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2021 | Electron irradiation induced modifications of Ti₍₁₋ₓ₎AlₓN coatings and related buffer layers on steel substrates Weigel, Kai; Lu, Jun; Bewilogua, Klaus; Keunecke, Martin; Petersen, Jan; Grumbt, Gundis; Zenker, Rolf; Hultmann, Lars | Journal Article |
2018 | Investigation of cracking prevention in magnetron-sputtered TiAlN coatings during subsequent electron beam hardening Hollmann, P.; Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G. | Journal Article |
2017 | Herstellung, Modellierung und Bewertung nanostrukturierter hochtemperaturstabiler Schichten für Umformwerkzeuge - Nanowerk. Abschlussbericht Kailer, A.; Moser, T.; Walter, M.; Held, A.; Keunecke, M.; Stein, C.; Bewilogua, K. | Report |
2017 | Investigations of electron beam hardening on TiAlN coated heat-treatable steel Weigel, K.; Keunecke, M.; Bewilogua, K.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H. | Journal Article |
2016 | Surface hardening after hard coating deposition - combining TiAlN tribological coatings with subsequent electron beam treatment Weigel, K.; Keunecke, M.; Bewilogua, K.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H. | Conference Paper |
2015 | Electron beam hardening of PVD-coated steels Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G. | Journal Article |
2015 | Electron beam hardening of PVD-coated steels - improved load-supporting capacity for TI1-XALXN layers Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G. | Conference Paper |
2015 | Modified diamond-like carbon coatings (a-C:H:X) for anti-fouling applications Keunecke, M.; Bialuch, I.; Stein, C.; Bewilogua, K.; Bräuer, G.; Augustin, W.; Scholl, S. | Conference Paper |
2014 | Duplex surface treatment - physical vapor deposition (PVD) and subsequent electron beam hardening (EBH) Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G. | Journal Article |
2014 | Effects of electron beam treatment on Ti(1-x)AlxN coatings on steel Weigel, K.; Bewilogua, K.; Keunecke, M.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H. | Journal Article |
2014 | History of diamond-like carbon films - from first experiments to worldwide applications Bewilogua, K.; Hofmann, D. | Journal Article |
2014 | Mechanical and Tribological Behavior of Different Nitride Hard Coatings after Tempering and Oxidation Tests Keunecke, M.; Weber, M.; Stein, C.; Bewilogua, K. | Conference Paper |
2013 | From DLC to Si-DLC based layer systems with optimized properties for tribological applications Hofmann, D.; Kunkel, S.; Bewilogua, K.; Wittorf, R. | Journal Article, Conference Paper |
2013 | PVD-Prozesse sputtern Bewilogua, K. | Conference Paper |
2012 | CrC/a-C:H coatings for highly loaded, low friction applications under formulated oil lubrication Keunecke, M.; Bewilogua, K.; Becker, J.; Gies, A.; Grischke, M. | Journal Article |
2012 | Diamond-like carbon films Bewilogua, K.; Scheibe, H.-J. | Conference Paper |
2012 | Formation of Ti2AlN phase after post-heat treatment of Ti-Al-N films deposited by pulsed magnetron sputtering Yang, Y.; Keunecke, M.; Stein, C.; Gao, L.-J.; Jiang, X.; Bewilogua, K.; Sun, C. | Journal Article |
2012 | Optimierte DLC-Beschichtungsprozesse Bewilogua, K. | Journal Article |
2012 | Zerspanwerkzeuge aus nanoskaligen Materialien und superharten Schichten zur Trocken-, Hart- und Gussbearbeitung (NanoHM) Kölker, Werner; Hartmann, C.; Stothard, N.; Bolz, S.; Hennicke, J.; Kessel, T.; Kessel, H.U.; Richter, Volkmar; Holke, R.; Pötschke, Johannes; Bewilogua, Klaus; Keunecke, Martin; Stein, Christian; Caspers, B.; Hünsche, I.; Schnitter, C.; Berg, H. van den; Kassel, D.; Rödiger, K. | Report |
