Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 1995 | Novel high density plasma tool for large area flat panel display etching
Heinrich, F.; Bänzinger, U.; Jentzsch, A.; Neumann, G.; Huth, C. | Conference Paper |
| 1992 | Analysis of large-area beam attacks on surfaces and testing of etching reactions
Bänzinger, U.; Hoffmann, P.; Neumann, G.; Scheer, H.-C.; Schneemann, B.; Köhler, U.; Huth, C.; Janes, J. | Journal Article |