Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Combined ‘moth-eye’ structured and graded index-layer anti-reflecting coating for high index glasses
Kraus, Matthias; Diao, Zhaolu; Weishaupt, Klaus; Spatz, P. Joachim; Täschner, Kerstin; Bartzsch, Hagen; Schmittgens, Ralph; Brunner, Robert
Journal Article
2019Elektrisch isolierende und piezoelektrisch aktive Schichten
Barth, Stephan; Hildisch, Jan; Bartzsch, Hagen
Journal Article
2019Freeform and Laser Optical Coatings by Inline Magnetron Sputtering
Glöß, Daniel; Hartung, Ullrich; Drescher, Andy; Frach, Peter; Bartzsch, Hagen
Conference Paper
2019Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays
Barth, Stephan; Derenko, Susan; Bartzsch, Hagen; Zywitzki, Olaf; Modes, Thomas; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tino; Frach, P.; Eng, L.M.
Journal Article
2019Investigation of ScAlN for piezoelectric and ferroelectric applications
Petrich, R.; Bartsch, H.; Tonisch, K.; Jaekel, K.; Barth, S.; Bartzsch, H.; Glöß, D.; Delan, A.; Krischok, S.; Strehle, S.; Hoffmann, M.; Müller, J.
Conference Paper
2019Piezoelectric and Electrically Insulating Coatings
Barth, Stephan; Hildisch, Jan; Bartzsch, Hagen
Journal Article
2019Sputter deposition of undoped and doped SiO2 films for temperature compensated SAW components
Bartzsch, Hagen; Hildisch, Jan; Täschner, Kerstin; Barth, Stephan; Rückriem, Robert; Nestler, Matthias
Conference Paper
2019Untersuchung von ScAlN für piezoelektrische und ferroelektrische Anwendungen
Petrich, Rebecca; Bartsch, Heike; Tonisch, Katja; Jaekel, Konrad; Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Delan, Annekatrin; Krischok, S.; Strehle, S.; Hoffmann, Martin; Müller, Jens
Conference Paper
2018Coating technology for locally varying optical function on 2d and 3d elements
Glöß, Daniel; Bartzsch, Hagen; Goschurny, Thomas; Drescher, Andy; Hartung, Ullrich; Frach, Peter
Conference Paper
2018Influence of rf substrate bias on density and mechanical properties of sputtered SiO2 thin films for SAW applications
Täschner, Kerstin; Hildisch, Jahn; Bartzsch, Hagen; Modes, Thomas; Zywitzki, Olaf
Conference Paper
2018Piezoelektrische AlN- und AlScN-Schichten für die energieautarke Sensorik
Bartzsch, Hagen; Barth, Stephan; Glöß, Daniel; Frach, Peter; Suchaneck, Gunnar; Gerlach, Gerald
Conference Paper
2018Verfahren zum Abscheiden einer Schicht mittels einer Magnetronsputtereinrichtung
Bartzsch, Hagen; Frach, Peter; Hildisch, Jan
Patent
2017Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication
Patrovsky, Fabian; Fiehler, Vera; Derenko, Susan; Barth, Stephan; Bartzsch, Hagen; Ortstein, Katrin; Frach, Peter; Eng, L.M.
Journal Article
2017Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
Zywitzki, Olaf; Modes, Thomas; Barth, Stephan; Bartzsch, Hagen; Frach, Peter
Journal Article
2017Energy harvesting based on piezoelectric AlN and AlScN thin films deposited by high rate sputtering
Frach, Peter; Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel
Conference Paper
2017Large area precision coatings by pulse magnetron sputtering
Frach, Peter; Glöß, Daniel; Goschurny, Thomas; Drescher, Andy; Hartung, Ullrich; Bartzsch, Hagen; Heisig, Andreas; Grune, Harald; Leischnig, L.; Leischnig, S.; Bundesmann, C.