2011 | Cubic boron nitride based coating systems with different interlayers for cutting inserts Stein, C.; Keunecke, M.; Bewilogua, K.; Chudoba, T.; Kölker, W.; Berg, H. van den | Journal Article |
2011 | Easy-clean surfaces built to order Bialuch, I.; Bewilogua, K.; Augustin, W.; Scholl, S. | Journal Article |
2011 | High rate deposition of hard a-C:H coatings using microwave enhanced plasma CVD Bialuch, I.; Bewilogua, K.; Günther, M.; Peter, S.; Richter, F. | Conference Paper |
2011 | High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD Günther, M.; Bialuch, I.; Peter, S.; Bewilogua, K.; Richter, F. | Journal Article |
2011 | Magnetron sputtering and its applications Bräuer, G.; Bandorf, R.; Bewilogua, K.; Diehl, W.; Szyszka, B.; Vergöhl, M. | Conference Paper |
2011 | Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD Bewilogua, K.; Bialuch, I.; Ruske, H.; Weigel, K. | Journal Article |
2011 | Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD Bewilogua, K.; Bialuch, I.; Ruske, H.; Weigel, K. | Journal Article |
2011 | Si-DLC basierende Schichtsysteme mit anwendungsoptimierten Eigenschaften Hofmann, D.; Kunkel, S.; Bewilogua, K.; Wittorf, R. | Conference Paper |
2010 | Cubic boron nitride coatings - sputter deposition, properties and application tests Bewilogua, K.; Keunecke, M.; Park, S.T.; Stein, C.; Weigel, K.; Richter, V.; Oyanedel-Fuentes, J.A. | Conference Paper |
2010 | Gepulste Plasmen für industrielle Beschichtungsprozesse Bräuer, G.; Szyszka, B.; Bandorf, R.; Bewilogua, K.; Brand, J.; Vergöhl, M. | Conference Paper |
2010 | Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering Keunecke, M.; Stein, C.; Bewilogua, K.; Koelker, W.; Kassel, D.; Berg, H. van den | Journal Article, Conference Paper |
2010 | PECVD-Verfahren mit gepulster Anregung zur Abscheidung von DLC-Schichten Bewilogua, K.; Bialuch, I.; Keunecke, M. | Conference Paper |
2010 | Wear of carbon nitride coatings under oscillating sliding conditions Wäsche, R.; Hartelt, M.; Springborn, U.; Bewilogua, K.; Keunecke, M. | Journal Article |
2009 | Advanced magnetron sputter technique for depostion of superhard a-C:H coatings Bewilogua, K.; Keunecke, M.; Thomsen, H.; Wittorf, R.; Ivanov, Y.; Zufraß, T. | Conference Paper |
2009 | Characterization of c-BN coating films with a multiple intermediate layer deposited on cutting tools by r.f. sputtering Lee, K.-M.; Oh, D.K.; Lee, K.; Lee, D.; Bewilogua, K.; Park, S.T.; Kim, D.K.; Ahn, H. | Journal Article |
2009 | Preparation and comparison of a-C:H coatings using reactive sputter techniques Keunecke, M.; Weigel, K.; Bewilogua, K.; Cremer, R.; Fuss, H.-G. | Journal Article |
2009 | Surface technology for automotive engineering Bewilogua, K.; Bräuer, G.; Dietz, A.; Gäbler, J.; Goch, G.; Karpuschewski, B.; Szyszka, B. | Journal Article |
2009 | Up-scaling the production of modified a-C:H coatings in the framework of plasma polymerization processes Corbella, C.; Bialuch, I.; Kleinschmidt, M.; Bewilogua, K. | Conference Paper, Journal Article |
2008 | Industrial applications of HIPIMS Münz, W.-D.; Schenkel, M.; Kunkel, S.; Paulitsch, M.; Bewilogua, K. | Conference Paper |
2008 | Modified DLC coatings prepared in a large-scale reactor by dual microwave/pulsed-DC plasma-activated chemical vapour deposition Corbella, C.; Bialuch, I.; Kleinschmidt, M.; Bewilogua, K. | Journal Article |
2007 | Characterisation of HIPIMS deposited Cr2N and CrN coatings Münz, W.D.; Schenkel, M.; Kunkel, S.; Bewilogua, K.; Keunecke, M.; Wittorf, R. | Conference Paper |
