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| 2011 | One-megapixel monocrystalline-silicon micromirror array on CMOS driving electronics manufactured with very large-scale heterogeneous integration
Zimmer, F.; Lapisa, M.; Bakke, T.; Bring, M.; Stemme, G.; Niklaus, F. | Journal Article |
| 2011 | Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
Zimmer, F.; Lapisa, M.; Bakke, T.; Bring, M.; Stemme, G.; Niklaus, F. | Conference Paper |
| 2009 | Fabrication of large-scale mono-crystalline silicon micro-mirror arrays using adhesive wafer transfer bonding
Zimmer, F.; Niklaus, F.; Lapisa, M.; Ludewig, T.; Bring, M.; Friedrichs, M.; Bakke, T.; Schenk, H.; Wijngaart, W. van der | Conference Paper |
| 2008 | The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications
Zimmer, F.; Friedrichs, M.; Lapisa, M.; Niklaus, F.; Müller, M.; Bakke, T.; Schenk, H.; Lakner, H. | Conference Paper |
| 2008 | Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates
Schmidt, J.-U.; Friedrichs, M.; Bakke, T.; Voelker, B.; Rudloff, D.; Lakner, H. | Conference Paper |
| 2007 | Charging effects in spatial light modulators based on micromirrors
Dauderstädt, U.; Bakke, T.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.; Lakner, H. | Conference Paper |
| 2007 | Vorrichtung und Verfahren zum Haeusen mikromechanischer Systeme
Bakke, T.; Sandner, T. | Patent |
| 2006 | Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.; Schenk, H.; Lakner, H. | Conference Paper |
| 2006 | Micromirror Array of Monocrystalline Silicon
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D. | Conference Paper |
| 2006 | One megapixel SLM with high optical fill factor and low creep actuators
Friedrichs, M.; Schmidt, J.; Duerr, P.; Bakke, T. | Conference Paper |
| 2005 | Drift free, highly planar silicon micromirror arrays
Völker, B.; Friedrichs, M.; Rudloff, D.; Bakke, T. | Conference Paper |
| 2005 | Etch stop materials for release by vapor HF etching
Bakke, T.; Schmidt, J.; Friedrichs, M.; Völker, B. | Conference Paper |
| 2005 | Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H. | Conference Paper |
| 2005 | Wafer bonding for optical MEMS
Bakke, T.; Völker, B.; Schenk, H.; Radu, I.; Reiche, M. | Conference Paper |
| 2004 | Adiabatic mode converters for photonic integrated circuits and devices
Vawter, G.A.; Bakke, T.; Mukherjee, S.; Sullivan, C. | Conference Paper |
| 2003 | Characterization of spatial light modulators for micro lithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H. | Conference Paper |
| 2003 | Characterization of spatial light modulators for microlithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H. | Conference Paper |
| 2003 | Integration of polymeric optical waveguides with SOI MEMS structures
Bakke, T.; Sullivan, C.T. | Conference Paper |