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| 2008 | Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A. | Journal Article |
| 2008 | Hochreflektierende EUV/Röntgen-Mehrschichtspiegel
Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N. | Journal Article |
| 2008 | Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.; Fang, M.; Chandhok, M. | Conference Paper |
| 2008 | Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A. | Conference Paper |
| 2007 | EUV multilayer optics at the Fraunhofer IOF
Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A. | Conference Paper |
| 2007 | Radiation stability of EUV multilayer mirrors
Benoit, N. | Dissertation |
| 2007 | Thermisch stabiler Multilayer-Spiegel fuer den EUV-Spektralbereich
Benoit, N.; Feigl, T.; Yulin, S.; Kaiser, N. | Patent |
| 2006 | EUV multilayer mirrors with enhanced stability
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2006 | EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Conference Paper, Journal Article |
| 2006 | High-temperature LPP collector mirror
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.; Böwering, N.; Ershov, A.; Khodykin, O.; Viatella, J.; Bruzzone, K.; Fomenkov, I.; Myers, D.; Brandt, D. | Conference Paper |
| 2006 | Interface-engineered EUV multilayer mirrors
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N. | Conference Paper, Journal Article |
| 2005 | EUV/soft x-ray multilayer optics
Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N. | Conference Paper |
| 2005 | High-temperature multilayers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Journal Article |
| 2005 | New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper, Journal Article |
| 2003 | Radiation stability of EUV optics: Contamination issues
Benoit, N. | Thesis |