2007 | Entwicklungsstand kubischer Bornitrid-Beschichtungen für Zerspanwerkzeuge Keunecke, M.; Wiemann, E.; Bewilogua, K. | Journal Article |
2007 | Tool coatings - new developments for forming, cutting and abrasive machining Gäbler, J.; Bewilogua, K.; Biehl, S.; Brand, J.; Höfer, M.; Keunecke, M.; Schäfer, L.; Thomsen, H.; Weber, M. | Conference Paper |
2007 | Up scaling of processes for plasma-activated chemical vapour deposition of modified DLC coatings Corbella, C.; Bialuch, I.; Kleinschmidt, M.; Bewilogua, K. | Conference Paper |
2007 | Wetting behaviours of a-C:H:Si:O film coated nano-scale dual rough surface Kim, T.-Y.; Bialuch, I.; Bewilogua, K.; Oh, K.H.; Lee, K.-R. | Journal Article |
2006 | Boron containing combination tool coatings - characterization and application tests Keunecke, M.; Bewilogua, K.; Wiemann, E.; Weigel, K.; Wittorf, R.; Thomsen, H. | Journal Article |
2006 | Carbon based coating systems for forming tools Weber, M.; Bewilogua, K.; Bialuch, I.; Keunecke, M.; Thomsen, H.; Wittorf, R. | Conference Paper |
2006 | DLC based coatings for tribological applications Bewilogua, K.; Bialuch, I.; Brand, J.; Keunecke, M.; Ruske, H.; Thomsen, H.; Weber, M.; Wittorf, R. | Conference Paper |
2006 | Hoch belastbare a-C:H Schichten für Werkzeuge und Bauteile Weber, M.; Bewilogua, K.; Brand, J. | Conference Paper |
2006 | Hochbelastbare kohlenstoffbasierte Mehrschichtsysteme für die Umformtechnik Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R. | Journal Article |
2006 | Influence of different interlayers and bias voltage on the properties of a-C:H and a-C:H:Me coatings prepared by reactive d.c. magnetron sputtering Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R. | Journal Article |
2006 | Substrate influence in Young's modulus determination of thin films by indentation methods Richter, F.; Herrmann, M.; Molnar, F.; Chudoba, T.; Schwarzer, N.; Keunecke, M.; Bewilogua, K.; Zhang, X.W.; Boyen, H.-G.; Ziemann, P. | Journal Article |
2006 | Thick c-BN coatings - preparation, properties and application tests Keunecke, M.; Wiemann, E.; Weigel, K.; Park, S.T.; Bewilogua, K. | Journal Article |
2006 | Thick c-BN coatings - Preparation, properties and application tests Wiemann, E.; Keunecke, M.; Part, S.-T.; Weigel, K.; Bewilogua, K. | Conference Paper, Journal Article |
2006 | Tribologisches Verhalten von amorphen Kohlenstoffschichten Schultrich, B.; Bewilogua, K. | Conference Paper |
2005 | Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering Bewilogua, K.; Brand, J.; Thomsen, H.; Weber, M.; Wittorf, R. | Journal Article |
2004 | Anwendung und Potenzial neuartiger hochbelastbarer Kohlenstoffschichten für die Umformtechnik Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R. | Conference Paper |
2004 | DLC based coatings prepared by reactive d.c. magnetron sputtering Bewilogua, K.; Wittorf, R.; Thomsen, H.; Weber, M. | Conference Paper, Journal Article |
2004 | Growth and characterization of thick cBN coatings on silicon and tool substrates Bewilogua, K.; Keunecke, M.; Weigel, K.; Wiemann, E. | Journal Article |
2004 | Herstellung, Eigenschaften und Anwendungsfelder modifizierter Kohlenstoffschichten Bialuch, I.; Weigel, K.; Weber, M.; Bewilogua, K. | Conference Paper |
2004 | Untersuchung tribologischer Schichtsysteme mit dem Spiraltribometer Bethke, R.; Bewilogua, K. | Journal Article |
2004 | Weniger Verschleiß mit diamantähnlichen Schichten Brand, J.; Bewilogua, K. | Book Article |
