and tungsten carbide substrates
Keunecke, M.; Yamamoto, K.; Bewilogua, K.
Journal Article
2001Multifunctional amorphous carbon based coatings
Hieke, A.; Bewilogua, K.; Bialuch, I.; Weigel, K.
Conference Paper
2001Schichten aus kubischem Bornitrid (cBN) für innovative Anwendungen
Keunecke, M.; Bewilogua, K.
Journal Article
2001Structural features of thick c-boron nitride coatings deposited via a graded B-C-N interlayer
Yamamoto, K.; Keunecke, M.; Bewilogua, K.; Czigany, Z.; Hultman, L.
Journal Article
2001Thin films: Tribology
Taube, K.; Bewilogua, K.
Book Article
2000Adhesion improvement of cBN film by B-C-N gradient layer system
Yamamoto, K.; Keunecke, M.; Bewilogua, K.
Journal Article
2000Deposition of well adhering CBN films up to 2 µm thickness by B-C-N gradient layer systems
Yamamoto, K.; Keunecke, M.; Bewilogua, K.
Journal Article
2000Diamond-like carbon films
Klages, C.-P.; Bewilogua, K.
Book Article
2000Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings
Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M.
Conference Paper, Journal Article
2000Efficient deposition technique for diamond-like carbon coatings
Hieke, A.; Bewilogua, K.; Taube, K.; Bialuch, I.; Weigel, K.
Conference Paper
2000Erratum to: Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings
Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M.
Journal Article
2000Improving tribological properties of sputtered boron carbide coatings by process modifications
Eckardt, T.; Bewilogua, K.; Kolk, G.J. van der; Hurkmans, T.; Trinh, T.; Fleischer, W.
Journal Article
2000Vapor phase deposition of cubic boron nitride films
Bewilogua, K.; Richter, F.
Book Article
1999Continuously deposited duplex coatings consisting of plasma nitriding and a-C:H:Si deposition
Michler, T.; Grischke, M.; Bewilogua, K.; Hieke, A.
Journal Article
1999Improvement of the adhesion of sputter-deposited cubic boron nitride films
Walter, H.; Bewilogua, K.; Schütze, A.; Maassen, T.
Journal Article
1999PVD coatings voor tribologische toepassingen
Kolk, G.J. van der; Hurkmans, T.; Trinh, T.; Bewilogua, K.; Eckardt, T.
Journal Article
1998Deposition and characterization of metal containing amorphous hydrocarbon films (Me-C:H) prepared by DC magnetron sputtering
Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M.; Bewilogua, K.
Conference Paper
1998Deposition of c-BN films by DC magnetron sputtering
Kouptsidis, S.; Lüthje, H.; Bewilogua, K.; Schütze, A.; Zhang, P.
Journal Article
1998DLC films deposited by bipolar pulsed DC PACVD
Michler, T.; Grischke, M.; Traus, I.; Bewilogua, K.; Dimigen, H.
Conference Paper
1998High performance Me-DLC coatings for precision components
Bewilogua, K.; Grischke, M.; Schröder, J.; Specht, C.; Michler, T.; Kolk, G.J. van der; Trinh, T.; Hurkmans, T.; Fleischer, W.
Conference Paper
1998Improvement of the adhesion of sputtered cubic boron nitride films
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Gaertner, M.
Journal Article, Conference Paper
1998Die künftige Rolle der Oberflächentechnik in der Zerspanung
Dimigen, H.; Bewilogua, K.; Lüthje, H.; Schäfer, L.
Conference Paper
1998Mechanical properties of DLC films prepared by bipolar pulsed DC PACVD
Michler, T.; Grischke, M.; Traus, I.; Bewilogua, K.; Dimigen, H.
Journal Article
1998Preparation and characterization of thin cubic boron nitride films
Bewilogua, K.; Schütze, A.; Walter, H.; Kouptsidis, S.
Conference Paper
1998Properties of duplex coatings prepared by plasma nitriding and PVD Ti-C:H deposition on X20Cr13 ferritic stainless steel
Michler, T.; Grischke, M.; Bewilogua, K.; Dimigen, H.
Journal Article
1997Der Einsatz von Kohlenstoffschichten als Trockenschmiermittel in der industriellen Praxis
Grischke, M.; Bewilogua, K.; Brand, J.; Dimigen, H.
Conference Paper
1997Superharte Schichten für extreme Anforderungen
Prasse, H.; Bewilogua, K.; Schäfer, L.
Journal Article
1997Technisch-funktionelle Eigenschaften von c-BN- und CNx-Schichten
Bewilogua, K.
Conference Paper
1997Verfahren zur herstellung von Schichten aus kubischem Bornitrid
Luethje, H.; Bewilogua, K.; Daaud, S.
