Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014On an improved boron segregation calibration from a particularly sensitive power MOS process
Koffel, S.; Burenkov, A.; Sekowski, M.; Pichler, P.; Giubertoni, D.; Bersani, M.; Knaipp, M.; Wachmann, E.; Schrems, M.; Yamamoto, Y.; Bolze, D.
Journal Article, Conference Paper
2013Tuning of the optical properties of In-rich In(x)Ga(1-x)N (x=0.82-0.49) alloys by light-ion irradiation at low energy
Luca, M. de; Pettinari, G.; Polimeni, A.; Capizzi, M.; Ciatto, G.; Amidani, L.; Fonda, E.; Boscherini, F.; Filippone, F.; Bonapasta, A.A.; Knübel, A.; Cimalla, V.; Ambacher, O.; Giubertoni, D.; Bersani, M.
Conference Paper
2009Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces
Grasso, S.; Cazzini, E.; Bersani, M.; Lazzeri, P.; Gennaro, S.; Kolbe, M.; Müller, M.; Kregsamer, P.; Posch, F.
Journal Article
2009Complementary metrology within a European joint laboratory
Nutsch, A.; Beckhoff, B.; Altmann, R.; Berg, J.A. van den; Giubertoni, D.; Hoenicke, P.; Bersani, M.; Leibold, A.; Meirer, F.; Müller, M.; Pepponi, G.; Otto, M.; Petrik, P.; Reading, M.; Pfitzner, L.; Ryssel, H.
Conference Paper
2009Highly sensitive detection of inorganic contamination
Beckhoff, B.; Nutsch, A.; Altmann, R.; Borionetti, G.; Pello, C.; Polignano, M.L.; Codegoni, D.; Grasso, S.; Cazzini, E.; Bersani, M.; Lazzeri, P.; Gennaro, S.; Kolbe, M.; Müller, M.; Kregsamer, P.; Posch, F.
Conference Paper
2008P implantation into preamorphized germanium and subsequent annealing: Solid phase epitaxial regrowth, P diffusion, and activation
Posselt, M.; Schmidt, B.; Anwand, W.; Grötzschel, R.; Heera, V.; Mücklich, A.; Wündisch, C.; Skorupa, W.; Hortenbach, H.; Gennaro, S.; Bersani, M.; Giubertoni, D.; Möller, A.; Bracht, H.
Journal Article
2003Diffusion and electrical activation of indium in silicon
Scalese, S.; Italia, M.; La Magna, A.; Mannino, G.; Privitera, V.; Bersani, M.; Giubertoni, D.; Barozzi, M.; Solmi, S.; Pichler, P.
Journal Article
2003Indium in silicon: A study on diffusion and electrical activation
Scalese, S.; La Magna, A.; Mannino, G.; Privitera, V.; Bersani, M.; Giubertoni, D.; Solmi, S.; Pichler, P.
Conference Paper