2003 | Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten Bewilogua, K.; Wittorf, R.; Thomsen, H. | Patent |
2002 | Brillouin light scattering study on the elastic properties of thick sputtered c-BN films Wittkowski, T.; Jorzick, J.; Jung, K.; Hillebrands, B.; Keunecke, M.; Bewilogua, K. | Journal Article |
2002 | Diamantähnliche Kohlenstoffschichten als Konstruktionselemente Beckmann, C.; Brand, J.; Bewilogua, K. | Journal Article |
2002 | DLC based coatings. Preparation, properties and applications Bewilogua, K.; Hieke, A.; Bialuch, I.; Brand, J.; Wittorf, R. | Conference Paper |
2002 | Dry lubricant coatings for cutting and forming operations Lahres, M.; Bewilogua, K. | Conference Paper |
2002 | Hard and superhard coatings in the system B-C-N Bewilogua, K.; Keunecke, M. | Conference Paper |
2002 | International Conference on Metallurgical Coatings and Thin Films Bewilogua, K. | Journal Article |
2002 | Kohlenstoffschichten gegen Reibung und Verschleiß Bewilogua, K.; Bräuer, G. | Journal Article |
2002 | Structural features of thick C-boron nitride coatings deposited via a graded B-C-N interlayer Yamamoto, K.; Keunecke, M.; Bewilogua, K.; Czigany, Z.; Hultman, L. | Journal Article |
2002 | Verschleiss- und reibungsmindernde Schicht, mit Substrat mit dieser Schicht sowie Verfahren zum Herstellen einer solchen Schicht Eckardt, T.; Bewilogua, K. | Patent |
2001 | Diamantähnliche Kohlenstoffschichten als Konstruktionselement Beckmann, C.; Brand, J.; Bewilogua, K.; Blug, B.; Konrath, G.; Hollstein, T. | Conference Paper |
2001 | Elastic and anelastic properties, internal stress and thermal expansion coefficient of cubic boron nitride films on silicon Harms, U.; Gaertner, M.; Schütze, A.; Bewilogua, K.; Neuhäuser, H. | Journal Article |
2001 | Friction and wear reducing coatings for tools and components Bewilogua, K.; Bräuer, G.; Gäbler, J.; Hieke, A.; Keunecke, M.; Schäfer, L.; Wittorf, R. | Conference Paper |
2001 | Kohlenstoffhaltige Schichten Taube, K.; Bewilogua, K. | Book Article |
2001 | Mechanical and tribological properties of cBN films on silicon and tungsten carbide substrates Keunecke, M.; Yamamoto, K.; Bewilogua, K. | Journal Article |
2001 | Multifunctional amorphous carbon based coatings Hieke, A.; Bewilogua, K.; Bialuch, I.; Weigel, K. | Conference Paper |
2001 | Schichten aus kubischem Bornitrid (cBN) für innovative Anwendungen Keunecke, M.; Bewilogua, K. | Journal Article |
2001 | Structural features of thick c-boron nitride coatings deposited via a graded B-C-N interlayer Yamamoto, K.; Keunecke, M.; Bewilogua, K.; Czigany, Z.; Hultman, L. | Journal Article |
2001 | Thin films: Tribology Taube, K.; Bewilogua, K. | Book Article |
2000 | Adhesion improvement of cBN film by B-C-N gradient layer system Yamamoto, K.; Keunecke, M.; Bewilogua, K. | Journal Article |
2000 | Deposition of well adhering CBN films up to 2 µm thickness by B-C-N gradient layer systems Yamamoto, K.; Keunecke, M.; Bewilogua, K. | Journal Article |
2000 | Diamond-like carbon films Klages, C.-P.; Bewilogua, K. | Book Article |
2000 | Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M. | Conference Paper, Journal Article |
2000 | Efficient deposition technique for diamond-like carbon coatings Hieke, A.; Bewilogua, K.; Taube, K.; Bialuch, I.; Weigel, K. | Conference Paper |
2000 | Erratum to: Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M. | Journal Article |
2000 | Improving tribological properties of sputtered boron carbide coatings by process modifications Eckardt, T.; Bewilogua, K.; Kolk, G.J. van der; Hurkmans, T.; Trinh, T.; Fleischer, W. | Journal Article |
