Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995Novel high density plasma tool for large area flat panel display etching
Heinrich, F.; Bänzinger, U.; Jentzsch, A.; Neumann, G.; Huth, C.
Conference Paper
1992Analysis of large-area beam attacks on surfaces and testing of etching reactions
Bänzinger, U.; Hoffmann, P.; Neumann, G.; Scheer, H.-C.; Schneemann, B.; Köhler, U.; Huth, C.; Janes, J.
Journal Article