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| 2012 | High speed piezoelectric microscanners with large deflection using mechanical leverage amplification
Gu-Stoppel, S.; Kaden, D.; Quenzer, H.J.; Hofmann, U.; Benecke, W. | Journal Article, Conference Paper |
| 2012 | Microlens array production in a microtechnological dry etch and reflow process for display applications
Knieling, T.; Shafi, M.; Lang, W.; Benecke, W. | Journal Article |
| 2012 | Viscous hot glass forming for optical wafer level packaging of micro mirrors
Stenchly, V.; Quenzer, H.-J.; Hofmann, U.; Eisermann, C.; Benecke, W. | Journal Article, Conference Paper |
| 2011 | AlN-based piezoelectric micropower generator for low ambient vibration energy harvesting
Stoppel, F.; Schröder, C.; Senger, F.; Wagner, B.; Benecke, W. | Conference Paper |
| 2011 | MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators
Hofmann, U.; Eisermann, C.; Quenzer, H.-J.; Janes, J.; Schroeder, C.; Schwarzelbach, O.; Jensen, B.; Ratzmann, L.; Giese, T.; Senger, F.; Hagge, J.; Weiss, M.; Wagner, B.; Benecke, W. | Conference Paper |
| 2011 | A novel vacuum-packaged low-power scanning mirror with inclined 3D-shaped window
Hofmann, U.; Quenzer, H.J.; Eisermann, C.; Janes, J.; Schroeder, C.; Jensen, B.; Hagge, J.; Soerensen, F.; Senger, F.; Vick, D.; Schwarzelbach, O.; Ratzmann, L.; Giese, T.; Wagner, B.; Benecke, W. | Conference Paper |
| 2010 | A nickel electrostatic curved beam actuator for valve applications
Petrov, D.; Lang, W.; Benecke, W. | Conference Paper |
| 2009 | MEMS Foundry
Merz, P.; Wagner, B.; Dudde, R.; Benecke, W. | Conference Paper |
| 2007 | Gas phase hydrophobisation of MEMS silicon structures with self-assembling monolayers for avoiding in-use sticking
Knieling, T.; Lang, W.; Benecke, W. | Journal Article |
| 2007 | Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS
Zhuang, Y.X.; Hansen, O.; Knieling, T.; Wang, C.; Rombach, P.; Lang, W.; Benecke, W.; Kehlenbeck, M.; Koblitz, J. | Journal Article |
| 2006 | Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction
Zhuang, Y.X.; Hansen, O.; Knieling, T.; Wang, C.; Rombach, P.; Lang, W.; Benecke, W.; Kehlenbeck, M.; Koblitz, J. | Journal Article |
| 2001 | Application of electroplating in MEMS-micromachining exemplified by a microrelay
Becker, M.; Notarp, D.L.; Vogel, J.; Kieselstein, E.; Sommer, J.P.; Brämer, K.; Grosser, V.; Benecke, W.; Michel, B. | Journal Article |
| 2000 | Dielektrischer Motor mit einer oder mehreren Zentralelektroden
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1999 | Entwicklung von Abformtechniken für metallische Mikrobauteile
Höper, R.; Menz, A.; Benecke, W.; Duong, T.V.; Hartwig, T.; Kunze, H.-D. | Conference Paper |
| 1996 | Thermally driven microvalve with buckling behaviour of pneumatic applications 2
Lisec, T.; Quenzer, H.J.; Kreutzer, M.; Hoerschelmann, S.; Wagner, B.; Benecke, W. | Journal Article |
| 1996 | VERFAHREN ZUR HANDHABUNG MIKROSKOPISCH KLEINER, DIELEKTRISCHER TEILCHEN UND VORRICHTUNG ZUR DURCHFUEHRUNG DES VERFAHRENS
Benecke, W.; Wagner, B.; Fuhr, G.; Hagedorn, R.; Mueller, T. | Patent |
| 1996 | Verfahren zur Herstellung von Biosensoren
Hintsche, R.; Karsten, C.; Benecke, W.; Schnakenberg, U. | Patent |
| 1996 | Verfahren zur Trennung von Gemischen mikroskopisch kleiner, in einer Fluessigkeit oder einem Gel suspendierter dielektrischer Teilchen und Vorrichtung zur Durchfuehrung des Verfahrens
Benecke, W.; Wagner, B.; Hagedorn, R.; Fuhr, G.; Mueller, T. | Patent |
| 1995 | Verfahren zur Beschichtung von Sensoren mit selektiv durchlaessigen Polymermembranen
Hintsche, R.; Benecke, W.; Schnakenberg, U. | Patent |
| 1994 | Dielektrischer Motor
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1994 | Mikromechanischer Manipulator
Benecke, W. | Patent |
| 1994 | Thermally driven microvalve with buckling behaviour of pneumatic applications