2000 | Vapor phase deposition of cubic boron nitride films Bewilogua, K.; Richter, F. | Book Article |
1999 | Continuously deposited duplex coatings consisting of plasma nitriding and a-C:H:Si deposition Michler, T.; Grischke, M.; Bewilogua, K.; Hieke, A. | Journal Article |
1999 | Improvement of the adhesion of sputter-deposited cubic boron nitride films Walter, H.; Bewilogua, K.; Schütze, A.; Maassen, T. | Journal Article |
1999 | PVD coatings voor tribologische toepassingen Kolk, G.J. van der; Hurkmans, T.; Trinh, T.; Bewilogua, K.; Eckardt, T. | Journal Article |
1998 | Deposition and characterization of metal containing amorphous hydrocarbon films (Me-C:H) prepared by DC magnetron sputtering Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M.; Bewilogua, K. | Conference Paper |
1998 | Deposition of c-BN films by DC magnetron sputtering Kouptsidis, S.; Lüthje, H.; Bewilogua, K.; Schütze, A.; Zhang, P. | Journal Article |
1998 | DLC films deposited by bipolar pulsed DC PACVD Michler, T.; Grischke, M.; Traus, I.; Bewilogua, K.; Dimigen, H. | Conference Paper |
1998 | High performance Me-DLC coatings for precision components Bewilogua, K.; Grischke, M.; Schröder, J.; Specht, C.; Michler, T.; Kolk, G.J. van der; Trinh, T.; Hurkmans, T.; Fleischer, W. | Conference Paper |
1998 | Improvement of the adhesion of sputtered cubic boron nitride films Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Gaertner, M. | Journal Article, Conference Paper |
1998 | Die künftige Rolle der Oberflächentechnik in der Zerspanung Dimigen, H.; Bewilogua, K.; Lüthje, H.; Schäfer, L. | Conference Paper |
1998 | Mechanical properties of DLC films prepared by bipolar pulsed DC PACVD Michler, T.; Grischke, M.; Traus, I.; Bewilogua, K.; Dimigen, H. | Journal Article |
1998 | Preparation and characterization of thin cubic boron nitride films Bewilogua, K.; Schütze, A.; Walter, H.; Kouptsidis, S. | Conference Paper |
1998 | Properties of duplex coatings prepared by plasma nitriding and PVD Ti-C:H deposition on X20Cr13 ferritic stainless steel Michler, T.; Grischke, M.; Bewilogua, K.; Dimigen, H. | Journal Article |
1997 | Der Einsatz von Kohlenstoffschichten als Trockenschmiermittel in der industriellen Praxis Grischke, M.; Bewilogua, K.; Brand, J.; Dimigen, H. | Conference Paper |
1997 | Superharte Schichten für extreme Anforderungen Prasse, H.; Bewilogua, K.; Schäfer, L. | Journal Article |
1997 | Technisch-funktionelle Eigenschaften von c-BN- und CNx-Schichten Bewilogua, K. | Conference Paper |
1997 | Verfahren zur herstellung von Schichten aus kubischem Bornitrid Luethje, H.; Bewilogua, K.; Daaud, S. | Patent |
1996 | Development of industrial low temperature PVD technique of cubic boron nitride for long lifetime products. Abschlußbericht Lüthje, H.; Kouptsidis, S.; Schütze, A.; Bewilogua, K.; Schröder, J.; Daaud, S. | Report |
1996 | Development of industrial low temperature PVD technique of cubic boron nitride for long lifetime products. Synthesis report Kouptsidis, S.; Lüthje, H.; Schütze, A.; Bewilogua, K. | Report |
1996 | Improvement of the adhesion of sputtered cubic boron nitride films Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Gaertner, M. | Conference Paper |
1996 | Preparation and characterization of cubic boron nitride and carbon nitride films Bewilogua, K. | Conference Paper |
1996 | Preparation and characterization of cubic boron nitride and carbon nitride films Bewilogua, K. | Conference Paper |
1996 | Preparation of cubic boron nitride films by reactive sputtering from a boron nitride target Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S. | Journal Article |
