Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Characterization of silicon-wafer bonding for power MEMS applications
Ayon, A.A.; Zhang, X.; Turner, K.T.; Choi, D.W.; Miller, B.; Nagle, S.F.; Spearing, S.M.
Journal Article
2003Igniters and temperature sensors for a microscale combustion system
Zhang, X.; Mehra, A.; Ayon, A.A.; Waitz, I.A.
Journal Article
2003Multistack silicon-direct wafer bonding for 3D MEMS manufacturing
Miki, N.; Zhang, X.; Khanna, R.; Ayon, A.A.; Ward, D.; Spearing, S.M.
Journal Article