Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Enabling energy efficiency and polarity control in germanium nanowire transistors by individually gated nanojunctions
Trommer, Jens; Heinzig, André; Mühle, Uwe; Löffler, Markus; Winzer, Annett; Jordan, Paul M.; Beister, Jürgen; Baldauf, Tim; Geidel, Marion; Adolphi, Barbara; Zschech, Ehrenfried; Mikolajick, Thomas; Weber, Walter Michael
Journal Article
2013Nanoimprint assisted inkjet printing to fabricate sub-micron channel organic field effect transistors
Teng, L.; Plötner, M.; Türke, A.; Adolphi, B.; Finn, A.; Kirchner, R.; Fischer, W.-J.
Journal Article
2012Electrical evaluation of Ru-W(-N), Ru-Ta(-N) and Ru-Mn films as Cu diffusion barriers
Wojcik, H.; Kaltofen, R.; Merkel, U.; Krien, C.; Strehle, S.; Gluch, J.; Knaut, M.; Wenzel, C.; Preusse, A.; Bartha, J.W.; Geidel, M.; Adolphi, B.; Neumann, V.; Liske, R.; Munnik, F.
Journal Article, Conference Paper
2011Chemical functional polymers for direct UV assisted nanoimprinting of polymeric photonic microring resonators
Kirchner, R.; Kaiser, M.-K.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.
Journal Article
2011Comparison of PVD, PECVD and PEALD Ru-TaN films with high Ru concentration for direct Cu plating
Wojcik, H.; Merkel, U.; Bartha, J.W.; Li, J.; Lehninger, D.; Engelmann, H.J.; Popatov, P.; Gluch, J.; Knaut, M.; Strehle, S.; Wenzel, C.; Adolphi, B.; Neumann, V.; Liske, R.
Conference Paper
2011Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering
Suchaneck, G.; Labitzke, R.; Adolphi, B.; Jastrabik, L.; Adamek, P.; Drahokoupil, J.; Hubicka, Z.; Kiselev, D.A.; Kholkin, A.L.; Gerlach, G.; Dejneka, A.
Journal Article, Conference Paper
2011Investigations on Ru-Mn films as plateable Cu diffusion barriers
Wojcik, H.; Kaltofen, R.; Krien, C.; Merkel, U.; Wenzel, C.; Bartha, J.W.; Friedemann, M.; Adolphi, B.; Liske, R.; Neumann, V.; Geidel, M.
Conference Paper
2010Antisticking layers on antireflective chromium for hybrid (CNP) nanoimprint molds
Kirchner, R.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.; Behringer, U.F.W.; Maurer, W.
Conference Paper
2009Functionalization of Polymer Sensor Surfaces by Oxygen Plasma Treatment
Landgraf, R.; Kaiser, M.-K.; Posseckardt, J.; Adolphi, B.; Fischer, W.-J.
Conference Paper, Journal Article
2009Imprinting of chemical functionalized acrylates for bioanalytics
Kirchner, R.; Kaiser, M.-K.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.
Abstract
2009Properties of plasma-enhanced atomic layer deposition-grown tantalum carbonitride thin films
Hossbach, C.; Teichert, S.; Thomas, J.; Wilde, L.; Wojcik, H.; Schmidt, D.; Adolphi, B.; Bertram, M.; Mühle, U.; Albert, M.; Menzel, S.; Hintze, B.; Bartha, J.W.
Journal Article
2005Hafnium oxide for optical applications deposited by different CMOS compatible methods
Albert, M.; Rößler, T.; Adolphi, B.; Bartha, J.W.; Grüger, H.; Kunath, C.; Sorge, S.
Conference Paper
2002Improvement of Ta-based thin-film barriers on copper by ion- implantation of nitrogen and oxygen
Wieser, E.; Peikert, M.; Wenzel, C.; Schreiber, J.; Bartha, J.W.; Bendjus, B.; Melov, V.V.; Reuther, H.; Mucklich, A.; Adolphi, B.; Fischer, D.
Journal Article
2002Integration of high dielectric Ba0.5Sr0.5TiO3 films into amorphous TaSiN barrier layer structures
Wenger, C.; Albert, M.; Adolphi, B.; Heuer, H.; Bartha, J.W.; Schlenkrich, F.
Journal Article
2000Studies on phase transformations of Cu-phthalocyanine thin films
Berger, O.; Fischer, W.-J.; Adolphi, B.; Tierbach, S.; Melov, V.G.; Schreiber, J.
Journal Article