Conference Paper
2017Time-sequential working wavelength-selective filter for flat autostereoscopic displays
Barré, René de la; Bartmann, Roland; Jurk, Silvio; Kuhlmey, Mathias; Duckstein, Bernd; Seeboth, Arno; Lötzsch, Detlef; Rabe, Christian; Frach, Peter; Bartzsch, Hagen; Gittner, Matthias; Bruns, Stefan; Schottner, Gerhard; Fischer, Johanna
Journal Article
2017Verfahren zur Herstellung einer feldförmigen, homogenen Rod-Anordnung und deren Verwendung
Bartzsch, Hagen; Frach, Peter; Barth, Stephan; Eng, Lukas; Derenko, Susan
Patent
2017Verfahren zur Herstellung einer flexiblen Rod-Array-Anordnung und Rod-Array-Anordnung
Bartzsch, Hagen; Frach, Peter; Barth, Stephan; Eng, Lukas; Derenko, Susan
Patent
2016Adjustment of plasma properties in magnetron sputtering by pulsed powering in unipolar/bipolar hybrid pulse mode
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Gittner, Mathias; Labitzke, Rainer
Journal Article, Conference Paper
2016Deposition of rutile TiO2 films by pulsed and high power pulsed magnetron sputtering
Schönberger, W.; Bartzsch, H.; Schippel, S.; Bachmann, T.
Journal Article, Conference Paper
2016Energy Harvesting auf der Basis piezoelektrischer AlN- und AlScN -Dünnschichten
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Suchaneck, Gunnar; Gerlach, Gerald
Conference Paper
2016Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald
Journal Article
2016Precision optical coatings on large substrates by reactive magnetron sputtering
Frach, P.; Glöß, D.; Bartzsch, H.; Goschurny, T.; Drescher, A.; Gottfried, C.; Liebig, J.-S.
Conference Paper
2016Towards tuneable thin film filters with the use of liquid crystals
Bartzsch, H.; Frach, P.; Gittner, M.; Bruns, S.; Vergöhl, M.; Seeboth, A.; Lötzsch, D.; Rabe, C.
Conference Paper
2016Verfahren zum Abscheiden eines transparenten Mehrschichtsystems mit Kratzschutzeigenschaften
Bartzsch, Hagen; Täschner, Kerstin; Frach, Peter
Patent
2015Adjustment of Plasma Properties in Magnetron sputtering by Pulsed Powering in Mixed Unipolar and Bipolar Mode
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Gittner, Matthias; Labitzke, Rainer
Conference Paper
2015Deposition of piezoelectric films for energy harvesting
Barth, Stephan; Bartzsch, Hagen; Härter, H.
Journal Article
2015Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald
Conference Paper
2015Verfahren zum Abscheiden einer piezoelektrischen AlN-haltigen Schicht sowie eine AlN-haltige piezoelektrische Schicht
Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Barth, Stephan
Patent
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Conference Paper
2014Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1-XN films deposited by pulsed magnetron sputtering
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Zywitzki, Olaf; Herzog, Thomas; Walter, Susan; Heuer, Henning
Conference Paper
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Sputter deposition of dielectric films for high temperature sensor applications
Bartzsch, H.; Frach, P.; Gloss, D.; Barth, S.
Conference Paper
2014Sputter deposition of piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Barth, Stefan; Glöß, Daniel; Bartzsch, Hagen; Juuti, J.; Gerlach, Gerald; Suchaneck, Günther; Heuer, Henning; Walter, Susan; Herzog, Thomas; Frach, Peter; Palosaari, J.
Conference Paper
2014Sputter deposition of stress-controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Barth, Stefan; Bartzsch, Hagen; Glöß, Daniel; Walter, Susann; Herzog, Thomas; Frach, Peter; Heuer, Henning
Journal Article
2014Verfahren zum Abscheiden einer Schicht auf einer organischen Halbleiterschicht
Bartzsch, Hagen; Frach, Peter; Fahlteich, John; Gottfried, Christian
Patent
2013High power density pulse magnetron sputtering - process and film properties
Frach, Peter; Gottfried, Christian; Fietzke, Fred; Klostermann, Heidrun; Bartzsch, Hagen; Glöß, Daniel
Conference Paper
2013Reactive magnetron sputter technologies for precision optical coatings
Frach, P.; Bartzsch, H.; Gloess, D.; Taeschner, K.; Liebig, J.-S.