1996 | Verfahren zur Bestimmung des Anteils an kubischem Bornitrid, der Dicke einer Schicht aus kubischem Bornitrid und des Beginns der Abscheidung von kubischem Bornitrid bei ionengestuetzten Beschichtungsverfahren Bewilogua, K.; Schuetze, A. | Patent |
1995 | Application oriented modifications of deposition processes for DLC-based coatings Grischke, M.; Bewilogua, K.; Trojan, K.; Dimigen, H. | Conference Paper |
1995 | Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Jäger, S. | Conference Paper |
1995 | Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Jäger, S. | Journal Article |
1995 | In-situ Messung der optischen Emission des Plasmas und deren Korrelation zu Schichteigenschaften beim reaktiven Magnetronsputern Lüthje, H.; Bewilogua, K.; Daaud, S. | Report |
1995 | Plasma booster assisted hydrogenated W-C coatings Hofmann, D.; Schüßler, H.; Bewilogua, K.; Hübsch, H.; Lemke, J. | Journal Article |
1995 | Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets Lüthje, H.; Bewilogua, K.; Daaud, S.; Johansson, M.; Hultmann, L. | Journal Article |
1995 | Sputter deposition of cubic boron nitride films Bewilogua, K.; Schütze, A.; Kouptsidis, S.; Lüthje, H. | Conference Paper |
1995 | Superharte Kohlenstoffnitrid C3N4-Schichten Bewilogua, K.; Weber, A.; Hübsch, H.; Pöckelmann, R. | Report |
1994 | Development of high temperature thin film thermocouples Dieckmann, M.; Bewilogua, K.; Bergmeister, F.-J. | Conference Paper |
1994 | Improvement of carbon-based coatings for use in the cold forming of non-ferrous metals Taube, K.; Grischke, M.; Bewilogua, K. | Conference Paper |
1994 | Infrared spectroscopic investigations on h-BN and mixed h/c-BN thin films Jäger, S.; Bewilogua, K.; Klages, C.-P. | Journal Article |
1994 | Material selection for thin film thermocouples operating at extremely high temperatures Bewilogua, K.; Hübsch, H.; Bethke, R.; Willich, P.; Dieckmann, M.; Bugeat, J.-P. | Conference Paper |
1994 | Material selection for thin films thermocouples operating at extremely high temperatures Bewilogua, K.; Hübsch, H.; Bethke, R.; Willich, P.; Dieckmann, M.; Bugeat, J.-P. : Hecht, G. | Book |
1994 | Microstructure of BN:C films deposited on Si substrates by reactive magnetron sputtering from a B4C target Johansson, M.; Daaud, S.; Bewilogua, K.; Lüthje, H.; Hultmann, L. | Book Article |
1994 | Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets Lüthje, H.; Bewilogua, K.; Daaud, S.; Johansson, M.; Hultmann, L. | Book Article |
1994 | Superharte Schichten aus kubischem Bornitrid Bewilogua, K.; Lüthje, H.; Schütze, A.; Kouptsidis, S. | Conference Paper |
1994 | Superharte Schichten: Diamant, kubisches Bornitrid und Beta-Kohlenstoffnitrid Dimigen, H.; Bewilogua, K.; Klages, C.-P. | Conference Paper |
1993 | Preparation of W-C-H coatings by reactive magnetron sputtering Bewilogua, K.; Dimigen, H. | Conference Paper |
1993 | Preparation, properties and structure of metal containing amorphous hydrogenated carbon films Grischke, M.; Bewilogua, K.; Dimigen, H. | Journal Article |
1992 | Preparation of c-BN containing films by reactive r.f. sputtering Bewilogua, K.; Buth, J.; Hübsch, H.; Grischke, M. | Journal Article, Conference Paper |
1991 | Growth conditions, structure and properties of amorphous hydrogenated carbon films prepared by ion plating Bewilogua, K.; Rau, B. | Conference Paper |
1991 | PVD-Abscheidung von kohlenstoffhaltigen funktionellen Schichten bei niedrigen Prozeßtemperaturen Bewilogua, K.; Dimigen, H.; Hübsch, H.; Schaal, U. | Conference Paper |