Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Characterisation of EUV damage thresholds and imaging performance of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus
Conference Paper
2012EUV damage threshold measurements of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus
Journal Article
2005Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
Mann, K.; Barkusky, F.; Bayer, A.; Peth, C.; Töttger, H.; Feigl, T.; Kaiser, N.
Conference Paper
2005Formation and direct writing of color centers in LiF using a laser-induced extreme ultraviolet plasma in combination with a Schwarzschild objective
Barkusky, F.; Peth, C.; Mann, K.; Feigl, T.; Kaiser, N.
Journal Article
2005Imaging properties of different optics for EUV radiation
Bayer, A.; Barkusky, F.; Peth, C.; Töttger, H.; Mann, K.; Feigl, T.; Kaiser, N.
Conference Paper
2003Strukturoptimierung laserlithographisch hergestellter mikrooptischer Elemente
Barkusky, F.
Thesis