Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Datengetriebene Produktionsoptimierung in der Montage
Palm, Daniel; Ohlhausen, Peter; Braun, Anja; Welte, Rebecca; Styr, Angelika; Walter, Felix; Meindorfer, Tobias; Schmitt, Christian; Seeger, Elena; Altmann, Ruben; Sai, Brandon
Journal Article
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Conference Paper
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Journal Article
2015Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning
Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.
Conference Paper
2015Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Conference Paper
2012Assessment of a FOUP conditioning equipment for advanced semiconductor application
Otto, M.; Rioufrays, S.; Favre, A.; Leibold, A.; Altmann, R.; Gennaro, S.; Dell'Anna, R.; Canteri, R.; Pfitzner, L.
Conference Paper
2012Reliable quantification of inorganic contamination by TXRF
Müller, M.; Nutsch, A.; Altmann, R.; Borionetti, G.; Holz, T.; Mantler, C.; Hönicke, P.; Kolbe, M.; Beckhoff, B.
Conference Paper
2011Analysis of contaminated oxide-silicon interfaces
Polignano, M.L.; Codegoni, D.; Castellano, L.; Greco, S.; Borionetti, G.; Bonoli, F.; Nutsch, A.; Altmann, R.; Leibold, A.; Otto, M.; Monge, P.; Riva, C.
Conference Paper
2009Comparability of TXRF Systems at Different Laboratories
Nutsch, A.; Beckhoff, B.; Altmann, R.; Polignano, M.; Cazzini, E.; Codegoni, D.; Borionetti, G.; Kolbe, M.; Mueller, M; Mantler, C.; Streli, C.
Conference Paper
2009Complementary metrology within a European joint laboratory
Nutsch, A.; Beckhoff, B.; Altmann, R.; Berg, J.A. van den; Giubertoni, D.; Hoenicke, P.; Bersani, M.; Leibold, A.; Meirer, F.; Müller, M.; Pepponi, G.; Otto, M.; Petrik, P.; Reading, M.; Pfitzner, L.; Ryssel, H.
Conference Paper
2009Highly sensitive detection of inorganic contamination
Beckhoff, B.; Nutsch, A.; Altmann, R.; Borionetti, G.; Pello, C.; Polignano, M.L.; Codegoni, D.; Grasso, S.; Cazzini, E.; Bersani, M.; Lazzeri, P.; Gennaro, S.; Kolbe, M.; Müller, M.; Kregsamer, P.; Posch, F.
Conference Paper
2009Revealing Copper Contamination in Silicon after Low Temperature Treatments
Polignano, M.; Brivio, J.; Codegoni, D.; Grasso, S.; Altmann, R.; Nutsch, A.; Pavia, G.
Conference Paper