Conference Paper
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Herzog, Thomas; Walter, Susan; Heuer, Henning
Conference Paper
2012Low demage magnetron sputtering of TCO films
Bartzsch, H.; Glöß, D.; Frach, P.; Gittner, M.; Gottfried, C.; Suzuki, K.
Conference Paper
2012Magnetron assisted PECVD process for deposition of a-Si:H and µc-Si:H from a silane-hydrogen-argon gas mixture
Frach, P.; Pötschick, P.; Bartzsch, H.; Delan, A.
Conference Paper
2012A novel nanoparticle source for vacuum deposition
Schmittgens, R.; Holst, E.; Gerlach, G.; Bartzsch, H.; Glöß, D.; Maicu, M.; Frach, P.
Conference Paper
2012Präzisionsbeschichtung für Optik, Sensorik und Elektronik
Frach, Peter; Potinecke, Thomas; Slama, Alexander; Bartzsch, Hagen; Glöß, Daniel; Mehlstäubl, Marita
Book Article
2012Pulse Magnetron Sputtering with high power density-an attempt at a critical evaluation
Frach, P.; Gottfried, C.; Fietzke, F.; Klostermann, H.; Bartzsch, H.; Glöß, D.
Conference Paper
2012Pulse Magnetron Sputtering with High Power Density-Process and Film Properties
Frach, P.; Gottfried, C.; Fietzke, F.; Klostermann, H.; Bartzsch, H.; Gloess, D.
Conference Paper
2012Reactive pulse magnetron sputtering for deposition of piezoelectric AlN layers
Glöß, D.; Bartzsch, H.; Gittner, M.; Frach, P.; Herzog, T.; Walter, S.; Heuer, H.
Conference Paper
2012Scratch resistant optical coatings on polymers by magnetron-plasma-enhanced chemical vapor deposition
Täschner, K.; Bartzsch, H.; Frach, P.; Schultheiss, E.
Journal Article, Conference Paper
2012Smart ultrasonic sensors systems: Potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies
Walter, Susan; Herzog, Thomas; Heuer, Henning; Bartzsch, Hagen; Gloess, Daniel
Journal Article
2011The deposition of multilayer films on plastic substrates by reactive pulse magnetron sputtering
Fukagawa, T.; Kato, Y.; Bartzsch, H.; Suzuki, K.
Journal Article
2011Piezoelectric behaviour of sputtered aluminium nitride thin film for high frequency ultrasonic sensors
Herzog, T.; Walter, S.; Bartzsch, H.; Gittner, M.; Gloess, D.; Heuer, H.
Conference Paper
2011Process control in sputtering of optical coatings
Frach, P.; Bartzsch, H.; Glöß, D.; Täschner, K.
Conference Paper
2011Properties of piezoelectric AlN layers deposited by reactive pulse magnetron sputtering
Bartzsch, H.; Gittner, M.; Glöß, D.; Frach, P.; Herzog, T.; Walter, S.; Heuer, H.
Conference Paper
2011Smart ultrasonic sensors systems: Investigations on aluminum nitride thin films for the excitation of high frequency ultrasound
Walter, S.; Herzog, T.; Heuer, H.; Bartzsch, H.; Glöß, D.
Conference Paper
2010Advanced key technologies for magnetron sputtering and PECVD of inorganic and hybrid transparent coatings
Frach, P.; Glöß, D.; Bartzsch, H.; Täschner, K.; Liebig, J.; Schultheiss, E.
Journal Article
2010Multifunctional optical coatings on polymers deposited by pulse magnetron sputtering and magnetron enhanced PECVD
Frach, P.; Bartzsch, H.; Täschner, K.; Liebig, J.-S.
Journal Article, Conference Paper
2010Scratch resistant optical coatings on polymers by magnetron-PECVD
Taeschner, K.; Bartzsch, H.; Frach, P.; Schultheiß, E.
Conference Paper