Patent
1996Development of industrial low temperature PVD technique of cubic boron nitride for long lifetime products. Abschlußbericht
Lüthje, H.; Kouptsidis, S.; Schütze, A.; Bewilogua, K.; Schröder, J.; Daaud, S.
Report
1996Development of industrial low temperature PVD technique of cubic boron nitride for long lifetime products. Synthesis report
Kouptsidis, S.; Lüthje, H.; Schütze, A.; Bewilogua, K.
Report
1996Improvement of the adhesion of sputtered cubic boron nitride films
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Gaertner, M.
Conference Paper
1996Preparation and characterization of cubic boron nitride and carbon nitride films
Bewilogua, K.
Conference Paper
1996Preparation and characterization of cubic boron nitride and carbon nitride films
Bewilogua, K.
Conference Paper
1996Preparation of cubic boron nitride films by reactive sputtering from a boron nitride target
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.
Journal Article
1996Verfahren zur Bestimmung des Anteils an kubischem Bornitrid, der Dicke einer Schicht aus kubischem Bornitrid und des Beginns der Abscheidung von kubischem Bornitrid bei ionengestuetzten Beschichtungsverfahren
Bewilogua, K.; Schuetze, A.
Patent
1995Application oriented modifications of deposition processes for DLC-based coatings
Grischke, M.; Bewilogua, K.; Trojan, K.; Dimigen, H.
Conference Paper
1995Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Jäger, S.
Conference Paper
1995Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Jäger, S.
Journal Article
1995In-situ Messung der optischen Emission des Plasmas und deren Korrelation zu Schichteigenschaften beim reaktiven Magnetronsputern
Lüthje, H.; Bewilogua, K.; Daaud, S.
Report
1995Plasma booster assisted hydrogenated W-C coatings
Hofmann, D.; Schüßler, H.; Bewilogua, K.; Hübsch, H.; Lemke, J.
Journal Article
1995Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets
Lüthje, H.; Bewilogua, K.; Daaud, S.; Johansson, M.; Hultmann, L.
Journal Article
1995Sputter deposition of cubic boron nitride films
Bewilogua, K.; Schütze, A.; Kouptsidis, S.; Lüthje, H.
Conference Paper
1995Superharte Kohlenstoffnitrid C3N4-Schichten
Bewilogua, K.; Weber, A.; Hübsch, H.; Pöckelmann, R.
Report
1994Development of high temperature thin film thermocouples
Dieckmann, M.; Bewilogua, K.; Bergmeister, F.-J.
Conference Paper
1994Improvement of carbon-based coatings for use in the cold forming of non-ferrous metals
Taube, K.; Grischke, M.; Bewilogua, K.
Conference Paper
1994Infrared spectroscopic investigations on h-BN and mixed h/c-BN thin films
Jäger, S.; Bewilogua, K.; Klages, C.-P.
Journal Article
1994Material selection for thin film thermocouples operating at extremely high temperatures
Bewilogua, K.; Hübsch, H.; Bethke, R.; Willich, P.; Dieckmann, M.; Bugeat, J.-P.
Conference Paper
1994Material selection for thin films thermocouples operating at extremely high temperatures
Bewilogua, K.; Hübsch, H.; Bethke, R.; Willich, P.; Dieckmann, M.; Bugeat, J.-P.
: Hecht, G.
Book
1994Microstructure of BN:C films deposited on Si substrates by reactive magnetron sputtering from a B4C target
Johansson, M.; Daaud, S.; Bewilogua, K.; Lüthje, H.; Hultmann, L.
Book Article
1994Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets
Lüthje, H.; Bewilogua, K.; Daaud, S.; Johansson, M.; Hultmann, L.
Book Article
1994Superharte Schichten aus kubischem Bornitrid
Bewilogua, K.; Lüthje, H.; Schütze, A.; Kouptsidis, S.
Conference Paper
1994Superharte Schichten: Diamant, kubisches Bornitrid und Beta-Kohlenstoffnitrid
Dimigen, H.; Bewilogua, K.; Klages, C.-P.
Conference Paper
1993Preparation of W-C-H coatings by reactive magnetron sputtering
Bewilogua, K.; Dimigen, H.
Conference Paper
1993Preparation, properties and structure of metal containing amorphous hydrogenated carbon films
Grischke, M.; Bewilogua, K.; Dimigen, H.
Journal Article
1992Preparation of c-BN containing films by reactive r.f. sputtering
Bewilogua, K.; Buth, J.; Hübsch, H.; Grischke, M.
Journal Article, Conference Paper
1991Growth conditions, structure and properties of amorphous hydrogenated carbon films prepared by ion plating
Bewilogua, K.; Rau, B.
Conference Paper
1991PVD-Abscheidung von kohlenstoffhaltigen funktionellen Schichten bei niedrigen Prozeßtemperaturen
Bewilogua, K.; Dimigen, H.; Hübsch, H.; Schaal, U.
Conference Paper