| | |
---|
2008 | Extreme-ultraviolet-induced oxidation of Mo/Si multilayers Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A. | Journal Article |
2008 | Hochreflektierende EUV/Röntgen-Mehrschichtspiegel Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N. | Journal Article |
2008 | Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.; Fang, M.; Chandhok, M. | Conference Paper |
2008 | Scattering of EUV optics - substrate, coating, and degradation effects Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A. | Conference Paper |
2007 | EUV multilayer optics at the Fraunhofer IOF Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A. | Conference Paper |
2007 | Radiation stability of EUV multilayer mirrors Benoit, N. | Dissertation |
2007 | Thermisch stabiler Multilayer-Spiegel fuer den EUV-Spektralbereich Benoit, N.; Feigl, T.; Yulin, S.; Kaiser, N. | Patent |
2006 | EUV multilayer mirrors with enhanced stability Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
2006 | EUV multilayer optics Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Conference Paper, Journal Article |
2006 | High-temperature LPP collector mirror Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.; Böwering, N.; Ershov, A.; Khodykin, O.; Viatella, J.; Bruzzone, K.; Fomenkov, I.; Myers, D.; Brandt, D. | Conference Paper |
2006 | Interface-engineered EUV multilayer mirrors Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N. | Conference Paper, Journal Article |
2005 | EUV/soft x-ray multilayer optics Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N. | Conference Paper |
2005 | High-temperature multilayers Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N. | Conference Paper |
2005 | Multilayer optics for the EUV and soft X-Rays Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Journal Article |
2005 | New challenges for VUV-XUV radiation resistant coatings Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
2005 | Radiation stability of EUV Mo/Si multilayer mirrors Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper, Journal Article |
2003 | Radiation stability of EUV optics: Contamination issues Benoit, N. | Thesis |