Lisec, T.; Hoerschelmann, S.; Quenzer, H.J.; Wagner, B.; Benecke, W. | Conference Paper |
| 1994 | VORRICHTUNG ZUR MESSUNG MECHANISCHER KRAEFTE UND KRAFTWIRKUNGEN
Wagner, B.; Benecke, W.; Riethmueller, W.; Schnakenberg, U. | Patent |
| 1993 | Dielektrischer Motor
Benecke, W. | Patent |
| 1993 | Direktes Substratbonden
Quenzer, H.J.; Benecke, W. | Patent |
| 1993 | Fluid-filled dielectric induction micromotor with Al-SiO2 rotor
Wagner, B.; Fuhr, G.; Müller, T.; Schnelle, T.; Benecke, W. | Conference Paper |
| 1993 | New eryoelectronic detector concept based on two-dimensional heat diffusion
Lemke, S.; Hebrank, F.; Gross, R.; Hübner, R.P.; Weimann, T.; Pöpel, R.; Niemeyer, J.; Schnakenberg, U.; Benecke, W. | Journal Article |
| 1993 | Permanent magnet micromotors on silicon substrates
Wagner, B.; Kreutzer, M.; Benecke, W. | Journal Article |
| 1993 | Thin film microelectrode arrays for highly sensitive biosensors
Hintsche, R.; Paeschke, M.; Wollenberger, U.; Schnakenberg, U.; Lisec, T.; Benecke, W. | Conference Paper |
| 1992 | Asynchronous traveling-wave induced linear motion of living cells
Fuhr, G.; Hagedorn, R.; Müller, T.; Wagner, B.; Grimsa, J.; Benecke, W. | Journal Article |
| 1992 | Dielectric induction micromotors - field levitation and torque-frequency characteristics
Fuhr, G.; Hagedorn, R.; Müller, T.; Schnakenberg, U.; Wagner, B.; Benecke, W. | Journal Article |
| 1992 | Levitation holding and rotation of cells within traps made by high-frequency fields
Fuhr, G.; Arnold, W.M.; Hagedorn, R.; Müller, T.; Wagner, B.; Zimmermann, U.; Benecke, W. | Journal Article |
| 1992 | Linear and rotational magnetic micromotors fabricated using silicon technology
Wagner, B.; Kreutzer, M.; Benecke, W. | Conference Paper |
| 1992 | Low temperature silicon wafer bonding
Benecke, W.; Quenzer, H.J. | Conference Paper |
| 1992 | Low temperature silicon wafer bonding for micromechanical applications
Benecke, W.; Quenzer, H.J. | Conference Paper |
| 1992 | Low temperature wafer bonding for micromechanical applications
Quenzer, H.J.; Dell, C.; Benecke, W. | Conference Paper |
| 1992 | Microactuators with moving magnets for linear, torsional or multiaxial motion
Wagner, B.; Engelmann, G.; Simon, J.; Benecke, W. | Conference Paper |
| 1992 | Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity
Fuhr, G.; Hagedorn, R.; Müller, T.; Benecke, W.; Wagner, B. | Journal Article |
| 1992 | Mikromechanische Einrichtung
Benecke, W. | Patent |
| 1992 | Pumping of water solutions in microfabricated electrohydrodynamic systems
Fuhr, G.; Hagedorn, R.; Müller, T.; Benecke, W.; Wagner, B. | Conference Paper |
| 1992 | A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process
Schnakenberg, U.; Wagner, B.; Benecke, W.; Riethmüller, W. | Conference Paper |
| 1991 | Development of commercial CMOS process-based technologies for the fabrication of smart accelerometers
Schnakenberg, U.; Wagner, B.; Benecke, W.; Riethmüller, W. | Conference Paper |
| 1991 | Dielektrischer Motor mit gesteuerter Laufrichtung und wahlweise kontinuierlichem oder diskontinuierlichem Lauf
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1991 | Electromagnetic microactuators with multiple degrees of freedom
Wagner, B.; Kreutzer, M.; Benecke, W. | Conference Paper |
| 1991 | Linear motion of dielectric particles and living cells in microfabricated structures induced by travelling electric fields
Fuhr, G.; Benecke, W.; Hagedorn, R.; Wagner, B. | Conference Paper |
| 1991 | Microfabricated actuator with moving permanent magnet
Wagner, B.; Benecke, W. | Conference Paper |
| 1991 | A monolithic integrated accelerometer fabricated by an industrial CMOS process
Riethmüller, W.; Benecke, W.; Schnakenberg, U. | Conference Paper |
| 1991 | Multiaxial electromagnetic microactuators
Wagner, B.; Benecke, W. | Conference Paper |
