Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Influence of metal gate and capping film stress on TANOS cell performance
Czernohorsky, M.; Melde, T.; Beyer, V.; Beug, M.F.; Paul, J.; Hoffmann, R.; Knöfler, R.; Tilke, A.T.
Journal Article, Conference Paper
2011TaN and Al2O3 sidewall gate-etch damage influence on program, erase, and retention of sub-50-nm TANOS nand flash memory cells
Beug, M.F.; Melde, T.; Paul, J.; Knoefler, R.
Journal Article