Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A.
Journal Article
2008Hochreflektierende EUV/Röntgen-Mehrschichtspiegel
Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N.
Journal Article
2008Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.; Fang, M.; Chandhok, M.
Conference Paper
2008Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A.
Conference Paper
2007EUV multilayer optics at the Fraunhofer IOF
Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A.
Conference Paper
2007Radiation stability of EUV multilayer mirrors
Benoit, N.
Dissertation
2007Thermisch stabiler Multilayer-Spiegel fuer den EUV-Spektralbereich
Benoit, N.; Feigl, T.; Yulin, S.; Kaiser, N.
Patent
2006EUV multilayer mirrors with enhanced stability
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2006EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Conference Paper, Journal Article
2006High-temperature LPP collector mirror
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.; Böwering, N.; Ershov, A.; Khodykin, O.; Viatella, J.; Bruzzone, K.; Fomenkov, I.; Myers, D.; Brandt, D.
Conference Paper
2006Interface-engineered EUV multilayer mirrors
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2005EUV/soft x-ray multilayer optics
Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N.
Conference Paper
2005High-temperature multilayers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Journal Article
2005New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2005Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2003Radiation stability of EUV optics: Contamination issues
Benoit, N.
Thesis