| 1991 | NH4OH-based etchants for silicon micromachining. Influence of additives and stability of passivation layers
Schnakenberg, U.; Benecke, W.; Löchel, B.; Ullerich, S.; Lange, P. | Conference Paper |
| 1991 | Silicon microactuators - activation mechanisms and scaling problems
Benecke, W. | Conference Paper |
| 1991 | SiON-Au double layer microactuator fabrication
Dong, Q.; Benecke, W.; Schliwinski, H.-J. | Conference Paper |
| 1991 | TMAHW etchants for silicon micromachining
Schnakenberg, U.; Lange, P.; Benecke, W. | Conference Paper |
| 1991 | The use of tetramethylammoniumhydroxide for silicon micromachining
Schnakenberg, U.; Benecke, W. | Conference Paper |
| 1990 | Aetzfluessigkeit zum anisotropen Aetzen von Silizium und Verfahren zu deren Verwendung
Schnakenberg, U.; Benecke, W. | Patent |
| 1990 | Dielektrischer Motor
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1990 | Dielektrisches mikromechanisches Element
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1990 | Experimental study on optically activated silicon resonators
Wagner, B.; Benecke, W.; Wölfelschneider, H.; Ramakrishnan, S.; Kist, R. | Conference Paper |
| 1990 | Magnetically driven microactuators - design considerations
Wagner, B.; Benecke, W. | Conference Paper |
| 1990 | Mikromechanische Einrichtung
Benecke, W.; Riethmueller, W. | Patent |
| 1990 | Mikromechanischer Beschleunigungsmesser
Benecke, W. | Patent |
| 1990 | Mikromechanischer Beschleunigungssensor mit kapazitiver Signalwandlung
Benecke, W.; Riethmueller, W. | Patent |
| 1990 | Mikropumpe zur Foerderung kleinster Gasmengen
Benecke, W. | Patent |
| 1990 | NH4OH-based etchants for silicon micromachining
Schnakenberg, U.; Löchel, B.; Benecke, W. | Journal Article |
| 1990 | Silicon micromachining for microsensors and microactuators
Benecke, W. | Conference Paper |
| 1989 | Anisotropes Aetzverfahren mit elektrochemischem Aetzstop
Benecke, W.; Loechel, B.; Schnakenberg, U. | Patent |
| 1989 | Applications of silicon-microactuators based on bimorph structures
Riethmüller, W.; Benecke, W. | Conference Paper |
| 1989 | Greifvorrichtung
Benecke, W.; Riethmueller, W. | Patent |
| 1989 | Micromechanical sensors
Benecke, W. | Conference Paper |
| 1989 | Mikromanipulator zur Bewegung von Objekten
Benecke, W. | Patent |
| 1989 | Mikromechanische Aktuatoren mit leistungsgesteuertem Antrieb
Benecke, W. | Conference Paper |
| 1989 | Miniaturized accelerometers based on silicon micromachining techniques
Benecke, W.; Riethmüller, W.; Schnakenberg, U.; Wagner, B. | Conference Paper |
| 1989 | Multi electron beam lithography - fabrication of a control unit
Schnakenberg, U.; Wallendszus, V.; Heuberger, A.; Lischke, B.; Benecke, W.; Müller, K.P. | Journal Article |
| 1989 | Technologien zur monolithischen Integration von mikromechanischen und mikroelektronischen Funktionsgruppen
Heuberger, A.; Riethmüller, W.; Benecke, W. | Conference Paper |
| 1988 | Mikromechanik1
Benecke, W. | Journal Article |
| 1988 | Mikromechanische Aktoren
Benecke, W. | Journal Article |
| 1988 | Mikrostrukturierung/Mikromechanik für die Sensorik
Benecke, W.; Heuberger, A. | Book Article |
| 1988 | Thermally excited silicon microactuators
Benecke, W.; Riethmüller, W. | Journal Article |
| 1987 | Micromechanical silicon actuators based on thermal expansion effects
Heuberger, A.; Schnakenberg, U.; Benecke, W.; Riethmüller, W. | Conference Paper |
| 1987 | Optically excited mechanical vibrations in micromachined silicon cantilever structures
Heuberger, A.; Schnakenberg, U.; Wölfelschneider, H.; Knoll, G.; Ramakrishnan, S.; Höfflin, H.; Benecke, W.; Kist, R.; Riethmüller, W. | Conference Paper |
| 1986 | Mikromechanik für Sensoren
Benecke, W. | Journal Article |
| 1985 | A frequency-selective, piezoresistive silicon vibration sensor
Csepregi, L.; Heuberger, A.; Kuehl, K.; Seidel, H.; Benecke, W. | Conference Paper |