Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1987Characterization of buried silicon-nitride formed by nitrogen implantation
Beltz, J.; Vogt, H.; Kaat, E.H. te; Zimmer, G.
Journal Article
1986Buried silicon nitride formed by nitrogen implantation
Vogt, H.; Beltz, J.; Zimmer, G.; Kaat, E.H. te
Conference Paper
1986The growth of buried silicon nitride formed by nitrogen implantation
Beltz, J.; Vogt, H.; Kaat, E.H. te; Zimmer, G.
Conference Paper