Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Brilliance scaling of discharge sources for extreme-ultraviolet and soft x-ray radiation for metrology applications
Benk, M.; Bergmann, K.
Journal Article
2011Soft X-ray microscopic investigation on self assembling nanocrystals
Benk, M.; Bergmann, K.; Querejeta-Fernández, A.; Srivastava, S.; Kotov, N.A.; Schaefer, D.; Wilhein, T.
Conference Paper
2010Contributions to EUV mask metrology infrastructure
Farahzadi, A.; Lebert, R.; Benk, M.; Juschkin, L.; Herbert, S.; Maryasov, A.
Conference Paper
2009Adaptive spatially resolving detector for the extreme ultraviolet with absolute measuring capability
Benk, M.; Bergmann, K.
Journal Article
2009High power soft x-ray source based on a discharge plasma
Benk, M.; Schäfer, D.; Wilhein, T.; Bergmann, K.
Journal Article, Conference Paper
2009Optical setup for tabletop soft X-ray microscopy using electrical discharge sources
Schäfer, D.; Benk, M.; Bergmann, K.; Nisius, T.; Wiesemann, U.; Wilhein, T.
Journal Article, Conference Paper
2008Compact soft x-ray microscope using a gas-discharge light source
Benk, M.; Bergmann, K.; Schäfer, D.; Wilhein, T.
Journal Article
2008Soft x-ray emission from a pulsed gas discharge in a pseudosparklike electrode geometry
Bergmann, K.; Küpper, F.; Benk, M.
Journal Article